id	sid	tid	token	lemma	pos
k0698625s5s	1	1	the	the	DET
k0698625s5s	1	2	focus	focus	NOUN
k0698625s5s	1	3	of	of	ADP
k0698625s5s	1	4	this	this	DET
k0698625s5s	1	5	work	work	NOUN
k0698625s5s	1	6	is	be	AUX
k0698625s5s	1	7	to	to	PART
k0698625s5s	1	8	fabricate	fabricate	VERB
k0698625s5s	1	9	algan	algan	PROPN
k0698625s5s	1	10	/	/	SYM
k0698625s5s	1	11	gan	gan	PROPN
k0698625s5s	1	12	high	high	ADJ
k0698625s5s	1	13	electron	electron	NOUN
k0698625s5s	1	14	mobility	mobility	NOUN
k0698625s5s	1	15	transistors	transistor	NOUN
k0698625s5s	1	16	(	(	PUNCT
k0698625s5s	1	17	hemts	hemts	PROPN
k0698625s5s	1	18	)	)	PUNCT
k0698625s5s	1	19	and	and	CCONJ
k0698625s5s	1	20	provide	provide	VERB
k0698625s5s	1	21	feedback	feedback	NOUN
k0698625s5s	1	22	to	to	ADP
k0698625s5s	1	23	the	the	DET
k0698625s5s	1	24	mbe	mbe	PROPN
k0698625s5s	1	25	lab	lab	PROPN
k0698625s5s	1	26	.	.	PUNCT
k0698625s5s	2	1	cl2	cl2	NOUN
k0698625s5s	2	2	-	-	PUNCT
k0698625s5s	2	3	based	base	VERB
k0698625s5s	2	4	gan	gan	PROPN
k0698625s5s	2	5	reactive	reactive	ADJ
k0698625s5s	2	6	ion	ion	NOUN
k0698625s5s	2	7	etching	etching	NOUN
k0698625s5s	2	8	,	,	PUNCT
k0698625s5s	2	9	as	as	ADP
k0698625s5s	2	10	a	a	DET
k0698625s5s	2	11	critical	critical	ADJ
k0698625s5s	2	12	step	step	NOUN
k0698625s5s	2	13	of	of	ADP
k0698625s5s	2	14	hemt	hemt	PROPN
k0698625s5s	2	15	process	process	NOUN
k0698625s5s	2	16	flow	flow	NOUN
k0698625s5s	2	17	,	,	PUNCT
k0698625s5s	2	18	is	be	AUX
k0698625s5s	2	19	investigated	investigate	VERB
k0698625s5s	2	20	to	to	PART
k0698625s5s	2	21	obtain	obtain	VERB
k0698625s5s	2	22	consistent	consistent	ADJ
k0698625s5s	2	23	etch	etch	NOUN
k0698625s5s	2	24	rates	rate	NOUN
k0698625s5s	2	25	with	with	ADP
k0698625s5s	2	26	smooth	smooth	ADJ
k0698625s5s	2	27	etched	etch	VERB
k0698625s5s	2	28	surfaces	surface	NOUN
k0698625s5s	2	29	.	.	PUNCT
k0698625s5s	3	1	the	the	DET
k0698625s5s	3	2	adverse	adverse	ADJ
k0698625s5s	3	3	micromasking	micromasking	ADJ
k0698625s5s	3	4	effect	effect	NOUN
k0698625s5s	3	5	is	be	AUX
k0698625s5s	3	6	largely	largely	ADV
k0698625s5s	3	7	mitigated	mitigate	VERB
k0698625s5s	3	8	.	.	PUNCT
k0698625s5s	4	1	the	the	DET
k0698625s5s	4	2	atomic	atomic	ADJ
k0698625s5s	4	3	force	force	PROPN
k0698625s5s	4	4	microscopic	microscopic	PROPN
k0698625s5s	4	5	study	study	NOUN
k0698625s5s	4	6	show	show	VERB
k0698625s5s	4	7	the	the	DET
k0698625s5s	4	8	roughness	roughness	NOUN
k0698625s5s	4	9	of	of	ADP
k0698625s5s	4	10	etched	etched	ADJ
k0698625s5s	4	11	gan	gan	PROPN
k0698625s5s	4	12	surfaces	surface	NOUN
k0698625s5s	4	13	is	be	AUX
k0698625s5s	4	14	comparable	comparable	ADJ
k0698625s5s	4	15	with	with	ADP
k0698625s5s	4	16	that	that	PRON
k0698625s5s	4	17	of	of	ADP
k0698625s5s	4	18	the	the	DET
k0698625s5s	4	19	as	as	ADV
k0698625s5s	4	20	-	-	PUNCT
k0698625s5s	4	21	grown	grow	VERB
k0698625s5s	4	22	surface	surface	NOUN
k0698625s5s	4	23	.	.	PUNCT
k0698625s5s	5	1	a	a	DET
k0698625s5s	5	2	more	more	ADV
k0698625s5s	5	3	predictable	predictable	ADJ
k0698625s5s	5	4	etch	etch	NOUN
k0698625s5s	5	5	rate	rate	NOUN
k0698625s5s	5	6	is	be	AUX
k0698625s5s	5	7	also	also	ADV
k0698625s5s	5	8	obtained	obtain	VERB
k0698625s5s	5	9	,	,	PUNCT
k0698625s5s	5	10	~	~	PUNCT
k0698625s5s	5	11	110	110	NUM
k0698625s5s	5	12	nm	nm	NOUN
k0698625s5s	5	13	/	/	SYM
k0698625s5s	5	14	min	min	NOUN
k0698625s5s	5	15	at	at	ADP
k0698625s5s	5	16	a	a	DET
k0698625s5s	5	17	plasma	plasma	NOUN
k0698625s5s	5	18	power	power	NOUN
k0698625s5s	5	19	of	of	ADP
k0698625s5s	5	20	150	150	NUM
k0698625s5s	5	21	w	w	NOUN
k0698625s5s	5	22	with	with	ADP
k0698625s5s	5	23	reduced	reduce	VERB
k0698625s5s	5	24	etch	etch	NOUN
k0698625s5s	5	25	damage	damage	NOUN
k0698625s5s	5	26	.	.	PUNCT
k0698625s5s	6	1	hemts	hemts	PROPN
k0698625s5s	6	2	are	be	AUX
k0698625s5s	6	3	fabricated	fabricate	VERB
k0698625s5s	6	4	using	use	VERB
k0698625s5s	6	5	algan	algan	PROPN
k0698625s5s	6	6	/	/	SYM
k0698625s5s	6	7	gan	gan	PROPN
k0698625s5s	6	8	samples	sample	NOUN
k0698625s5s	6	9	grown	grow	VERB
k0698625s5s	6	10	both	both	PRON
k0698625s5s	6	11	by	by	ADP
k0698625s5s	6	12	molecular	molecular	ADJ
k0698625s5s	6	13	beam	beam	NOUN
k0698625s5s	6	14	epitaxy	epitaxy	PROPN
k0698625s5s	6	15	(	(	PUNCT
k0698625s5s	6	16	mbe	mbe	PROPN
k0698625s5s	6	17	)	)	PUNCT
k0698625s5s	6	18	system	system	NOUN
k0698625s5s	6	19	at	at	ADP
k0698625s5s	6	20	notre	notre	PROPN
k0698625s5s	6	21	dame	dame	NOUN
k0698625s5s	6	22	and	and	CCONJ
k0698625s5s	6	23	by	by	ADP
k0698625s5s	6	24	metal	metal	NOUN
k0698625s5s	6	25	organic	organic	ADJ
k0698625s5s	6	26	chemical	chemical	NOUN
k0698625s5s	6	27	vapor	vapor	NOUN
k0698625s5s	6	28	deposition	deposition	NOUN
k0698625s5s	6	29	(	(	PUNCT
k0698625s5s	6	30	mocvd	mocvd	PROPN
k0698625s5s	6	31	)	)	PUNCT
k0698625s5s	6	32	at	at	ADP
k0698625s5s	6	33	ucsb	ucsb	ADJ
k0698625s5s	6	34	for	for	ADP
k0698625s5s	6	35	comparison	comparison	NOUN
k0698625s5s	6	36	.	.	PUNCT
k0698625s5s	7	1	the	the	DET
k0698625s5s	7	2	current	current	ADJ
k0698625s5s	7	3	mbe	mbe	PROPN
k0698625s5s	7	4	hemts	hemts	PROPN
k0698625s5s	7	5	exhibit	exhibit	VERB
k0698625s5s	7	6	smaller	small	ADJ
k0698625s5s	7	7	currents	current	NOUN
k0698625s5s	7	8	and	and	CCONJ
k0698625s5s	7	9	higher	high	ADJ
k0698625s5s	7	10	buffer	buffer	NOUN
k0698625s5s	7	11	leakage	leakage	NOUN
k0698625s5s	7	12	due	due	ADP
k0698625s5s	7	13	to	to	ADP
k0698625s5s	7	14	the	the	DET
k0698625s5s	7	15	lower	low	ADJ
k0698625s5s	7	16	charge	charge	NOUN
k0698625s5s	7	17	concentrations	concentration	NOUN
k0698625s5s	7	18	,	,	PUNCT
k0698625s5s	7	19	low	low	ADJ
k0698625s5s	7	20	carrier	carrier	NOUN
k0698625s5s	7	21	mobilities	mobility	NOUN
k0698625s5s	7	22	and	and	CCONJ
k0698625s5s	7	23	poor	poor	ADJ
k0698625s5s	7	24	regrowth	regrowth	NOUN
k0698625s5s	7	25	interfaces	interface	NOUN
k0698625s5s	7	26	.	.	PUNCT
k0698625s5s	8	1	flourine	flourine	NOUN
k0698625s5s	8	2	-	-	PUNCT
k0698625s5s	8	3	treatment	treatment	NOUN
k0698625s5s	8	4	to	to	PART
k0698625s5s	8	5	reduce	reduce	VERB
k0698625s5s	8	6	gate	gate	NOUN
k0698625s5s	8	7	leakage	leakage	NOUN
k0698625s5s	8	8	is	be	AUX
k0698625s5s	8	9	also	also	ADV
k0698625s5s	8	10	attempted	attempt	VERB
k0698625s5s	8	11	.	.	PUNCT
k0698625s5s	9	1	the	the	DET
k0698625s5s	9	2	preliminary	preliminary	ADJ
k0698625s5s	9	3	results	result	NOUN
k0698625s5s	9	4	are	be	AUX
k0698625s5s	9	5	summarized	summarize	VERB
k0698625s5s	9	6	.	.	PUNCT