id sid tid token lemma pos qr46qz24b59 1 1 the the DET qr46qz24b59 1 2 performance performance NOUN qr46qz24b59 1 3 of of ADP qr46qz24b59 1 4 modern modern ADJ qr46qz24b59 1 5 computers computer NOUN qr46qz24b59 1 6 is be AUX qr46qz24b59 1 7 limited limit VERB qr46qz24b59 1 8 due due ADP qr46qz24b59 1 9 to to ADP qr46qz24b59 1 10 their their PRON qr46qz24b59 1 11 heat heat NOUN qr46qz24b59 1 12 dissipation dissipation NOUN qr46qz24b59 1 13 . . PUNCT qr46qz24b59 2 1 even even ADV qr46qz24b59 2 2 though though ADV qr46qz24b59 2 3 , , PUNCT qr46qz24b59 2 4 following follow VERB qr46qz24b59 2 5 moore moore NOUN qr46qz24b59 2 6 's 's PART qr46qz24b59 2 7 law law NOUN qr46qz24b59 2 8 , , PUNCT qr46qz24b59 2 9 the the DET qr46qz24b59 2 10 number number NOUN qr46qz24b59 2 11 of of ADP qr46qz24b59 2 12 transistors transistor NOUN qr46qz24b59 2 13 in in ADP qr46qz24b59 2 14 microprocessors microprocessor NOUN qr46qz24b59 2 15 keeps keep VERB qr46qz24b59 2 16 increasing increase VERB qr46qz24b59 2 17 , , PUNCT qr46qz24b59 2 18 their their PRON qr46qz24b59 2 19 speeds speed NOUN qr46qz24b59 2 20 have have AUX qr46qz24b59 2 21 been be AUX qr46qz24b59 2 22 capped cap VERB qr46qz24b59 2 23 around around ADP qr46qz24b59 2 24 4 4 NUM qr46qz24b59 2 25 ghz ghz NOUN qr46qz24b59 2 26 for for ADP qr46qz24b59 2 27 almost almost ADV qr46qz24b59 2 28 two two NUM qr46qz24b59 2 29 decades decade NOUN qr46qz24b59 2 30 to to PART qr46qz24b59 2 31 limit limit VERB qr46qz24b59 2 32 heat heat NOUN qr46qz24b59 2 33 generation generation NOUN qr46qz24b59 2 34 . . PUNCT qr46qz24b59 3 1 such such ADJ qr46qz24b59 3 2 speeds speed NOUN qr46qz24b59 3 3 are be AUX qr46qz24b59 3 4 well well ADV qr46qz24b59 3 5 below below ADP qr46qz24b59 3 6 the the DET qr46qz24b59 3 7 rc rc NOUN qr46qz24b59 3 8 time time NOUN qr46qz24b59 3 9 constant constant ADJ qr46qz24b59 3 10 limit limit NOUN qr46qz24b59 3 11 of of ADP qr46qz24b59 3 12 the the DET qr46qz24b59 3 13 circuits circuit NOUN qr46qz24b59 3 14 , , PUNCT qr46qz24b59 3 15 sacrificing sacrifice VERB qr46qz24b59 3 16 speed speed NOUN qr46qz24b59 3 17 to to PART qr46qz24b59 3 18 prevent prevent VERB qr46qz24b59 3 19 the the DET qr46qz24b59 3 20 chips chip NOUN qr46qz24b59 3 21 from from ADP qr46qz24b59 3 22 melting melt VERB qr46qz24b59 3 23 since since SCONJ qr46qz24b59 3 24 traditional traditional ADJ qr46qz24b59 3 25 cmos cmos NOUN qr46qz24b59 3 26 circuits circuit NOUN qr46qz24b59 3 27 dissipate dissipate VERB qr46qz24b59 3 28 power power NOUN qr46qz24b59 3 29 on on ADP qr46qz24b59 3 30 every every DET qr46qz24b59 3 31 switching switching NOUN qr46qz24b59 3 32 in in ADP qr46qz24b59 3 33 the the DET qr46qz24b59 3 34 form form NOUN qr46qz24b59 3 35 of of ADP qr46qz24b59 3 36 heat heat NOUN qr46qz24b59 3 37 . . PUNCT qr46qz24b59 4 1 reversible reversible ADJ qr46qz24b59 4 2 computing computing NOUN qr46qz24b59 4 3 is be AUX qr46qz24b59 4 4 a a DET qr46qz24b59 4 5 viable viable ADJ qr46qz24b59 4 6 alternative alternative NOUN qr46qz24b59 4 7 to to ADP qr46qz24b59 4 8 traditional traditional ADJ qr46qz24b59 4 9 circuit circuit NOUN qr46qz24b59 4 10 implementations implementation NOUN qr46qz24b59 4 11 since since SCONJ qr46qz24b59 4 12 it it PRON qr46qz24b59 4 13 reduces reduce VERB qr46qz24b59 4 14 heat heat NOUN qr46qz24b59 4 15 generation generation NOUN qr46qz24b59 4 16 by by ADP qr46qz24b59 4 17 avoiding avoid VERB qr46qz24b59 4 18 unnecessary unnecessary ADJ qr46qz24b59 4 19 dissipation dissipation NOUN qr46qz24b59 4 20 , , PUNCT qr46qz24b59 4 21 therefore therefore ADV qr46qz24b59 4 22 introducing introduce VERB qr46qz24b59 4 23 a a DET qr46qz24b59 4 24 trade trade NOUN qr46qz24b59 4 25 - - PUNCT qr46qz24b59 4 26 off off NOUN qr46qz24b59 4 27 between between ADP qr46qz24b59 4 28 speed speed NOUN qr46qz24b59 4 29 and and CCONJ qr46qz24b59 4 30 power power NOUN qr46qz24b59 4 31 . . PUNCT qr46qz24b59 5 1 by by ADP qr46qz24b59 5 2 using use VERB qr46qz24b59 5 3 reversible reversible ADJ qr46qz24b59 5 4 logic logic NOUN qr46qz24b59 5 5 and and CCONJ qr46qz24b59 5 6 switching switch VERB qr46qz24b59 5 7 the the DET qr46qz24b59 5 8 circuits circuit NOUN qr46qz24b59 5 9 slowly slowly ADV qr46qz24b59 5 10 ( ( PUNCT qr46qz24b59 5 11 adiabatically adiabatically ADV qr46qz24b59 5 12 ) ) PUNCT qr46qz24b59 5 13 , , PUNCT qr46qz24b59 5 14 relative relative ADJ qr46qz24b59 5 15 to to ADP qr46qz24b59 5 16 their their PRON qr46qz24b59 5 17 rc rc NOUN qr46qz24b59 5 18 time time NOUN qr46qz24b59 5 19 constants constant NOUN qr46qz24b59 5 20 , , PUNCT qr46qz24b59 5 21 power power NOUN qr46qz24b59 5 22 can can AUX qr46qz24b59 5 23 be be AUX qr46qz24b59 5 24 dramatically dramatically ADV qr46qz24b59 5 25 reduced.the reduced.the DET qr46qz24b59 5 26 most most ADV qr46qz24b59 5 27 developed developed ADJ qr46qz24b59 5 28 approach approach NOUN qr46qz24b59 5 29 to to ADP qr46qz24b59 5 30 reversible reversible ADJ qr46qz24b59 5 31 computing computing NOUN qr46qz24b59 5 32 is be AUX qr46qz24b59 5 33 adiabatic adiabatic ADJ qr46qz24b59 5 34 cmos cmos NOUN qr46qz24b59 5 35 which which PRON qr46qz24b59 5 36 changes change VERB qr46qz24b59 5 37 the the DET qr46qz24b59 5 38 cmos cmos NOUN qr46qz24b59 5 39 power power NOUN qr46qz24b59 5 40 supplies supply NOUN qr46qz24b59 5 41 to to ADP qr46qz24b59 5 42 ramping ramp VERB qr46qz24b59 5 43 clocks clock NOUN qr46qz24b59 5 44 , , PUNCT qr46qz24b59 5 45 and and CCONJ qr46qz24b59 5 46 operates operate VERB qr46qz24b59 5 47 them they PRON qr46qz24b59 5 48 adiabatically adiabatically ADV qr46qz24b59 5 49 , , PUNCT qr46qz24b59 5 50 but but CCONJ qr46qz24b59 5 51 its its PRON qr46qz24b59 5 52 lowest low ADJ qr46qz24b59 5 53 energy energy NOUN qr46qz24b59 5 54 dissipation dissipation NOUN qr46qz24b59 5 55 is be AUX qr46qz24b59 5 56 still still ADV qr46qz24b59 5 57 limited limit VERB qr46qz24b59 5 58 by by ADP qr46qz24b59 5 59 passive passive ADJ qr46qz24b59 5 60 power power NOUN qr46qz24b59 5 61 , , PUNCT qr46qz24b59 5 62 the the DET qr46qz24b59 5 63 energy energy NOUN qr46qz24b59 5 64 wasted waste VERB qr46qz24b59 5 65 due due ADP qr46qz24b59 5 66 to to ADP qr46qz24b59 5 67 leakage leakage NOUN qr46qz24b59 5 68 current current NOUN qr46qz24b59 5 69 caused cause VERB qr46qz24b59 5 70 simply simply ADV qr46qz24b59 5 71 by by ADP qr46qz24b59 5 72 applying apply VERB qr46qz24b59 5 73 a a DET qr46qz24b59 5 74 voltage voltage NOUN qr46qz24b59 5 75 to to ADP qr46qz24b59 5 76 the the DET qr46qz24b59 5 77 circuit circuit NOUN qr46qz24b59 5 78 . . PUNCT qr46qz24b59 6 1 a a DET qr46qz24b59 6 2 new new ADJ qr46qz24b59 6 3 approach approach NOUN qr46qz24b59 6 4 , , PUNCT qr46qz24b59 6 5 adiabatic adiabatic ADJ qr46qz24b59 6 6 capacitive capacitive ADJ qr46qz24b59 6 7 logic logic NOUN qr46qz24b59 6 8 ( ( PUNCT qr46qz24b59 6 9 acl acl PROPN qr46qz24b59 6 10 ) ) PUNCT qr46qz24b59 6 11 , , PUNCT qr46qz24b59 6 12 implements implement VERB qr46qz24b59 6 13 reversible reversible ADJ qr46qz24b59 6 14 computing computing NOUN qr46qz24b59 6 15 by by ADP qr46qz24b59 6 16 using use VERB qr46qz24b59 6 17 variable variable ADJ qr46qz24b59 6 18 capacitors capacitor NOUN qr46qz24b59 6 19 as as ADP qr46qz24b59 6 20 pull pull VERB qr46qz24b59 6 21 - - PUNCT qr46qz24b59 6 22 up up NOUN qr46qz24b59 6 23 and and CCONJ qr46qz24b59 6 24 pull pull VERB qr46qz24b59 6 25 - - PUNCT qr46qz24b59 6 26 down down ADP qr46qz24b59 6 27 networks network NOUN qr46qz24b59 6 28 . . PUNCT qr46qz24b59 7 1 acl acl PROPN qr46qz24b59 7 2 eliminates eliminate VERB qr46qz24b59 7 3 leakage leakage NOUN qr46qz24b59 7 4 current current NOUN qr46qz24b59 7 5 and and CCONJ qr46qz24b59 7 6 therefore therefore ADV qr46qz24b59 7 7 is be AUX qr46qz24b59 7 8 not not PART qr46qz24b59 7 9 limited limit VERB qr46qz24b59 7 10 by by ADP qr46qz24b59 7 11 passive passive ADJ qr46qz24b59 7 12 power power NOUN qr46qz24b59 7 13 . . PUNCT qr46qz24b59 8 1 acl acl PROPN qr46qz24b59 8 2 variable variable ADJ qr46qz24b59 8 3 capacitors capacitor NOUN qr46qz24b59 8 4 can can AUX qr46qz24b59 8 5 be be AUX qr46qz24b59 8 6 implemented implement VERB qr46qz24b59 8 7 using use VERB qr46qz24b59 8 8 microelectromechanical microelectromechanical ADJ qr46qz24b59 8 9 machines machine NOUN qr46qz24b59 8 10 ( ( PUNCT qr46qz24b59 8 11 mems mem NOUN qr46qz24b59 8 12 ) ) PUNCT qr46qz24b59 8 13 . . PUNCT qr46qz24b59 9 1 this this DET qr46qz24b59 9 2 work work NOUN qr46qz24b59 9 3 presents present VERB qr46qz24b59 9 4 the the DET qr46qz24b59 9 5 design design NOUN qr46qz24b59 9 6 and and CCONJ qr46qz24b59 9 7 fabrication fabrication NOUN qr46qz24b59 9 8 of of ADP qr46qz24b59 9 9 adiabatic adiabatic ADJ qr46qz24b59 9 10 capacitive capacitive ADJ qr46qz24b59 9 11 logic logic NOUN qr46qz24b59 9 12 mems mem VERB qr46qz24b59 9 13 devices device NOUN qr46qz24b59 9 14 that that PRON qr46qz24b59 9 15 pave pave VERB qr46qz24b59 9 16 the the DET qr46qz24b59 9 17 way way NOUN qr46qz24b59 9 18 to to PART qr46qz24b59 9 19 implement implement VERB qr46qz24b59 9 20 adiabatic adiabatic ADJ qr46qz24b59 9 21 reversible reversible ADJ qr46qz24b59 9 22 computing computing NOUN qr46qz24b59 9 23 not not PART qr46qz24b59 9 24 limited limit VERB qr46qz24b59 9 25 by by ADP qr46qz24b59 9 26 leakage leakage NOUN qr46qz24b59 9 27 . . PUNCT qr46qz24b59 10 1 a a DET qr46qz24b59 10 2 radio radio NOUN qr46qz24b59 10 3 frequency frequency NOUN qr46qz24b59 10 4 ( ( PUNCT qr46qz24b59 10 5 rf rf PROPN qr46qz24b59 10 6 ) ) PUNCT qr46qz24b59 10 7 reflectometry reflectometry NOUN qr46qz24b59 10 8 system system NOUN qr46qz24b59 10 9 is be AUX qr46qz24b59 10 10 used use VERB qr46qz24b59 10 11 to to PART qr46qz24b59 10 12 measure measure VERB qr46qz24b59 10 13 the the DET qr46qz24b59 10 14 capacitance capacitance NOUN qr46qz24b59 10 15 change change NOUN qr46qz24b59 10 16 in in ADP qr46qz24b59 10 17 acl acl PROPN qr46qz24b59 10 18 mems mem VERB qr46qz24b59 10 19 devices device NOUN qr46qz24b59 10 20 . . PUNCT qr46qz24b59 11 1 the the DET qr46qz24b59 11 2 rf rf PROPN qr46qz24b59 11 3 reflectometry reflectometry NOUN qr46qz24b59 11 4 system system NOUN qr46qz24b59 11 5 includes include VERB qr46qz24b59 11 6 a a DET qr46qz24b59 11 7 custom custom ADV qr46qz24b59 11 8 - - PUNCT qr46qz24b59 11 9 made make VERB qr46qz24b59 11 10 rf rf ADJ qr46qz24b59 11 11 micromanipulator micromanipulator NOUN qr46qz24b59 11 12 probe probe NOUN qr46qz24b59 11 13 with with ADP qr46qz24b59 11 14 an an DET qr46qz24b59 11 15 on on ADP qr46qz24b59 11 16 - - PUNCT qr46qz24b59 11 17 board board NOUN qr46qz24b59 11 18 matching matching NOUN qr46qz24b59 11 19 network network NOUN qr46qz24b59 11 20 to to PART qr46qz24b59 11 21 match match VERB qr46qz24b59 11 22 the the DET qr46qz24b59 11 23 impedance impedance NOUN qr46qz24b59 11 24 of of ADP qr46qz24b59 11 25 the the DET qr46qz24b59 11 26 mems mem NOUN qr46qz24b59 11 27 devices device NOUN qr46qz24b59 11 28 . . PUNCT qr46qz24b59 12 1 a a DET qr46qz24b59 12 2 low low ADJ qr46qz24b59 12 3 - - PUNCT qr46qz24b59 12 4 frequency frequency NOUN qr46qz24b59 12 5 measurement measurement NOUN qr46qz24b59 12 6 technique technique NOUN qr46qz24b59 12 7 is be AUX qr46qz24b59 12 8 also also ADV qr46qz24b59 12 9 used use VERB qr46qz24b59 12 10 to to PART qr46qz24b59 12 11 measure measure VERB qr46qz24b59 12 12 the the DET qr46qz24b59 12 13 variable variable ADJ qr46qz24b59 12 14 capacitance capacitance NOUN qr46qz24b59 12 15 . . PUNCT qr46qz24b59 13 1 this this DET qr46qz24b59 13 2 work work NOUN qr46qz24b59 13 3 presents present VERB qr46qz24b59 13 4 the the DET qr46qz24b59 13 5 first first ADJ qr46qz24b59 13 6 experimental experimental ADJ qr46qz24b59 13 7 implementation implementation NOUN qr46qz24b59 13 8 of of ADP qr46qz24b59 13 9 gap gap NOUN qr46qz24b59 13 10 - - PUNCT qr46qz24b59 13 11 closing closing NOUN qr46qz24b59 13 12 mems mem NOUN qr46qz24b59 13 13 for for ADP qr46qz24b59 13 14 adiabatic adiabatic ADJ qr46qz24b59 13 15 reversible reversible ADJ qr46qz24b59 13 16 computing computing NOUN qr46qz24b59 13 17 . . PUNCT qr46qz24b59 14 1 adiabatic adiabatic ADJ qr46qz24b59 14 2 reversible reversible ADJ qr46qz24b59 14 3 logic logic NOUN qr46qz24b59 14 4 devices device NOUN qr46qz24b59 14 5 require require VERB qr46qz24b59 14 6 ramping ramp VERB qr46qz24b59 14 7 clocks clock NOUN qr46qz24b59 14 8 to to PART qr46qz24b59 14 9 implement implement VERB qr46qz24b59 14 10 reversible reversible ADJ qr46qz24b59 14 11 computing computing NOUN qr46qz24b59 14 12 . . PUNCT qr46qz24b59 15 1 therefore therefore ADV qr46qz24b59 15 2 , , PUNCT qr46qz24b59 15 3 a a DET qr46qz24b59 15 4 complete complete ADJ qr46qz24b59 15 5 adiabatic adiabatic ADJ qr46qz24b59 15 6 reversible reversible ADJ qr46qz24b59 15 7 computing computing NOUN qr46qz24b59 15 8 system system NOUN qr46qz24b59 15 9 needs need VERB qr46qz24b59 15 10 to to PART qr46qz24b59 15 11 consider consider VERB qr46qz24b59 15 12 the the DET qr46qz24b59 15 13 implementation implementation NOUN qr46qz24b59 15 14 of of ADP qr46qz24b59 15 15 adiabatic adiabatic ADJ qr46qz24b59 15 16 ramping ramping NOUN qr46qz24b59 15 17 clocks clock NOUN qr46qz24b59 15 18 . . PUNCT qr46qz24b59 16 1 this this DET qr46qz24b59 16 2 work work NOUN qr46qz24b59 16 3 presents present VERB qr46qz24b59 16 4 mems mem VERB qr46qz24b59 16 5 piezoelectric piezoelectric ADJ qr46qz24b59 16 6 resonators resonator NOUN qr46qz24b59 16 7 as as ADP qr46qz24b59 16 8 an an DET qr46qz24b59 16 9 efficient efficient ADJ qr46qz24b59 16 10 approach approach NOUN qr46qz24b59 16 11 to to PART qr46qz24b59 16 12 implement implement VERB qr46qz24b59 16 13 ramping ramp VERB qr46qz24b59 16 14 clocks clock NOUN qr46qz24b59 16 15 for for ADP qr46qz24b59 16 16 reversible reversible ADJ qr46qz24b59 16 17 computing computing NOUN qr46qz24b59 16 18 that that SCONJ qr46qz24b59 16 19 not not PART qr46qz24b59 16 20 only only ADV qr46qz24b59 16 21 supply supply NOUN qr46qz24b59 16 22 charge charge NOUN qr46qz24b59 16 23 to to ADP qr46qz24b59 16 24 the the DET qr46qz24b59 16 25 logic logic NOUN qr46qz24b59 16 26 but but CCONJ qr46qz24b59 16 27 can can AUX qr46qz24b59 16 28 also also ADV qr46qz24b59 16 29 recycle recycle VERB qr46qz24b59 16 30 the the DET qr46qz24b59 16 31 energy energy NOUN qr46qz24b59 16 32 used use VERB qr46qz24b59 16 33 by by ADP qr46qz24b59 16 34 the the DET qr46qz24b59 16 35 logic logic NOUN qr46qz24b59 16 36 . . PUNCT qr46qz24b59 17 1 the the DET qr46qz24b59 17 2 two two NUM qr46qz24b59 17 3 different different ADJ qr46qz24b59 17 4 mems mem NOUN qr46qz24b59 17 5 devices device NOUN qr46qz24b59 17 6 presented present VERB qr46qz24b59 17 7 in in ADP qr46qz24b59 17 8 this this DET qr46qz24b59 17 9 work work NOUN qr46qz24b59 17 10 pave pave VERB qr46qz24b59 17 11 the the DET qr46qz24b59 17 12 way way NOUN qr46qz24b59 17 13 for for ADP qr46qz24b59 17 14 a a DET qr46qz24b59 17 15 complete complete ADJ qr46qz24b59 17 16 system system NOUN qr46qz24b59 17 17 for for ADP qr46qz24b59 17 18 reversible reversible ADJ qr46qz24b59 17 19 computing computing NOUN qr46qz24b59 17 20 that that PRON qr46qz24b59 17 21 includes include VERB qr46qz24b59 17 22 both both CCONJ qr46qz24b59 17 23 the the DET qr46qz24b59 17 24 adiabatic adiabatic ADJ qr46qz24b59 17 25 reversible reversible ADJ qr46qz24b59 17 26 logic logic NOUN qr46qz24b59 17 27 and and CCONJ qr46qz24b59 17 28 the the DET qr46qz24b59 17 29 required require VERB qr46qz24b59 17 30 ramping ramping NOUN qr46qz24b59 17 31 clocks clock NOUN qr46qz24b59 17 32 . . PUNCT