id	sid	tid	token	lemma	pos
xd07gq70930	1	1	in	in	ADP
xd07gq70930	1	2	recent	recent	ADJ
xd07gq70930	1	3	years	year	NOUN
xd07gq70930	1	4	,	,	PUNCT
xd07gq70930	1	5	electromagnetic	electromagnetic	ADJ
xd07gq70930	1	6	waves	wave	NOUN
xd07gq70930	1	7	in	in	ADP
xd07gq70930	1	8	the	the	DET
xd07gq70930	1	9	thz	thz	PROPN
xd07gq70930	1	10	frequency	frequency	NOUN
xd07gq70930	1	11	region	region	NOUN
xd07gq70930	1	12	have	have	AUX
xd07gq70930	1	13	attracted	attract	VERB
xd07gq70930	1	14	increased	increase	VERB
xd07gq70930	1	15	interest	interest	NOUN
xd07gq70930	1	16	owing	owe	VERB
xd07gq70930	1	17	to	to	ADP
xd07gq70930	1	18	their	their	PRON
xd07gq70930	1	19	prospective	prospective	ADJ
xd07gq70930	1	20	applications	application	NOUN
xd07gq70930	1	21	in	in	ADP
xd07gq70930	1	22	many	many	ADJ
xd07gq70930	1	23	important	important	ADJ
xd07gq70930	1	24	fields	field	NOUN
xd07gq70930	1	25	such	such	ADJ
xd07gq70930	1	26	as	as	ADP
xd07gq70930	1	27	radio	radio	NOUN
xd07gq70930	1	28	astronomy	astronomy	NOUN
xd07gq70930	1	29	,	,	PUNCT
xd07gq70930	1	30	chemical	chemical	NOUN
xd07gq70930	1	31	and	and	CCONJ
xd07gq70930	1	32	biological	biological	ADJ
xd07gq70930	1	33	sensing	sensing	NOUN
xd07gq70930	1	34	,	,	PUNCT
xd07gq70930	1	35	medical	medical	ADJ
xd07gq70930	1	36	imaging	imaging	NOUN
xd07gq70930	1	37	,	,	PUNCT
xd07gq70930	1	38	security	security	NOUN
xd07gq70930	1	39	screening	screening	NOUN
xd07gq70930	1	40	,	,	PUNCT
xd07gq70930	1	41	and	and	CCONJ
xd07gq70930	1	42	communication	communication	NOUN
xd07gq70930	1	43	.	.	PUNCT
xd07gq70930	2	1	the	the	DET
xd07gq70930	2	2	vast	vast	ADJ
xd07gq70930	2	3	development	development	NOUN
xd07gq70930	2	4	of	of	ADP
xd07gq70930	2	5	thz	thz	PROPN
xd07gq70930	2	6	sources	source	NOUN
xd07gq70930	2	7	and	and	CCONJ
xd07gq70930	2	8	detectors	detector	NOUN
xd07gq70930	2	9	has	have	AUX
xd07gq70930	2	10	turned	turn	VERB
xd07gq70930	2	11	the	the	DET
xd07gq70930	2	12	thz	thz	PROPN
xd07gq70930	2	13	research	research	NOUN
xd07gq70930	2	14	into	into	ADP
xd07gq70930	2	15	a	a	DET
xd07gq70930	2	16	rapidly	rapidly	ADV
xd07gq70930	2	17	growing	grow	VERB
xd07gq70930	2	18	technological	technological	ADJ
xd07gq70930	2	19	field	field	NOUN
xd07gq70930	2	20	.	.	PUNCT
xd07gq70930	3	1	however	however	ADV
xd07gq70930	3	2	,	,	PUNCT
xd07gq70930	3	3	for	for	ADP
xd07gq70930	3	4	thz	thz	PROPN
xd07gq70930	3	5	applications	application	NOUN
xd07gq70930	3	6	such	such	ADJ
xd07gq70930	3	7	as	as	ADP
xd07gq70930	3	8	advanced	advanced	ADJ
xd07gq70930	3	9	imaging	imaging	NOUN
xd07gq70930	3	10	and	and	CCONJ
xd07gq70930	3	11	adaptive	adaptive	ADJ
xd07gq70930	3	12	high	high	ADJ
xd07gq70930	3	13	-	-	PUNCT
xd07gq70930	3	14	speed	speed	NOUN
xd07gq70930	3	15	wireless	wireless	ADJ
xd07gq70930	3	16	communication	communication	NOUN
xd07gq70930	3	17	,	,	PUNCT
xd07gq70930	3	18	tunable	tunable	ADJ
xd07gq70930	3	19	and	and	CCONJ
xd07gq70930	3	20	reconfigurable	reconfigurable	NOUN
xd07gq70930	3	21	thz	thz	NOUN
xd07gq70930	3	22	circuits	circuit	NOUN
xd07gq70930	3	23	and	and	CCONJ
xd07gq70930	3	24	components	component	NOUN
xd07gq70930	3	25	are	be	AUX
xd07gq70930	3	26	needed	need	VERB
xd07gq70930	3	27	.	.	PUNCT
xd07gq70930	4	1	this	this	DET
xd07gq70930	4	2	kind	kind	NOUN
xd07gq70930	4	3	of	of	ADP
xd07gq70930	4	4	devices	device	NOUN
xd07gq70930	4	5	enables	enable	VERB
xd07gq70930	4	6	us	we	PRON
xd07gq70930	4	7	to	to	PART
xd07gq70930	4	8	implement	implement	VERB
xd07gq70930	4	9	unique	unique	ADJ
xd07gq70930	4	10	functionalities	functionality	NOUN
xd07gq70930	4	11	and	and	CCONJ
xd07gq70930	4	12	superior	superior	ADJ
xd07gq70930	4	13	system	system	NOUN
xd07gq70930	4	14	performance	performance	NOUN
xd07gq70930	4	15	.	.	PUNCT
xd07gq70930	5	1	such	such	ADJ
xd07gq70930	5	2	functional	functional	ADJ
xd07gq70930	5	3	thz	thz	PROPN
xd07gq70930	5	4	devices	device	NOUN
xd07gq70930	5	5	are	be	AUX
xd07gq70930	5	6	still	still	ADV
xd07gq70930	5	7	scarce	scarce	ADJ
xd07gq70930	5	8	but	but	CCONJ
xd07gq70930	5	9	in	in	ADP
xd07gq70930	5	10	high	high	ADJ
xd07gq70930	5	11	demand	demand	NOUN
xd07gq70930	5	12	for	for	ADP
xd07gq70930	5	13	sophisticated	sophisticated	ADJ
xd07gq70930	5	14	circuits	circuit	NOUN
xd07gq70930	5	15	and	and	CCONJ
xd07gq70930	5	16	systems	system	NOUN
xd07gq70930	5	17	needed	need	VERB
xd07gq70930	5	18	in	in	ADP
xd07gq70930	5	19	advanced	advanced	ADJ
xd07gq70930	5	20	thz	thz	PROPN
xd07gq70930	5	21	sensing	sensing	NOUN
xd07gq70930	5	22	,	,	PUNCT
xd07gq70930	5	23	imaging	image	VERB
xd07gq70930	5	24	and	and	CCONJ
xd07gq70930	5	25	communications.in	communications.in	NUM
xd07gq70930	5	26	this	this	DET
xd07gq70930	5	27	thesis	thesis	NOUN
xd07gq70930	5	28	,	,	PUNCT
xd07gq70930	5	29	a	a	DET
xd07gq70930	5	30	novel	novel	ADJ
xd07gq70930	5	31	approach	approach	NOUN
xd07gq70930	5	32	to	to	PART
xd07gq70930	5	33	realize	realize	VERB
xd07gq70930	5	34	tunable	tunable	ADJ
xd07gq70930	5	35	/	/	SYM
xd07gq70930	5	36	reconfigurable	reconfigurable	NOUN
xd07gq70930	5	37	thz	thz	NOUN
xd07gq70930	5	38	circuits	circuit	NOUN
xd07gq70930	5	39	and	and	CCONJ
xd07gq70930	5	40	systems	system	NOUN
xd07gq70930	5	41	based	base	VERB
xd07gq70930	5	42	on	on	ADP
xd07gq70930	5	43	optical	optical	ADJ
xd07gq70930	5	44	thz	thz	PROPN
xd07gq70930	5	45	spatial	spatial	ADJ
xd07gq70930	5	46	modulation	modulation	NOUN
xd07gq70930	5	47	(	(	PUNCT
xd07gq70930	5	48	otsm	otsm	NOUN
xd07gq70930	5	49	)	)	PUNCT
xd07gq70930	5	50	using	use	VERB
xd07gq70930	5	51	photo	photo	NOUN
xd07gq70930	5	52	-	-	PUNCT
xd07gq70930	5	53	induced	induce	VERB
xd07gq70930	5	54	free	free	ADJ
xd07gq70930	5	55	carriers	carrier	NOUN
xd07gq70930	5	56	in	in	ADP
xd07gq70930	5	57	semiconductors	semiconductor	NOUN
xd07gq70930	5	58	has	have	AUX
xd07gq70930	5	59	been	be	AUX
xd07gq70930	5	60	investigated	investigate	VERB
xd07gq70930	5	61	.	.	PUNCT
xd07gq70930	6	1	using	use	VERB
xd07gq70930	6	2	this	this	DET
xd07gq70930	6	3	approach	approach	NOUN
xd07gq70930	6	4	,	,	PUNCT
xd07gq70930	6	5	tunable	tunable	ADJ
xd07gq70930	6	6	thzmodulators	thzmodulator	NOUN
xd07gq70930	6	7	achieving	achieve	VERB
xd07gq70930	6	8	a	a	DET
xd07gq70930	6	9	maximum	maximum	ADJ
xd07gq70930	6	10	modulation	modulation	NOUN
xd07gq70930	6	11	depth	depth	NOUN
xd07gq70930	6	12	of	of	ADP
xd07gq70930	6	13	~50	~50	NUM
xd07gq70930	6	14	db	db	NOUN
xd07gq70930	6	15	in	in	ADP
xd07gq70930	6	16	the	the	DET
xd07gq70930	6	17	wr1.5	wr1.5	NOUN
xd07gq70930	6	18	frequency	frequency	NOUN
xd07gq70930	6	19	band	band	NOUN
xd07gq70930	6	20	(	(	PUNCT
xd07gq70930	6	21	500	500	NUM
xd07gq70930	6	22	-	-	SYM
xd07gq70930	6	23	750	750	NUM
xd07gq70930	6	24	ghz	ghz	NOUN
xd07gq70930	6	25	)	)	PUNCT
xd07gq70930	6	26	have	have	AUX
xd07gq70930	6	27	been	be	AUX
xd07gq70930	6	28	demonstrated	demonstrate	VERB
xd07gq70930	6	29	.	.	PUNCT
xd07gq70930	7	1	furthermore	furthermore	ADV
xd07gq70930	7	2	,	,	PUNCT
xd07gq70930	7	3	reconfigurable	reconfigurable	NOUN
xd07gq70930	7	4	photo	photo	NOUN
xd07gq70930	7	5	-	-	PUNCT
xd07gq70930	7	6	induced	induce	VERB
xd07gq70930	7	7	aperture	aperture	NOUN
xd07gq70930	7	8	masks	mask	NOUN
xd07gq70930	7	9	have	have	AUX
xd07gq70930	7	10	been	be	AUX
xd07gq70930	7	11	developed	develop	VERB
xd07gq70930	7	12	for	for	ADP
xd07gq70930	7	13	advanced	advanced	ADJ
xd07gq70930	7	14	thz	thz	PROPN
xd07gq70930	7	15	coded	code	VERB
xd07gq70930	7	16	-	-	PUNCT
xd07gq70930	7	17	aperture	aperture	NOUN
xd07gq70930	7	18	imaging	imaging	NOUN
xd07gq70930	7	19	,	,	PUNCT
xd07gq70930	7	20	which	which	PRON
xd07gq70930	7	21	may	may	AUX
xd07gq70930	7	22	pave	pave	VERB
xd07gq70930	7	23	the	the	DET
xd07gq70930	7	24	way	way	NOUN
xd07gq70930	7	25	for	for	ADP
xd07gq70930	7	26	realizing	realize	VERB
xd07gq70930	7	27	high	high	ADJ
xd07gq70930	7	28	resolution	resolution	NOUN
xd07gq70930	7	29	,	,	PUNCT
xd07gq70930	7	30	real	real	ADJ
xd07gq70930	7	31	-	-	PUNCT
xd07gq70930	7	32	time	time	NOUN
xd07gq70930	7	33	thz	thz	PROPN
xd07gq70930	7	34	imaging	imaging	NOUN
xd07gq70930	7	35	systems	system	NOUN
xd07gq70930	7	36	.	.	PUNCT
xd07gq70930	8	1	in	in	ADP
xd07gq70930	8	2	addition	addition	NOUN
xd07gq70930	8	3	,	,	PUNCT
xd07gq70930	8	4	photo	photo	ADV
xd07gq70930	8	5	-	-	PUNCT
xd07gq70930	8	6	induced	induce	VERB
xd07gq70930	8	7	fresnel	fresnel	NOUN
xd07gq70930	8	8	-	-	PUNCT
xd07gq70930	8	9	zone	zone	NOUN
xd07gq70930	8	10	-	-	PUNCT
xd07gq70930	8	11	plate	plate	NOUN
xd07gq70930	8	12	(	(	PUNCT
xd07gq70930	8	13	fzp	fzp	NOUN
xd07gq70930	8	14	)	)	PUNCT
xd07gq70930	8	15	antennas	antenna	NOUN
xd07gq70930	8	16	with	with	ADP
xd07gq70930	8	17	the	the	DET
xd07gq70930	8	18	capability	capability	NOUN
xd07gq70930	8	19	of	of	ADP
xd07gq70930	8	20	dynamic	dynamic	ADJ
xd07gq70930	8	21	beam	beam	NOUN
xd07gq70930	8	22	steering	steering	NOUN
xd07gq70930	8	23	and	and	CCONJ
xd07gq70930	8	24	forming	forming	NOUN
xd07gq70930	8	25	have	have	AUX
xd07gq70930	8	26	been	be	AUX
xd07gq70930	8	27	designed	design	VERB
xd07gq70930	8	28	and	and	CCONJ
xd07gq70930	8	29	demonstrated	demonstrate	VERB
xd07gq70930	8	30	at	at	ADP
xd07gq70930	8	31	and	and	CCONJ
xd07gq70930	8	32	around	around	ADV
xd07gq70930	8	33	750	750	NUM
xd07gq70930	8	34	ghz	ghz	NOUN
xd07gq70930	8	35	.	.	PUNCT
xd07gq70930	9	1	the	the	DET
xd07gq70930	9	2	above	above	ADJ
xd07gq70930	9	3	quasi	quasi	ADJ
xd07gq70930	9	4	-	-	ADJ
xd07gq70930	9	5	optical	optical	ADJ
xd07gq70930	9	6	tunable	tunable	ADJ
xd07gq70930	9	7	/	/	SYM
xd07gq70930	9	8	reconfigurable	reconfigurable	NOUN
xd07gq70930	9	9	circuits	circuit	NOUN
xd07gq70930	9	10	and	and	CCONJ
xd07gq70930	9	11	components	component	NOUN
xd07gq70930	9	12	have	have	AUX
xd07gq70930	9	13	been	be	AUX
xd07gq70930	9	14	successfully	successfully	ADV
xd07gq70930	9	15	applied	apply	VERB
xd07gq70930	9	16	in	in	ADP
xd07gq70930	9	17	thz	thz	PROPN
xd07gq70930	9	18	beam	beam	NOUN
xd07gq70930	9	19	mapping	mapping	NOUN
xd07gq70930	9	20	,	,	PUNCT
xd07gq70930	9	21	antenna	antenna	NOUN
xd07gq70930	9	22	characterization	characterization	NOUN
xd07gq70930	9	23	and	and	CCONJ
xd07gq70930	9	24	remote	remote	ADJ
xd07gq70930	9	25	scanning	scanning	ADJ
xd07gq70930	9	26	imaging.despite	imaging.despite	PROPN
xd07gq70930	9	27	the	the	DET
xd07gq70930	9	28	success	success	NOUN
xd07gq70930	9	29	in	in	ADP
xd07gq70930	9	30	developing	develop	VERB
xd07gq70930	9	31	and	and	CCONJ
xd07gq70930	9	32	demonstrating	demonstrate	VERB
xd07gq70930	9	33	the	the	DET
xd07gq70930	9	34	above	above	ADJ
xd07gq70930	9	35	tunable	tunable	ADJ
xd07gq70930	9	36	/	/	SYM
xd07gq70930	9	37	reconfigurable	reconfigurable	NOUN
xd07gq70930	9	38	devices	device	NOUN
xd07gq70930	9	39	and	and	CCONJ
xd07gq70930	9	40	components	component	NOUN
xd07gq70930	9	41	,	,	PUNCT
xd07gq70930	9	42	it	it	PRON
xd07gq70930	9	43	has	have	AUX
xd07gq70930	9	44	been	be	AUX
xd07gq70930	9	45	observed	observe	VERB
xd07gq70930	9	46	that	that	SCONJ
xd07gq70930	9	47	both	both	CCONJ
xd07gq70930	9	48	the	the	DET
xd07gq70930	9	49	circuit	circuit	NOUN
xd07gq70930	9	50	performance	performance	NOUN
xd07gq70930	9	51	and	and	CCONJ
xd07gq70930	9	52	highest	high	ADJ
xd07gq70930	9	53	achievable	achievable	ADJ
xd07gq70930	9	54	operation	operation	NOUN
xd07gq70930	9	55	frequency	frequency	NOUN
xd07gq70930	9	56	are	be	AUX
xd07gq70930	9	57	limited	limit	VERB
xd07gq70930	9	58	by	by	ADP
xd07gq70930	9	59	the	the	DET
xd07gq70930	9	60	otsm	otsm	NOUN
xd07gq70930	9	61	performance	performance	NOUN
xd07gq70930	9	62	using	use	VERB
xd07gq70930	9	63	naturally	naturally	ADV
xd07gq70930	9	64	-	-	PUNCT
xd07gq70930	9	65	existing	exist	VERB
xd07gq70930	9	66	semiconductor	semiconductor	NOUN
xd07gq70930	9	67	materials	material	NOUN
xd07gq70930	9	68	.	.	PUNCT
xd07gq70930	10	1	to	to	PART
xd07gq70930	10	2	overcome	overcome	VERB
xd07gq70930	10	3	these	these	DET
xd07gq70930	10	4	limitations	limitation	NOUN
xd07gq70930	10	5	,	,	PUNCT
xd07gq70930	10	6	a	a	DET
xd07gq70930	10	7	novel	novel	ADJ
xd07gq70930	10	8	approach	approach	NOUN
xd07gq70930	10	9	using	use	VERB
xd07gq70930	10	10	mesa	mesa	NOUN
xd07gq70930	10	11	-	-	PUNCT
xd07gq70930	10	12	array	array	NOUN
xd07gq70930	10	13	structures	structure	NOUN
xd07gq70930	10	14	has	have	AUX
xd07gq70930	10	15	been	be	AUX
xd07gq70930	10	16	proposed	propose	VERB
xd07gq70930	10	17	for	for	ADP
xd07gq70930	10	18	improved	improved	ADJ
xd07gq70930	10	19	otsm	otsm	NOUN
xd07gq70930	10	20	with	with	ADP
xd07gq70930	10	21	higher	high	ADJ
xd07gq70930	10	22	modulation	modulation	NOUN
xd07gq70930	10	23	depth	depth	NOUN
xd07gq70930	10	24	,	,	PUNCT
xd07gq70930	10	25	spatial	spatial	ADJ
xd07gq70930	10	26	resolution	resolution	NOUN
xd07gq70930	10	27	and	and	CCONJ
xd07gq70930	10	28	modulation	modulation	NOUN
xd07gq70930	10	29	speed	speed	NOUN
xd07gq70930	10	30	.	.	PUNCT
xd07gq70930	11	1	employing	employ	VERB
xd07gq70930	11	2	the	the	DET
xd07gq70930	11	3	mesa	mesa	NOUN
xd07gq70930	11	4	-	-	PUNCT
xd07gq70930	11	5	array	array	NOUN
xd07gq70930	11	6	structure	structure	NOUN
xd07gq70930	11	7	as	as	ADP
xd07gq70930	11	8	a	a	DET
xd07gq70930	11	9	technology	technology	NOUN
xd07gq70930	11	10	platform	platform	NOUN
xd07gq70930	11	11	,	,	PUNCT
xd07gq70930	11	12	thz	thz	PROPN
xd07gq70930	11	13	mesh	mesh	NOUN
xd07gq70930	11	14	filters	filter	NOUN
xd07gq70930	11	15	with	with	ADP
xd07gq70930	11	16	universal	universal	ADJ
xd07gq70930	11	17	tunability	tunability	NOUN
xd07gq70930	11	18	and	and	CCONJ
xd07gq70930	11	19	reconfigurability	reconfigurability	NOUN
xd07gq70930	11	20	have	have	AUX
xd07gq70930	11	21	been	be	AUX
xd07gq70930	11	22	simulated	simulate	VERB
xd07gq70930	11	23	.	.	PUNCT
xd07gq70930	12	1	in	in	ADP
xd07gq70930	12	2	addition	addition	NOUN
xd07gq70930	12	3	,	,	PUNCT
xd07gq70930	12	4	photo	photo	ADV
xd07gq70930	12	5	-	-	PUNCT
xd07gq70930	12	6	induced	induce	VERB
xd07gq70930	12	7	substrate	substrate	NOUN
xd07gq70930	12	8	-	-	PUNCT
xd07gq70930	12	9	integrated	integrate	VERB
xd07gq70930	12	10	waveguides	waveguide	NOUN
xd07gq70930	12	11	(	(	PUNCT
xd07gq70930	12	12	pi	pi	NOUN
xd07gq70930	12	13	-	-	PUNCT
xd07gq70930	12	14	siws	siws	PROPN
xd07gq70930	12	15	)	)	PUNCT
xd07gq70930	12	16	have	have	AUX
xd07gq70930	12	17	been	be	AUX
xd07gq70930	12	18	investigated	investigate	VERB
xd07gq70930	12	19	for	for	ADP
xd07gq70930	12	20	providing	provide	VERB
xd07gq70930	12	21	nearly	nearly	ADV
xd07gq70930	12	22	unlimited	unlimited	ADJ
xd07gq70930	12	23	possibilities	possibility	NOUN
xd07gq70930	12	24	to	to	PART
xd07gq70930	12	25	realize	realize	VERB
xd07gq70930	12	26	more	more	ADV
xd07gq70930	12	27	advanced	advanced	ADJ
xd07gq70930	12	28	tunable	tunable	ADJ
xd07gq70930	12	29	/	/	SYM
xd07gq70930	12	30	reconfigurable	reconfigurable	NOUN
xd07gq70930	12	31	thz	thz	NOUN
xd07gq70930	12	32	circuits	circuit	NOUN
xd07gq70930	12	33	with	with	ADP
xd07gq70930	12	34	multiple	multiple	ADJ
xd07gq70930	12	35	functionalities	functionality	NOUN
xd07gq70930	12	36	.	.	PUNCT