id	sid	tid	token	lemma	pos
xp68kd20p66	1	1	optical	optical	ADJ
xp68kd20p66	1	2	resonator	resonator	NOUN
xp68kd20p66	1	3	is	be	AUX
xp68kd20p66	1	4	an	an	DET
xp68kd20p66	1	5	essential	essential	ADJ
xp68kd20p66	1	6	element	element	NOUN
xp68kd20p66	1	7	in	in	ADP
xp68kd20p66	1	8	modern	modern	ADJ
xp68kd20p66	1	9	optical	optical	ADJ
xp68kd20p66	1	10	and	and	CCONJ
xp68kd20p66	1	11	optoelectronic	optoelectronic	ADJ
xp68kd20p66	1	12	devices	device	NOUN
xp68kd20p66	1	13	.	.	PUNCT
xp68kd20p66	2	1	the	the	DET
xp68kd20p66	2	2	advances	advance	NOUN
xp68kd20p66	2	3	in	in	ADP
xp68kd20p66	2	4	the	the	DET
xp68kd20p66	2	5	field	field	NOUN
xp68kd20p66	2	6	of	of	ADP
xp68kd20p66	2	7	cavity	cavity	NOUN
xp68kd20p66	2	8	quantum	quantum	NOUN
xp68kd20p66	2	9	electrodynamics	electrodynamic	NOUN
xp68kd20p66	2	10	(	(	PUNCT
xp68kd20p66	2	11	cqed	cqed	PROPN
xp68kd20p66	2	12	)	)	PUNCT
xp68kd20p66	2	13	requires	require	VERB
xp68kd20p66	2	14	high	high	ADJ
xp68kd20p66	2	15	quality	quality	NOUN
xp68kd20p66	2	16	optical	optical	ADJ
xp68kd20p66	2	17	resonators	resonator	NOUN
xp68kd20p66	2	18	that	that	PRON
xp68kd20p66	2	19	goes	go	VERB
xp68kd20p66	2	20	beyond	beyond	ADP
xp68kd20p66	2	21	the	the	DET
xp68kd20p66	2	22	diffraction	diffraction	NOUN
xp68kd20p66	2	23	limit	limit	NOUN
xp68kd20p66	2	24	of	of	ADP
xp68kd20p66	2	25	light	light	NOUN
xp68kd20p66	2	26	.	.	PUNCT
xp68kd20p66	3	1	consequently	consequently	ADV
xp68kd20p66	3	2	,	,	PUNCT
xp68kd20p66	3	3	subdiffraction	subdiffraction	ADJ
xp68kd20p66	3	4	optical	optical	ADJ
xp68kd20p66	3	5	resonator	resonator	NOUN
xp68kd20p66	3	6	has	have	AUX
xp68kd20p66	3	7	become	become	VERB
xp68kd20p66	3	8	the	the	DET
xp68kd20p66	3	9	foundation	foundation	NOUN
xp68kd20p66	3	10	for	for	ADP
xp68kd20p66	3	11	next	next	ADJ
xp68kd20p66	3	12	-	-	PUNCT
xp68kd20p66	3	13	generation	generation	NOUN
xp68kd20p66	3	14	mid	mid	ADJ
xp68kd20p66	3	15	-	-	ADJ
xp68kd20p66	3	16	infrared	infrared	ADJ
xp68kd20p66	3	17	(	(	PUNCT
xp68kd20p66	3	18	mir	mir	PROPN
xp68kd20p66	3	19	)	)	PUNCT
xp68kd20p66	3	20	emitters	emitter	NOUN
xp68kd20p66	3	21	,	,	PUNCT
xp68kd20p66	3	22	sensors	sensor	NOUN
xp68kd20p66	3	23	,	,	PUNCT
xp68kd20p66	3	24	etc	etc	X
xp68kd20p66	3	25	.	.	X
xp68kd20p66	3	26	in	in	ADP
xp68kd20p66	3	27	this	this	DET
xp68kd20p66	3	28	work	work	NOUN
xp68kd20p66	3	29	,	,	PUNCT
xp68kd20p66	3	30	we	we	PRON
xp68kd20p66	3	31	demonstrate	demonstrate	VERB
xp68kd20p66	3	32	subdiffraction	subdiffraction	ADJ
xp68kd20p66	3	33	optical	optical	ADJ
xp68kd20p66	3	34	resonators	resonator	NOUN
xp68kd20p66	3	35	based	base	VERB
xp68kd20p66	3	36	on	on	ADP
xp68kd20p66	3	37	two	two	NUM
xp68kd20p66	3	38	material	material	NOUN
xp68kd20p66	3	39	systems	system	NOUN
xp68kd20p66	3	40	:	:	PUNCT
xp68kd20p66	3	41	the	the	DET
xp68kd20p66	3	42	polar	polar	ADJ
xp68kd20p66	3	43	semiconductors	semiconductor	NOUN
xp68kd20p66	3	44	and	and	CCONJ
xp68kd20p66	3	45	all	all	DET
xp68kd20p66	3	46	-	-	PUNCT
xp68kd20p66	3	47	semiconductor	semiconductor	NOUN
xp68kd20p66	3	48	hyperbolic	hyperbolic	ADJ
xp68kd20p66	3	49	metamaterials	metamaterial	NOUN
xp68kd20p66	3	50	(	(	PUNCT
xp68kd20p66	3	51	hmms).we	hmms).we	X
xp68kd20p66	3	52	first	first	ADV
xp68kd20p66	3	53	introduce	introduce	VERB
xp68kd20p66	3	54	the	the	DET
xp68kd20p66	3	55	basic	basic	ADJ
xp68kd20p66	3	56	dielectric	dielectric	ADJ
xp68kd20p66	3	57	property	property	NOUN
xp68kd20p66	3	58	of	of	ADP
xp68kd20p66	3	59	polar	polar	ADJ
xp68kd20p66	3	60	semiconductors	semiconductor	NOUN
xp68kd20p66	3	61	as	as	ADV
xp68kd20p66	3	62	well	well	ADV
xp68kd20p66	3	63	as	as	ADP
xp68kd20p66	3	64	the	the	DET
xp68kd20p66	3	65	concepts	concept	NOUN
xp68kd20p66	3	66	of	of	ADP
xp68kd20p66	3	67	travelling	travel	VERB
xp68kd20p66	3	68	and	and	CCONJ
xp68kd20p66	3	69	localized	localize	VERB
xp68kd20p66	3	70	surface	surface	NOUN
xp68kd20p66	3	71	phonon	phonon	NOUN
xp68kd20p66	3	72	polaritons	polariton	NOUN
xp68kd20p66	3	73	(	(	PUNCT
xp68kd20p66	3	74	sphp	sphp	PROPN
xp68kd20p66	3	75	)	)	PUNCT
xp68kd20p66	3	76	.	.	PUNCT
xp68kd20p66	4	1	the	the	DET
xp68kd20p66	4	2	numerical	numerical	ADJ
xp68kd20p66	4	3	simulations	simulation	NOUN
xp68kd20p66	4	4	and	and	CCONJ
xp68kd20p66	4	5	experimental	experimental	ADJ
xp68kd20p66	4	6	results	result	NOUN
xp68kd20p66	4	7	of	of	ADP
xp68kd20p66	4	8	subwavelength	subwavelength	NOUN
xp68kd20p66	4	9	phononic	phononic	ADJ
xp68kd20p66	4	10	resonators	resonator	NOUN
xp68kd20p66	4	11	in	in	ADP
xp68kd20p66	4	12	gan	gan	PROPN
xp68kd20p66	4	13	are	be	AUX
xp68kd20p66	4	14	presented	present	VERB
xp68kd20p66	4	15	.	.	PUNCT
xp68kd20p66	5	1	in	in	ADP
xp68kd20p66	5	2	the	the	DET
xp68kd20p66	5	3	second	second	ADJ
xp68kd20p66	5	4	part	part	NOUN
xp68kd20p66	5	5	,	,	PUNCT
xp68kd20p66	5	6	the	the	DET
xp68kd20p66	5	7	theory	theory	NOUN
xp68kd20p66	5	8	of	of	ADP
xp68kd20p66	5	9	hmm	hmm	PROPN
xp68kd20p66	5	10	and	and	CCONJ
xp68kd20p66	5	11	hmm	hmm	ADV
xp68kd20p66	5	12	based	base	VERB
xp68kd20p66	5	13	optical	optical	ADJ
xp68kd20p66	5	14	resonators	resonator	NOUN
xp68kd20p66	5	15	is	be	AUX
xp68kd20p66	5	16	introduced	introduce	VERB
xp68kd20p66	5	17	,	,	PUNCT
xp68kd20p66	5	18	followed	follow	VERB
xp68kd20p66	5	19	by	by	ADP
xp68kd20p66	5	20	the	the	DET
xp68kd20p66	5	21	simulation	simulation	NOUN
xp68kd20p66	5	22	and	and	CCONJ
xp68kd20p66	5	23	experimental	experimental	ADJ
xp68kd20p66	5	24	results	result	NOUN
xp68kd20p66	5	25	on	on	ADP
xp68kd20p66	5	26	fabricated	fabricate	VERB
xp68kd20p66	5	27	devices	device	NOUN
xp68kd20p66	5	28	.	.	PUNCT
xp68kd20p66	6	1	we	we	PRON
xp68kd20p66	6	2	thoroughly	thoroughly	ADV
xp68kd20p66	6	3	investigate	investigate	VERB
xp68kd20p66	6	4	the	the	DET
xp68kd20p66	6	5	mode	mode	NOUN
xp68kd20p66	6	6	volume	volume	NOUN
xp68kd20p66	6	7	,	,	PUNCT
xp68kd20p66	6	8	q	q	NOUN
xp68kd20p66	6	9	-	-	PUNCT
xp68kd20p66	6	10	factors	factor	NOUN
xp68kd20p66	6	11	and	and	CCONJ
xp68kd20p66	6	12	radiation	radiation	NOUN
xp68kd20p66	6	13	patterns	pattern	NOUN
xp68kd20p66	6	14	of	of	ADP
xp68kd20p66	6	15	the	the	DET
xp68kd20p66	6	16	resonators	resonator	NOUN
xp68kd20p66	6	17	.	.	PUNCT
xp68kd20p66	7	1	furthermore	furthermore	ADV
xp68kd20p66	7	2	,	,	PUNCT
xp68kd20p66	7	3	the	the	DET
xp68kd20p66	7	4	hmm	hmm	PROPN
xp68kd20p66	7	5	resonators	resonator	NOUN
xp68kd20p66	7	6	'	'	PART
xp68kd20p66	7	7	optical	optical	ADJ
xp68kd20p66	7	8	emission	emission	NOUN
xp68kd20p66	7	9	property	property	NOUN
xp68kd20p66	7	10	is	be	AUX
xp68kd20p66	7	11	investigated	investigate	VERB
xp68kd20p66	7	12	using	use	VERB
xp68kd20p66	7	13	the	the	DET
xp68kd20p66	7	14	modified	modify	VERB
xp68kd20p66	7	15	long	long	ADJ
xp68kd20p66	7	16	wavelength	wavelength	NOUN
xp68kd20p66	7	17	approximation	approximation	NOUN
xp68kd20p66	7	18	(	(	PUNCT
xp68kd20p66	7	19	mlwa	mlwa	PROPN
xp68kd20p66	7	20	)	)	PUNCT
xp68kd20p66	7	21	.	.	PUNCT
xp68kd20p66	8	1	specifically	specifically	ADV
xp68kd20p66	8	2	,	,	PUNCT
xp68kd20p66	8	3	we	we	PRON
xp68kd20p66	8	4	thoroughly	thoroughly	ADV
xp68kd20p66	8	5	study	study	VERB
xp68kd20p66	8	6	the	the	DET
xp68kd20p66	8	7	impact	impact	NOUN
xp68kd20p66	8	8	on	on	ADP
xp68kd20p66	8	9	q	q	NOUN
xp68kd20p66	8	10	-	-	PUNCT
xp68kd20p66	8	11	factors	factor	NOUN
xp68kd20p66	8	12	,	,	PUNCT
xp68kd20p66	8	13	radiative	radiative	ADJ
xp68kd20p66	8	14	and	and	CCONJ
xp68kd20p66	8	15	non	non	ADJ
xp68kd20p66	8	16	-	-	ADJ
xp68kd20p66	8	17	radiative	radiative	ADJ
xp68kd20p66	8	18	decay	decay	NOUN
xp68kd20p66	8	19	rates	rate	NOUN
xp68kd20p66	8	20	by	by	ADP
xp68kd20p66	8	21	changing	change	VERB
xp68kd20p66	8	22	the	the	DET
xp68kd20p66	8	23	resonator	resonator	NOUN
xp68kd20p66	8	24	geometry	geometry	NOUN
xp68kd20p66	8	25	and	and	CCONJ
xp68kd20p66	8	26	material	material	NOUN
xp68kd20p66	8	27	composition	composition	NOUN
xp68kd20p66	8	28	.	.	PUNCT
xp68kd20p66	9	1	as	as	ADP
xp68kd20p66	9	2	for	for	ADP
xp68kd20p66	9	3	future	future	ADJ
xp68kd20p66	9	4	work	work	NOUN
xp68kd20p66	9	5	,	,	PUNCT
xp68kd20p66	9	6	we	we	PRON
xp68kd20p66	9	7	show	show	VERB
xp68kd20p66	9	8	two	two	NUM
xp68kd20p66	9	9	possible	possible	ADJ
xp68kd20p66	9	10	directions	direction	NOUN
xp68kd20p66	9	11	with	with	ADP
xp68kd20p66	9	12	preliminary	preliminary	ADJ
xp68kd20p66	9	13	simulation	simulation	NOUN
xp68kd20p66	9	14	and	and	CCONJ
xp68kd20p66	9	15	experimental	experimental	ADJ
xp68kd20p66	9	16	results	result	NOUN
xp68kd20p66	9	17	.	.	PUNCT
xp68kd20p66	10	1	we	we	PRON
xp68kd20p66	10	2	first	first	ADV
xp68kd20p66	10	3	propose	propose	VERB
xp68kd20p66	10	4	the	the	DET
xp68kd20p66	10	5	quantum	quantum	PROPN
xp68kd20p66	10	6	well	well	ADV
xp68kd20p66	10	7	embedded	embed	VERB
xp68kd20p66	10	8	hmm	hmm	NOUN
xp68kd20p66	10	9	structures	structure	NOUN
xp68kd20p66	10	10	for	for	ADP
xp68kd20p66	10	11	resonant	resonant	ADJ
xp68kd20p66	10	12	light	light	ADJ
xp68kd20p66	10	13	-	-	PUNCT
xp68kd20p66	10	14	mater	mater	NOUN
xp68kd20p66	10	15	coupling	coupling	NOUN
xp68kd20p66	10	16	and	and	CCONJ
xp68kd20p66	10	17	cqed	cqed	ADJ
xp68kd20p66	10	18	applications	application	NOUN
xp68kd20p66	10	19	,	,	PUNCT
xp68kd20p66	10	20	followed	follow	VERB
xp68kd20p66	10	21	by	by	ADP
xp68kd20p66	10	22	the	the	DET
xp68kd20p66	10	23	possibility	possibility	NOUN
xp68kd20p66	10	24	of	of	ADP
xp68kd20p66	10	25	using	use	VERB
xp68kd20p66	10	26	gan	gan	PROPN
xp68kd20p66	10	27	and	and	CCONJ
xp68kd20p66	10	28	hmms	hmms	ADJ
xp68kd20p66	10	29	as	as	ADP
xp68kd20p66	10	30	high	high	ADJ
xp68kd20p66	10	31	-	-	PUNCT
xp68kd20p66	10	32	index	index	NOUN
xp68kd20p66	10	33	dielectric	dielectric	PROPN
xp68kd20p66	10	34	mie	mie	PROPN
xp68kd20p66	10	35	resonators	resonator	NOUN
xp68kd20p66	10	36	.	.	PUNCT