id	sid	tid	token	lemma	pos
vx021c20x6c	1	1	in	in	ADP
vx021c20x6c	1	2	this	this	DET
vx021c20x6c	1	3	thesis	thesis	NOUN
vx021c20x6c	1	4	molecular	molecular	ADJ
vx021c20x6c	1	5	quantum	quantum	PROPN
vx021c20x6c	1	6	cellular	cellular	PROPN
vx021c20x6c	1	7	automata	automata	PROPN
vx021c20x6c	1	8	(	(	PUNCT
vx021c20x6c	1	9	qca	qca	PROPN
vx021c20x6c	1	10	)	)	PUNCT
vx021c20x6c	1	11	is	be	AUX
vx021c20x6c	1	12	to	to	PART
vx021c20x6c	1	13	be	be	AUX
vx021c20x6c	1	14	fabricated	fabricate	VERB
vx021c20x6c	1	15	into	into	ADP
vx021c20x6c	1	16	a	a	DET
vx021c20x6c	1	17	real	real	ADJ
vx021c20x6c	1	18	device	device	NOUN
vx021c20x6c	1	19	.	.	PUNCT
vx021c20x6c	2	1	the	the	DET
vx021c20x6c	2	2	principle	principle	NOUN
vx021c20x6c	2	3	of	of	ADP
vx021c20x6c	2	4	this	this	DET
vx021c20x6c	2	5	experiment	experiment	NOUN
vx021c20x6c	2	6	is	be	AUX
vx021c20x6c	2	7	to	to	PART
vx021c20x6c	2	8	detect	detect	VERB
vx021c20x6c	2	9	the	the	DET
vx021c20x6c	2	10	switching	switching	NOUN
vx021c20x6c	2	11	activity	activity	NOUN
vx021c20x6c	2	12	of	of	ADP
vx021c20x6c	2	13	molecules	molecule	NOUN
vx021c20x6c	2	14	using	use	VERB
vx021c20x6c	2	15	a	a	DET
vx021c20x6c	2	16	single	single	ADJ
vx021c20x6c	2	17	electron	electron	NOUN
vx021c20x6c	2	18	transistor	transistor	NOUN
vx021c20x6c	2	19	(	(	PUNCT
vx021c20x6c	2	20	set	set	NOUN
vx021c20x6c	2	21	)	)	PUNCT
vx021c20x6c	2	22	.	.	PUNCT
vx021c20x6c	3	1	this	this	PRON
vx021c20x6c	3	2	is	be	AUX
vx021c20x6c	3	3	done	do	VERB
vx021c20x6c	3	4	by	by	ADP
vx021c20x6c	3	5	growing	grow	VERB
vx021c20x6c	3	6	molecules	molecule	NOUN
vx021c20x6c	3	7	on	on	ADP
vx021c20x6c	3	8	a	a	DET
vx021c20x6c	3	9	highly	highly	ADV
vx021c20x6c	3	10	doped	doped	ADJ
vx021c20x6c	3	11	p+	p+	ADJ
vx021c20x6c	3	12	si	si	X
vx021c20x6c	3	13	substrate	substrate	NOUN
vx021c20x6c	3	14	called	call	VERB
vx021c20x6c	3	15	a	a	DET
vx021c20x6c	3	16	p+	p+	ADJ
vx021c20x6c	3	17	window	window	NOUN
vx021c20x6c	3	18	.	.	PUNCT
vx021c20x6c	4	1	the	the	DET
vx021c20x6c	4	2	p+	p+	ADJ
vx021c20x6c	4	3	window	window	NOUN
vx021c20x6c	4	4	is	be	AUX
vx021c20x6c	4	5	also	also	ADV
vx021c20x6c	4	6	a	a	DET
vx021c20x6c	4	7	part	part	NOUN
vx021c20x6c	4	8	of	of	ADP
vx021c20x6c	4	9	the	the	DET
vx021c20x6c	4	10	island	island	NOUN
vx021c20x6c	4	11	of	of	ADP
vx021c20x6c	4	12	the	the	DET
vx021c20x6c	4	13	set	set	NOUN
vx021c20x6c	4	14	such	such	ADJ
vx021c20x6c	4	15	that	that	SCONJ
vx021c20x6c	4	16	the	the	DET
vx021c20x6c	4	17	molecules	molecule	NOUN
vx021c20x6c	4	18	are	be	AUX
vx021c20x6c	4	19	capacitively	capacitively	ADV
vx021c20x6c	4	20	coupled	couple	VERB
vx021c20x6c	4	21	to	to	ADP
vx021c20x6c	4	22	the	the	DET
vx021c20x6c	4	23	set	set	NOUN
vx021c20x6c	4	24	.	.	PUNCT
vx021c20x6c	5	1	the	the	DET
vx021c20x6c	5	2	stateswitching	stateswitching	NOUN
vx021c20x6c	5	3	in	in	ADP
vx021c20x6c	5	4	the	the	DET
vx021c20x6c	5	5	molecules	molecule	NOUN
vx021c20x6c	5	6	will	will	AUX
vx021c20x6c	5	7	cause	cause	VERB
vx021c20x6c	5	8	an	an	DET
vx021c20x6c	5	9	electrical	electrical	ADJ
vx021c20x6c	5	10	potential	potential	ADJ
vx021c20x6c	5	11	change	change	NOUN
vx021c20x6c	5	12	on	on	ADP
vx021c20x6c	5	13	the	the	DET
vx021c20x6c	5	14	island	island	NOUN
vx021c20x6c	5	15	which	which	PRON
vx021c20x6c	5	16	will	will	AUX
vx021c20x6c	5	17	affect	affect	VERB
vx021c20x6c	5	18	the	the	DET
vx021c20x6c	5	19	current	current	ADJ
vx021c20x6c	5	20	flow	flow	NOUN
vx021c20x6c	5	21	,	,	PUNCT
vx021c20x6c	5	22	ids	id	NOUN
vx021c20x6c	5	23	,	,	PUNCT
vx021c20x6c	5	24	of	of	ADP
vx021c20x6c	5	25	the	the	DET
vx021c20x6c	5	26	set	set	NOUN
vx021c20x6c	5	27	.	.	PUNCT
vx021c20x6c	6	1	the	the	DET
vx021c20x6c	6	2	fabrication	fabrication	NOUN
vx021c20x6c	6	3	of	of	ADP
vx021c20x6c	6	4	the	the	DET
vx021c20x6c	6	5	device	device	NOUN
vx021c20x6c	6	6	mainly	mainly	ADV
vx021c20x6c	6	7	involves	involve	VERB
vx021c20x6c	6	8	the	the	DET
vx021c20x6c	6	9	following	follow	VERB
vx021c20x6c	6	10	steps	step	NOUN
vx021c20x6c	6	11	:	:	PUNCT
vx021c20x6c	6	12	the	the	DET
vx021c20x6c	6	13	formation	formation	NOUN
vx021c20x6c	6	14	of	of	ADP
vx021c20x6c	6	15	the	the	DET
vx021c20x6c	6	16	p+	p+	ADJ
vx021c20x6c	6	17	window	window	NOUN
vx021c20x6c	6	18	,	,	PUNCT
vx021c20x6c	6	19	the	the	DET
vx021c20x6c	6	20	deposition	deposition	NOUN
vx021c20x6c	6	21	of	of	ADP
vx021c20x6c	6	22	metal	metal	NOUN
vx021c20x6c	6	23	pads	pad	NOUN
vx021c20x6c	6	24	and	and	CCONJ
vx021c20x6c	6	25	wires	wire	NOUN
vx021c20x6c	6	26	,	,	PUNCT
vx021c20x6c	6	27	the	the	DET
vx021c20x6c	6	28	growth	growth	NOUN
vx021c20x6c	6	29	of	of	ADP
vx021c20x6c	6	30	the	the	DET
vx021c20x6c	6	31	set	set	NOUN
vx021c20x6c	6	32	,	,	PUNCT
vx021c20x6c	6	33	and	and	CCONJ
vx021c20x6c	6	34	the	the	DET
vx021c20x6c	6	35	growth	growth	NOUN
vx021c20x6c	6	36	of	of	ADP
vx021c20x6c	6	37	molecules	molecule	NOUN
vx021c20x6c	6	38	.	.	PUNCT
vx021c20x6c	7	1	until	until	ADP
vx021c20x6c	7	2	now	now	ADV
vx021c20x6c	7	3	,	,	PUNCT
vx021c20x6c	7	4	real	real	ADJ
vx021c20x6c	7	5	devices	device	NOUN
vx021c20x6c	7	6	have	have	AUX
vx021c20x6c	7	7	been	be	AUX
vx021c20x6c	7	8	made	make	VERB
vx021c20x6c	7	9	but	but	CCONJ
vx021c20x6c	7	10	the	the	DET
vx021c20x6c	7	11	switching	switching	NOUN
vx021c20x6c	7	12	activity	activity	NOUN
vx021c20x6c	7	13	of	of	ADP
vx021c20x6c	7	14	the	the	DET
vx021c20x6c	7	15	molecules	molecule	NOUN
vx021c20x6c	7	16	has	have	VERB
vx021c20x6c	7	17	yet	yet	ADV
vx021c20x6c	7	18	to	to	PART
vx021c20x6c	7	19	be	be	AUX
vx021c20x6c	7	20	detected	detect	VERB
vx021c20x6c	7	21	.	.	PUNCT