id	sid	tid	token	lemma	pos
xp68kd19z6x	1	1	the	the	DET
xp68kd19z6x	1	2	main	main	ADJ
xp68kd19z6x	1	3	focus	focus	NOUN
xp68kd19z6x	1	4	in	in	ADP
xp68kd19z6x	1	5	our	our	PRON
xp68kd19z6x	1	6	work	work	NOUN
xp68kd19z6x	1	7	is	be	AUX
xp68kd19z6x	1	8	the	the	DET
xp68kd19z6x	1	9	integration	integration	NOUN
xp68kd19z6x	1	10	of	of	ADP
xp68kd19z6x	1	11	atomic	atomic	ADJ
xp68kd19z6x	1	12	layer	layer	NOUN
xp68kd19z6x	1	13	deposited	deposit	VERB
xp68kd19z6x	1	14	oxide	oxide	NOUN
xp68kd19z6x	1	15	for	for	ADP
xp68kd19z6x	1	16	metallic	metallic	ADJ
xp68kd19z6x	1	17	single	single	ADJ
xp68kd19z6x	1	18	electron	electron	NOUN
xp68kd19z6x	1	19	transistors	transistor	NOUN
xp68kd19z6x	1	20	(	(	PUNCT
xp68kd19z6x	1	21	set	set	VERB
xp68kd19z6x	1	22	's	's	PART
xp68kd19z6x	1	23	)	)	PUNCT
xp68kd19z6x	1	24	.	.	PUNCT
xp68kd19z6x	2	1	currently	currently	ADV
xp68kd19z6x	2	2	,	,	PUNCT
xp68kd19z6x	2	3	the	the	DET
xp68kd19z6x	2	4	choice	choice	NOUN
xp68kd19z6x	2	5	of	of	ADP
xp68kd19z6x	2	6	set	set	ADJ
xp68kd19z6x	2	7	material	material	NOUN
xp68kd19z6x	2	8	is	be	AUX
xp68kd19z6x	2	9	limited	limit	VERB
xp68kd19z6x	2	10	to	to	ADP
xp68kd19z6x	2	11	metals	metal	NOUN
xp68kd19z6x	2	12	that	that	PRON
xp68kd19z6x	2	13	can	can	AUX
xp68kd19z6x	2	14	be	be	AUX
xp68kd19z6x	2	15	thermally	thermally	ADV
xp68kd19z6x	2	16	oxidized	oxidize	VERB
xp68kd19z6x	2	17	,	,	PUNCT
xp68kd19z6x	2	18	which	which	PRON
xp68kd19z6x	2	19	has	have	VERB
xp68kd19z6x	2	20	its	its	PRON
xp68kd19z6x	2	21	limitations	limitation	NOUN
xp68kd19z6x	2	22	in	in	ADP
xp68kd19z6x	2	23	terms	term	NOUN
xp68kd19z6x	2	24	of	of	ADP
xp68kd19z6x	2	25	thickness	thickness	NOUN
xp68kd19z6x	2	26	control	control	NOUN
xp68kd19z6x	2	27	for	for	ADP
xp68kd19z6x	2	28	ultra	ultra	ADJ
xp68kd19z6x	2	29	-	-	ADJ
xp68kd19z6x	2	30	thin	thin	ADJ
xp68kd19z6x	2	31	tunnel	tunnel	NOUN
xp68kd19z6x	2	32	barrier	barrier	NOUN
xp68kd19z6x	2	33	oxides	oxide	NOUN
xp68kd19z6x	2	34	.	.	PUNCT
xp68kd19z6x	3	1	ald	ald	PROPN
xp68kd19z6x	3	2	oxides	oxides	PROPN
xp68kd19z6x	3	3	,	,	PUNCT
xp68kd19z6x	3	4	on	on	ADP
xp68kd19z6x	3	5	the	the	DET
xp68kd19z6x	3	6	other	other	ADJ
xp68kd19z6x	3	7	hand	hand	NOUN
xp68kd19z6x	3	8	,	,	PUNCT
xp68kd19z6x	3	9	can	can	AUX
xp68kd19z6x	3	10	be	be	AUX
xp68kd19z6x	3	11	deposited	deposit	VERB
xp68kd19z6x	3	12	on	on	ADP
xp68kd19z6x	3	13	a	a	DET
xp68kd19z6x	3	14	variety	variety	NOUN
xp68kd19z6x	3	15	of	of	ADP
xp68kd19z6x	3	16	metals	metal	NOUN
xp68kd19z6x	3	17	and	and	CCONJ
xp68kd19z6x	3	18	have	have	AUX
xp68kd19z6x	3	19	been	be	AUX
xp68kd19z6x	3	20	successfully	successfully	ADV
xp68kd19z6x	3	21	integrated	integrate	VERB
xp68kd19z6x	3	22	into	into	ADP
xp68kd19z6x	3	23	current	current	ADJ
xp68kd19z6x	3	24	cmos	cmos	NOUN
xp68kd19z6x	3	25	processes	process	NOUN
xp68kd19z6x	3	26	.	.	PUNCT
xp68kd19z6x	4	1	our	our	PRON
xp68kd19z6x	4	2	goal	goal	NOUN
xp68kd19z6x	4	3	is	be	AUX
xp68kd19z6x	4	4	to	to	PART
xp68kd19z6x	4	5	establish	establish	VERB
xp68kd19z6x	4	6	a	a	DET
xp68kd19z6x	4	7	fabrication	fabrication	NOUN
xp68kd19z6x	4	8	process	process	NOUN
xp68kd19z6x	4	9	that	that	PRON
xp68kd19z6x	4	10	uses	use	VERB
xp68kd19z6x	4	11	alumina	alumina	PROPN
xp68kd19z6x	4	12	as	as	ADP
xp68kd19z6x	4	13	tunnel	tunnel	NOUN
xp68kd19z6x	4	14	barriers	barrier	NOUN
xp68kd19z6x	4	15	sandwiched	sandwich	VERB
xp68kd19z6x	4	16	between	between	ADP
xp68kd19z6x	4	17	two	two	NUM
xp68kd19z6x	4	18	platinum	platinum	NOUN
xp68kd19z6x	4	19	electrodes	electrode	NOUN
xp68kd19z6x	4	20	.	.	PUNCT
xp68kd19z6x	5	1	because	because	SCONJ
xp68kd19z6x	5	2	set	set	NOUN
xp68kd19z6x	5	3	's	's	PART
xp68kd19z6x	5	4	are	be	AUX
xp68kd19z6x	5	5	very	very	ADV
xp68kd19z6x	5	6	sensitive	sensitive	ADJ
xp68kd19z6x	5	7	to	to	ADP
xp68kd19z6x	5	8	background	background	NOUN
xp68kd19z6x	5	9	charge	charge	NOUN
xp68kd19z6x	5	10	,	,	PUNCT
xp68kd19z6x	5	11	it	it	PRON
xp68kd19z6x	5	12	is	be	AUX
xp68kd19z6x	5	13	an	an	DET
xp68kd19z6x	5	14	ideal	ideal	ADJ
xp68kd19z6x	5	15	candidate	candidate	NOUN
xp68kd19z6x	5	16	for	for	ADP
xp68kd19z6x	5	17	an	an	DET
xp68kd19z6x	5	18	on	on	ADP
xp68kd19z6x	5	19	-	-	PUNCT
xp68kd19z6x	5	20	chip	chip	NOUN
xp68kd19z6x	5	21	characterization	characterization	NOUN
xp68kd19z6x	5	22	tool	tool	NOUN
xp68kd19z6x	5	23	to	to	PART
xp68kd19z6x	5	24	control	control	VERB
xp68kd19z6x	5	25	and	and	CCONJ
xp68kd19z6x	5	26	monitor	monitor	VERB
xp68kd19z6x	5	27	the	the	DET
xp68kd19z6x	5	28	quality	quality	NOUN
xp68kd19z6x	5	29	of	of	ADP
xp68kd19z6x	5	30	high	high	ADJ
xp68kd19z6x	5	31	-	-	PUNCT
xp68kd19z6x	5	32	k	k	PROPN
xp68kd19z6x	5	33	dielectrics	dielectric	NOUN
xp68kd19z6x	5	34	currently	currently	ADV
xp68kd19z6x	5	35	used	use	VERB
xp68kd19z6x	5	36	in	in	ADP
xp68kd19z6x	5	37	cmos	cmos	NOUN
xp68kd19z6x	5	38	processing	processing	NOUN
xp68kd19z6x	5	39	.	.	PUNCT