id	sid	tid	token	lemma	pos
pc289g57846	1	1	microelectronics	microelectronic	NOUN
pc289g57846	1	2	packaging	packaging	NOUN
pc289g57846	1	3	forms	form	VERB
pc289g57846	1	4	the	the	DET
pc289g57846	1	5	link	link	NOUN
pc289g57846	1	6	between	between	ADP
pc289g57846	1	7	the	the	DET
pc289g57846	1	8	nanometer	nanometer	NOUN
pc289g57846	1	9	scale	scale	NOUN
pc289g57846	1	10	transistors	transistor	NOUN
pc289g57846	1	11	on	on	ADP
pc289g57846	1	12	a	a	DET
pc289g57846	1	13	chip	chip	NOUN
pc289g57846	1	14	and	and	CCONJ
pc289g57846	1	15	the	the	DET
pc289g57846	1	16	micrometer	micrometer	NOUN
pc289g57846	1	17	or	or	CCONJ
pc289g57846	1	18	millimeter	millimeter	NOUN
pc289g57846	1	19	scale	scale	NOUN
pc289g57846	1	20	interconnects	interconnect	NOUN
pc289g57846	1	21	that	that	PRON
pc289g57846	1	22	provide	provide	VERB
pc289g57846	1	23	electrical	electrical	ADJ
pc289g57846	1	24	connections	connection	NOUN
pc289g57846	1	25	between	between	ADP
pc289g57846	1	26	chips	chip	NOUN
pc289g57846	1	27	and	and	CCONJ
pc289g57846	1	28	other	other	ADJ
pc289g57846	1	29	circuit	circuit	NOUN
pc289g57846	1	30	components	component	NOUN
pc289g57846	1	31	.	.	PUNCT
pc289g57846	2	1	for	for	ADP
pc289g57846	2	2	modern	modern	ADJ
pc289g57846	2	3	digital	digital	ADJ
pc289g57846	2	4	systems	system	NOUN
pc289g57846	2	5	,	,	PUNCT
pc289g57846	2	6	the	the	DET
pc289g57846	2	7	number	number	NOUN
pc289g57846	2	8	of	of	ADP
pc289g57846	2	9	interconnects	interconnect	NOUN
pc289g57846	2	10	is	be	AUX
pc289g57846	2	11	small	small	ADJ
pc289g57846	2	12	compared	compare	VERB
pc289g57846	2	13	to	to	ADP
pc289g57846	2	14	the	the	DET
pc289g57846	2	15	number	number	NOUN
pc289g57846	2	16	of	of	ADP
pc289g57846	2	17	active	active	ADJ
pc289g57846	2	18	devices	device	NOUN
pc289g57846	2	19	on	on	ADP
pc289g57846	2	20	the	the	DET
pc289g57846	2	21	chip	chip	NOUN
pc289g57846	2	22	,	,	PUNCT
pc289g57846	2	23	and	and	CCONJ
pc289g57846	2	24	given	give	VERB
pc289g57846	2	25	the	the	DET
pc289g57846	2	26	high	high	ADJ
pc289g57846	2	27	data	datum	NOUN
pc289g57846	2	28	processing	process	VERB
pc289g57846	2	29	throughput	throughput	NOUN
pc289g57846	2	30	of	of	ADP
pc289g57846	2	31	many	many	ADJ
pc289g57846	2	32	modern	modern	ADJ
pc289g57846	2	33	systems	system	NOUN
pc289g57846	2	34	,	,	PUNCT
pc289g57846	2	35	the	the	DET
pc289g57846	2	36	interconnects	interconnect	NOUN
pc289g57846	2	37	are	be	AUX
pc289g57846	2	38	by	by	ADP
pc289g57846	2	39	necessity	necessity	NOUN
pc289g57846	2	40	shared	share	VERB
pc289g57846	2	41	or	or	CCONJ
pc289g57846	2	42	multiplexed	multiplexed	ADJ
pc289g57846	2	43	.	.	PUNCT
pc289g57846	3	1	for	for	SCONJ
pc289g57846	3	2	systems	system	NOUN
pc289g57846	3	3	with	with	ADP
pc289g57846	3	4	high	high	ADJ
pc289g57846	3	5	data	datum	NOUN
pc289g57846	3	6	throughput	throughput	NOUN
pc289g57846	3	7	multiplexed	multiplexe	VERB
pc289g57846	3	8	through	through	ADP
pc289g57846	3	9	a	a	DET
pc289g57846	3	10	limited	limited	ADJ
pc289g57846	3	11	number	number	NOUN
pc289g57846	3	12	of	of	ADP
pc289g57846	3	13	interconnects	interconnect	NOUN
pc289g57846	3	14	,	,	PUNCT
pc289g57846	3	15	conventional	conventional	ADJ
pc289g57846	3	16	approaches	approach	NOUN
pc289g57846	3	17	such	such	ADJ
pc289g57846	3	18	as	as	ADP
pc289g57846	3	19	wire	wire	NOUN
pc289g57846	3	20	bonds	bond	NOUN
pc289g57846	3	21	and	and	CCONJ
pc289g57846	3	22	flip	flip	ADJ
pc289g57846	3	23	-	-	PUNCT
pc289g57846	3	24	chip	chip	NOUN
pc289g57846	3	25	interconnects	interconnect	NOUN
pc289g57846	3	26	may	may	AUX
pc289g57846	3	27	not	not	PART
pc289g57846	3	28	offer	offer	VERB
pc289g57846	3	29	sufficient	sufficient	ADJ
pc289g57846	3	30	signal	signal	NOUN
pc289g57846	3	31	integrity	integrity	NOUN
pc289g57846	3	32	and	and	CCONJ
pc289g57846	3	33	bandwidth	bandwidth	ADJ
pc289g57846	3	34	to	to	PART
pc289g57846	3	35	handle	handle	VERB
pc289g57846	3	36	the	the	DET
pc289g57846	3	37	required	require	VERB
pc289g57846	3	38	data	data	NOUN
pc289g57846	3	39	rates	rate	NOUN
pc289g57846	3	40	.	.	PUNCT
pc289g57846	4	1	interconnect	interconnect	VERB
pc289g57846	4	2	bandwidth	bandwidth	ADJ
pc289g57846	4	3	and	and	CCONJ
pc289g57846	4	4	frequency	frequency	NOUN
pc289g57846	4	5	limitations	limitation	NOUN
pc289g57846	4	6	apply	apply	VERB
pc289g57846	4	7	to	to	ADP
pc289g57846	4	8	millimeter	millimeter	NOUN
pc289g57846	4	9	-	-	PUNCT
pc289g57846	4	10	wave	wave	NOUN
pc289g57846	4	11	analog	analog	NOUN
pc289g57846	4	12	systems	system	NOUN
pc289g57846	4	13	as	as	ADV
pc289g57846	4	14	well	well	ADV
pc289g57846	4	15	;	;	PUNCT
pc289g57846	4	16	the	the	DET
pc289g57846	4	17	ability	ability	NOUN
pc289g57846	4	18	to	to	PART
pc289g57846	4	19	process	process	VERB
pc289g57846	4	20	signals	signal	NOUN
pc289g57846	4	21	in	in	ADP
pc289g57846	4	22	the	the	DET
pc289g57846	4	23	millimeter	millimeter	NOUN
pc289g57846	4	24	-	-	PUNCT
pc289g57846	4	25	wave	wave	NOUN
pc289g57846	4	26	and	and	CCONJ
pc289g57846	4	27	thz	thz	PROPN
pc289g57846	4	28	frequency	frequency	NOUN
pc289g57846	4	29	regimes	regime	NOUN
pc289g57846	4	30	are	be	AUX
pc289g57846	4	31	becoming	become	VERB
pc289g57846	4	32	increasingly	increasingly	ADV
pc289g57846	4	33	important	important	ADJ
pc289g57846	4	34	for	for	ADP
pc289g57846	4	35	emerging	emerge	VERB
pc289g57846	4	36	applications	application	NOUN
pc289g57846	4	37	in	in	ADP
pc289g57846	4	38	communications	communication	NOUN
pc289g57846	4	39	,	,	PUNCT
pc289g57846	4	40	security	security	NOUN
pc289g57846	4	41	,	,	PUNCT
pc289g57846	4	42	and	and	CCONJ
pc289g57846	4	43	scientific	scientific	ADJ
pc289g57846	4	44	research	research	NOUN
pc289g57846	4	45	.	.	PUNCT
pc289g57846	5	1	for	for	ADP
pc289g57846	5	2	such	such	ADJ
pc289g57846	5	3	millimeter	millimeter	NOUN
pc289g57846	5	4	-	-	PUNCT
pc289g57846	5	5	wave	wave	NOUN
pc289g57846	5	6	systems	system	NOUN
pc289g57846	5	7	,	,	PUNCT
pc289g57846	5	8	the	the	DET
pc289g57846	5	9	bandwidth	bandwidth	NOUN
pc289g57846	5	10	of	of	ADP
pc289g57846	5	11	individual	individual	ADJ
pc289g57846	5	12	interconnects	interconnect	NOUN
pc289g57846	5	13	is	be	AUX
pc289g57846	5	14	paramount	paramount	ADJ
pc289g57846	5	15	,	,	PUNCT
pc289g57846	5	16	and	and	CCONJ
pc289g57846	5	17	the	the	DET
pc289g57846	5	18	packing	packing	NOUN
pc289g57846	5	19	densities	density	NOUN
pc289g57846	5	20	are	be	AUX
pc289g57846	5	21	far	far	ADV
pc289g57846	5	22	less	less	ADV
pc289g57846	5	23	important	important	ADJ
pc289g57846	5	24	.	.	PUNCT
pc289g57846	6	1	to	to	PART
pc289g57846	6	2	address	address	VERB
pc289g57846	6	3	these	these	DET
pc289g57846	6	4	limitations	limitation	NOUN
pc289g57846	6	5	for	for	ADP
pc289g57846	6	6	both	both	CCONJ
pc289g57846	6	7	digital	digital	ADJ
pc289g57846	6	8	and	and	CCONJ
pc289g57846	6	9	analog	analog	NOUN
pc289g57846	6	10	systems	system	NOUN
pc289g57846	6	11	,	,	PUNCT
pc289g57846	6	12	a	a	DET
pc289g57846	6	13	direct	direct	ADV
pc289g57846	6	14	-	-	PUNCT
pc289g57846	6	15	coupled	couple	VERB
pc289g57846	6	16	chip	chip	NOUN
pc289g57846	6	17	-	-	PUNCT
pc289g57846	6	18	to	to	ADP
pc289g57846	6	19	-	-	PUNCT
pc289g57846	6	20	chip	chip	NOUN
pc289g57846	6	21	interconnect	interconnect	NOUN
pc289g57846	6	22	technology	technology	NOUN
pc289g57846	6	23	called	call	VERB
pc289g57846	6	24	'	'	PUNCT
pc289g57846	6	25	quilt	quilt	NOUN
pc289g57846	6	26	packaging	packaging	NOUN
pc289g57846	6	27	'	'	PUNCT
pc289g57846	6	28	is	be	AUX
pc289g57846	6	29	explored	explore	VERB
pc289g57846	6	30	.	.	PUNCT
pc289g57846	7	1	this	this	DET
pc289g57846	7	2	technology	technology	NOUN
pc289g57846	7	3	is	be	AUX
pc289g57846	7	4	based	base	VERB
pc289g57846	7	5	on	on	ADP
pc289g57846	7	6	micro	micro	ADJ
pc289g57846	7	7	-	-	ADJ
pc289g57846	7	8	electro	electro	ADJ
pc289g57846	7	9	-	-	PUNCT
pc289g57846	7	10	mechanical	mechanical	ADJ
pc289g57846	7	11	system	system	NOUN
pc289g57846	7	12	(	(	PUNCT
pc289g57846	7	13	mems	mem	NOUN
pc289g57846	7	14	)	)	PUNCT
pc289g57846	7	15	inspired	inspire	VERB
pc289g57846	7	16	fabrication	fabrication	NOUN
pc289g57846	7	17	processing	processing	NOUN
pc289g57846	7	18	.	.	PUNCT
pc289g57846	8	1	quilt	quilt	NOUN
pc289g57846	8	2	packaging	packaging	NOUN
pc289g57846	8	3	uses	use	VERB
pc289g57846	8	4	copper	copper	NOUN
pc289g57846	8	5	projections	projection	NOUN
pc289g57846	8	6	called	call	VERB
pc289g57846	8	7	'	'	PUNCT
pc289g57846	8	8	nodules	nodule	NOUN
pc289g57846	8	9	'	'	PUNCT
pc289g57846	8	10	to	to	PART
pc289g57846	8	11	bridge	bridge	VERB
pc289g57846	8	12	a	a	DET
pc289g57846	8	13	short	short	ADJ
pc289g57846	8	14	air	air	NOUN
pc289g57846	8	15	gap	gap	NOUN
pc289g57846	8	16	between	between	ADP
pc289g57846	8	17	one	one	NUM
pc289g57846	8	18	chip	chip	NOUN
pc289g57846	8	19	and	and	CCONJ
pc289g57846	8	20	the	the	DET
pc289g57846	8	21	next	next	ADJ
pc289g57846	8	22	.	.	PUNCT
pc289g57846	9	1	it	it	PRON
pc289g57846	9	2	is	be	AUX
pc289g57846	9	3	shown	show	VERB
pc289g57846	9	4	experimentally	experimentally	ADV
pc289g57846	9	5	that	that	SCONJ
pc289g57846	9	6	this	this	DET
pc289g57846	9	7	technology	technology	NOUN
pc289g57846	9	8	can	can	AUX
pc289g57846	9	9	directly	directly	ADV
pc289g57846	9	10	address	address	VERB
pc289g57846	9	11	interconnect	interconnect	ADJ
pc289g57846	9	12	data	data	NOUN
pc289g57846	9	13	rate	rate	NOUN
pc289g57846	9	14	limitations	limitation	NOUN
pc289g57846	9	15	,	,	PUNCT
pc289g57846	9	16	offering	offer	VERB
pc289g57846	9	17	measured	measure	VERB
pc289g57846	9	18	insertion	insertion	NOUN
pc289g57846	9	19	losses	loss	NOUN
pc289g57846	9	20	below	below	ADP
pc289g57846	9	21	1.4	1.4	NUM
pc289g57846	9	22	db	db	NOUN
pc289g57846	9	23	and	and	CCONJ
pc289g57846	9	24	return	return	VERB
pc289g57846	9	25	losses	loss	NOUN
pc289g57846	9	26	of	of	ADP
pc289g57846	9	27	better	well	ADJ
pc289g57846	9	28	than	than	ADP
pc289g57846	9	29	12.5	12.5	NUM
pc289g57846	9	30	db	db	NOUN
pc289g57846	9	31	from	from	ADP
pc289g57846	9	32	dc	dc	PROPN
pc289g57846	9	33	to	to	ADP
pc289g57846	9	34	220	220	NUM
pc289g57846	9	35	ghz	ghz	NOUN
pc289g57846	9	36	with	with	ADP
pc289g57846	9	37	well	well	ADV
pc289g57846	9	38	-	-	PUNCT
pc289g57846	9	39	controlled	control	VERB
pc289g57846	9	40	latency	latency	NOUN
pc289g57846	9	41	and	and	CCONJ
pc289g57846	9	42	phase	phase	NOUN
pc289g57846	9	43	.	.	PUNCT
pc289g57846	10	1	furthermore	furthermore	ADV
pc289g57846	10	2	,	,	PUNCT
pc289g57846	10	3	simulations	simulation	NOUN
pc289g57846	10	4	suggest	suggest	VERB
pc289g57846	10	5	that	that	SCONJ
pc289g57846	10	6	the	the	DET
pc289g57846	10	7	technology	technology	NOUN
pc289g57846	10	8	is	be	AUX
pc289g57846	10	9	promising	promise	VERB
pc289g57846	10	10	for	for	ADP
pc289g57846	10	11	further	further	ADJ
pc289g57846	10	12	reductions	reduction	NOUN
pc289g57846	10	13	in	in	ADP
pc289g57846	10	14	loss	loss	NOUN
pc289g57846	10	15	and	and	CCONJ
pc289g57846	10	16	increases	increase	NOUN
pc289g57846	10	17	in	in	ADP
pc289g57846	10	18	bandwidth	bandwidth	ADJ
pc289g57846	10	19	and	and	CCONJ
pc289g57846	10	20	operational	operational	ADJ
pc289g57846	10	21	frequency	frequency	NOUN
pc289g57846	10	22	through	through	ADP
pc289g57846	10	23	additional	additional	ADJ
pc289g57846	10	24	structural	structural	ADJ
pc289g57846	10	25	optimization	optimization	NOUN
pc289g57846	10	26	.	.	PUNCT