id	sid	tid	token	lemma	pos
jh343r10373	1	1	materials	material	NOUN
jh343r10373	1	2	with	with	ADP
jh343r10373	1	3	nanoscale	nanoscale	ADJ
jh343r10373	1	4	dimensions	dimension	NOUN
jh343r10373	1	5	allow	allow	VERB
jh343r10373	1	6	for	for	ADP
jh343r10373	1	7	the	the	DET
jh343r10373	1	8	exploitation	exploitation	NOUN
jh343r10373	1	9	of	of	ADP
jh343r10373	1	10	a	a	DET
jh343r10373	1	11	set	set	NOUN
jh343r10373	1	12	of	of	ADP
jh343r10373	1	13	unique	unique	ADJ
jh343r10373	1	14	and	and	CCONJ
jh343r10373	1	15	often	often	ADV
jh343r10373	1	16	extraordinary	extraordinary	ADJ
jh343r10373	1	17	properties	property	NOUN
jh343r10373	1	18	originating	originate	VERB
jh343r10373	1	19	from	from	ADP
jh343r10373	1	20	finite	finite	ADJ
jh343r10373	1	21	size	size	NOUN
jh343r10373	1	22	effects	effect	NOUN
jh343r10373	1	23	.	.	PUNCT
jh343r10373	2	1	the	the	DET
jh343r10373	2	2	devices	device	NOUN
jh343r10373	2	3	that	that	PRON
jh343r10373	2	4	are	be	AUX
jh343r10373	2	5	built	build	VERB
jh343r10373	2	6	using	use	VERB
jh343r10373	2	7	these	these	DET
jh343r10373	2	8	nanomaterials	nanomaterial	NOUN
jh343r10373	2	9	are	be	AUX
jh343r10373	2	10	,	,	PUNCT
jh343r10373	2	11	therefore	therefore	ADV
jh343r10373	2	12	,	,	PUNCT
jh343r10373	2	13	capable	capable	ADJ
jh343r10373	2	14	of	of	ADP
jh343r10373	2	15	deriving	derive	VERB
jh343r10373	2	16	new	new	ADJ
jh343r10373	2	17	or	or	CCONJ
jh343r10373	2	18	enhanced	enhanced	ADJ
jh343r10373	2	19	functionalities	functionality	NOUN
jh343r10373	2	20	based	base	VERB
jh343r10373	2	21	on	on	ADP
jh343r10373	2	22	the	the	DET
jh343r10373	2	23	remarkable	remarkable	ADJ
jh343r10373	2	24	optical	optical	ADJ
jh343r10373	2	25	,	,	PUNCT
jh343r10373	2	26	chemical	chemical	ADJ
jh343r10373	2	27	,	,	PUNCT
jh343r10373	2	28	thermal	thermal	ADJ
jh343r10373	2	29	,	,	PUNCT
jh343r10373	2	30	magnetic	magnetic	ADJ
jh343r10373	2	31	,	,	PUNCT
jh343r10373	2	32	and	and	CCONJ
jh343r10373	2	33	transport	transport	NOUN
jh343r10373	2	34	properties	property	NOUN
jh343r10373	2	35	accessible	accessible	ADJ
jh343r10373	2	36	.	.	PUNCT
jh343r10373	3	1	nanomaterial	nanomaterial	ADJ
jh343r10373	3	2	fabrication	fabrication	NOUN
jh343r10373	3	3	involves	involve	VERB
jh343r10373	3	4	various	various	ADJ
jh343r10373	3	5	methods	method	NOUN
jh343r10373	3	6	and	and	CCONJ
jh343r10373	3	7	strategies	strategy	NOUN
jh343r10373	3	8	for	for	ADP
jh343r10373	3	9	synthesizing	synthesizing	NOUN
jh343r10373	3	10	,	,	PUNCT
jh343r10373	3	11	manufacturing	manufacturing	NOUN
jh343r10373	3	12	,	,	PUNCT
jh343r10373	3	13	and	and	CCONJ
jh343r10373	3	14	assembling	assemble	VERB
jh343r10373	3	15	nanostructured	nanostructure	VERB
jh343r10373	3	16	surfaces	surface	NOUN
jh343r10373	3	17	and	and	CCONJ
jh343r10373	3	18	nanostructures	nanostructure	NOUN
jh343r10373	3	19	.	.	PUNCT
jh343r10373	4	1	over	over	ADP
jh343r10373	4	2	the	the	DET
jh343r10373	4	3	last	last	ADJ
jh343r10373	4	4	two	two	NUM
jh343r10373	4	5	decades	decade	NOUN
jh343r10373	4	6	there	there	PRON
jh343r10373	4	7	has	have	AUX
jh343r10373	4	8	been	be	AUX
jh343r10373	4	9	tremendous	tremendous	ADJ
jh343r10373	4	10	progress	progress	NOUN
jh343r10373	4	11	in	in	ADP
jh343r10373	4	12	the	the	DET
jh343r10373	4	13	development	development	NOUN
jh343r10373	4	14	of	of	ADP
jh343r10373	4	15	a	a	DET
jh343r10373	4	16	variety	variety	NOUN
jh343r10373	4	17	of	of	ADP
jh343r10373	4	18	nanofabrication	nanofabrication	NOUN
jh343r10373	4	19	techniques	technique	NOUN
jh343r10373	4	20	able	able	ADJ
jh343r10373	4	21	to	to	PART
jh343r10373	4	22	meet	meet	VERB
jh343r10373	4	23	the	the	DET
jh343r10373	4	24	demands	demand	NOUN
jh343r10373	4	25	of	of	ADP
jh343r10373	4	26	nanotechnology	nanotechnology	NOUN
jh343r10373	4	27	and	and	CCONJ
jh343r10373	4	28	fundamental	fundamental	ADJ
jh343r10373	4	29	research	research	NOUN
jh343r10373	4	30	.	.	PUNCT
jh343r10373	5	1	these	these	DET
jh343r10373	5	2	nanofabrication	nanofabrication	NOUN
jh343r10373	5	3	techniques	technique	NOUN
jh343r10373	5	4	have	have	AUX
jh343r10373	5	5	already	already	ADV
jh343r10373	5	6	found	find	VERB
jh343r10373	5	7	their	their	PRON
jh343r10373	5	8	applications	application	NOUN
jh343r10373	5	9	in	in	ADP
jh343r10373	5	10	numerous	numerous	ADJ
jh343r10373	5	11	electronic	electronic	ADJ
jh343r10373	5	12	,	,	PUNCT
jh343r10373	5	13	sensing	sensing	NOUN
jh343r10373	5	14	,	,	PUNCT
jh343r10373	5	15	medicine	medicine	NOUN
jh343r10373	5	16	,	,	PUNCT
jh343r10373	5	17	renewable	renewable	ADJ
jh343r10373	5	18	energy	energy	NOUN
jh343r10373	5	19	,	,	PUNCT
jh343r10373	5	20	photovoltaics	photovoltaic	NOUN
jh343r10373	5	21	,	,	PUNCT
jh343r10373	5	22	construction	construction	NOUN
jh343r10373	5	23	,	,	PUNCT
jh343r10373	5	24	automotive	automotive	ADJ
jh343r10373	5	25	,	,	PUNCT
jh343r10373	5	26	chemical	chemical	NOUN
jh343r10373	5	27	,	,	PUNCT
jh343r10373	5	28	and	and	CCONJ
jh343r10373	5	29	catalysis	catalysis	NOUN
jh343r10373	5	30	applications	application	NOUN
jh343r10373	5	31	.	.	PUNCT
jh343r10373	6	1	there	there	ADV
jh343r10373	6	2	,	,	PUNCT
jh343r10373	6	3	however	however	ADV
jh343r10373	6	4	,	,	PUNCT
jh343r10373	6	5	often	often	ADV
jh343r10373	6	6	remains	remain	VERB
jh343r10373	6	7	a	a	DET
jh343r10373	6	8	considerable	considerable	ADJ
jh343r10373	6	9	gap	gap	NOUN
jh343r10373	6	10	between	between	ADP
jh343r10373	6	11	the	the	DET
jh343r10373	6	12	demonstration	demonstration	NOUN
jh343r10373	6	13	of	of	ADP
jh343r10373	6	14	nanostructure	nanostructure	ADJ
jh343r10373	6	15	synthesis	synthesis	NOUN
jh343r10373	6	16	and	and	CCONJ
jh343r10373	6	17	nanofabrication	nanofabrication	NOUN
jh343r10373	6	18	methods	method	NOUN
jh343r10373	6	19	and	and	CCONJ
jh343r10373	6	20	their	their	PRON
jh343r10373	6	21	commercial	commercial	ADJ
jh343r10373	6	22	implementation.this	implementation.this	PRON
jh343r10373	6	23	dissertation	dissertation	NOUN
jh343r10373	6	24	serves	serve	VERB
jh343r10373	6	25	to	to	PART
jh343r10373	6	26	address	address	VERB
jh343r10373	6	27	these	these	DET
jh343r10373	6	28	challenges	challenge	NOUN
jh343r10373	6	29	by	by	ADP
jh343r10373	6	30	demonstrating	demonstrate	VERB
jh343r10373	6	31	the	the	DET
jh343r10373	6	32	possibility	possibility	NOUN
jh343r10373	6	33	to	to	PART
jh343r10373	6	34	exploit	exploit	VERB
jh343r10373	6	35	several	several	ADJ
jh343r10373	6	36	novel	novel	ADJ
jh343r10373	6	37	nanofabrication	nanofabrication	NOUN
jh343r10373	6	38	techniques	technique	NOUN
jh343r10373	6	39	such	such	ADJ
jh343r10373	6	40	as	as	ADP
jh343r10373	6	41	the	the	PRON
jh343r10373	6	42	:	:	PUNCT
jh343r10373	6	43	(	(	PUNCT
jh343r10373	6	44	i	i	NOUN
jh343r10373	6	45	)	)	PUNCT
jh343r10373	6	46	formation	formation	NOUN
jh343r10373	6	47	of	of	ADP
jh343r10373	6	48	stable	stable	ADJ
jh343r10373	6	49	metal	metal	NOUN
jh343r10373	6	50	nanoparticles	nanoparticle	NOUN
jh343r10373	6	51	using	use	VERB
jh343r10373	6	52	just	just	ADV
jh343r10373	6	53	a	a	DET
jh343r10373	6	54	reducing	reduce	VERB
jh343r10373	6	55	agent	agent	NOUN
jh343r10373	6	56	,	,	PUNCT
jh343r10373	6	57	(	(	PUNCT
jh343r10373	6	58	ii	ii	PROPN
jh343r10373	6	59	)	)	PUNCT
jh343r10373	6	60	thermal	thermal	ADJ
jh343r10373	6	61	dewetting	dewetting	NOUN
jh343r10373	6	62	,	,	PUNCT
jh343r10373	6	63	and	and	CCONJ
jh343r10373	6	64	(	(	PUNCT
jh343r10373	6	65	iii	iii	NUM
jh343r10373	6	66	)	)	PUNCT
jh343r10373	6	67	fabrication	fabrication	NOUN
jh343r10373	6	68	of	of	ADP
jh343r10373	6	69	nanogaps	nanogap	NOUN
jh343r10373	6	70	using	use	VERB
jh343r10373	6	71	a	a	DET
jh343r10373	6	72	single	single	ADJ
jh343r10373	6	73	-	-	PUNCT
jh343r10373	6	74	step	step	NOUN
jh343r10373	6	75	bending	bend	VERB
jh343r10373	6	76	deformation	deformation	NOUN
jh343r10373	6	77	.	.	PUNCT
jh343r10373	7	1	these	these	DET
jh343r10373	7	2	nanofabrication	nanofabrication	NOUN
jh343r10373	7	3	techniques	technique	NOUN
jh343r10373	7	4	were	be	AUX
jh343r10373	7	5	applied	apply	VERB
jh343r10373	7	6	to	to	ADP
jh343r10373	7	7	the	the	DET
jh343r10373	7	8	catalytic	catalytic	ADJ
jh343r10373	7	9	reduction	reduction	NOUN
jh343r10373	7	10	of	of	ADP
jh343r10373	7	11	4	4	NUM
jh343r10373	7	12	-	-	PUNCT
jh343r10373	7	13	nitrophenol	nitrophenol	NOUN
jh343r10373	7	14	,	,	PUNCT
jh343r10373	7	15	hydrogen	hydrogen	NOUN
jh343r10373	7	16	gas	gas	NOUN
jh343r10373	7	17	sensing	sensing	NOUN
jh343r10373	7	18	,	,	PUNCT
jh343r10373	7	19	and	and	CCONJ
jh343r10373	7	20	thermal	thermal	ADJ
jh343r10373	7	21	management	management	NOUN
jh343r10373	7	22	in	in	ADP
jh343r10373	7	23	electronics	electronic	NOUN
jh343r10373	7	24	.	.	PUNCT
jh343r10373	8	1	a	a	DET
jh343r10373	8	2	novel	novel	ADJ
jh343r10373	8	3	approach	approach	NOUN
jh343r10373	8	4	for	for	ADP
jh343r10373	8	5	synthesizing	synthesize	VERB
jh343r10373	8	6	and	and	CCONJ
jh343r10373	8	7	stabilizing	stabilize	VERB
jh343r10373	8	8	colloidal	colloidal	ADJ
jh343r10373	8	9	nanoparticles	nanoparticle	NOUN
jh343r10373	8	10	using	use	VERB
jh343r10373	8	11	only	only	ADJ
jh343r10373	8	12	sodium	sodium	NOUN
jh343r10373	8	13	borohydride	borohydride	NOUN
jh343r10373	8	14	(	(	PUNCT
jh343r10373	8	15	a	a	DET
jh343r10373	8	16	common	common	ADJ
jh343r10373	8	17	reducing	reduce	VERB
jh343r10373	8	18	agent	agent	NOUN
jh343r10373	8	19	)	)	PUNCT
jh343r10373	8	20	was	be	AUX
jh343r10373	8	21	used	use	VERB
jh343r10373	8	22	to	to	PART
jh343r10373	8	23	investigate	investigate	VERB
jh343r10373	8	24	the	the	DET
jh343r10373	8	25	role	role	NOUN
jh343r10373	8	26	of	of	ADP
jh343r10373	8	27	dissolved	dissolved	ADJ
jh343r10373	8	28	oxygen	oxygen	NOUN
jh343r10373	8	29	in	in	ADP
jh343r10373	8	30	determining	determine	VERB
jh343r10373	8	31	the	the	DET
jh343r10373	8	32	induction	induction	NOUN
jh343r10373	8	33	time	time	NOUN
jh343r10373	8	34	during	during	ADP
jh343r10373	8	35	the	the	DET
jh343r10373	8	36	catalytic	catalytic	ADJ
jh343r10373	8	37	reduction	reduction	NOUN
jh343r10373	8	38	of	of	ADP
jh343r10373	8	39	the	the	DET
jh343r10373	8	40	anthropogenic	anthropogenic	ADJ
jh343r10373	8	41	water	water	NOUN
jh343r10373	8	42	pollutant	pollutant	ADJ
jh343r10373	8	43	4	4	NUM
jh343r10373	8	44	-	-	PUNCT
jh343r10373	8	45	nitrophenol	nitrophenol	NOUN
jh343r10373	8	46	.	.	PUNCT
jh343r10373	9	1	the	the	DET
jh343r10373	9	2	same	same	ADJ
jh343r10373	9	3	approach	approach	NOUN
jh343r10373	9	4	was	be	AUX
jh343r10373	9	5	then	then	ADV
jh343r10373	9	6	utilized	utilize	VERB
jh343r10373	9	7	to	to	PART
jh343r10373	9	8	fabricate	fabricate	VERB
jh343r10373	9	9	highly	highly	ADV
jh343r10373	9	10	catalytic	catalytic	ADJ
jh343r10373	9	11	nanostructures	nanostructure	NOUN
jh343r10373	9	12	using	use	VERB
jh343r10373	9	13	a	a	DET
jh343r10373	9	14	single	single	ADJ
jh343r10373	9	15	-	-	PUNCT
jh343r10373	9	16	step	step	NOUN
jh343r10373	9	17	procedure	procedure	NOUN
jh343r10373	9	18	that	that	PRON
jh343r10373	9	19	led	lead	VERB
jh343r10373	9	20	to	to	ADP
jh343r10373	9	21	extraordinary	extraordinary	ADJ
jh343r10373	9	22	catalytic	catalytic	ADJ
jh343r10373	9	23	activity	activity	NOUN
jh343r10373	9	24	with	with	ADP
jh343r10373	9	25	turnover	turnover	NOUN
jh343r10373	9	26	frequencies	frequency	NOUN
jh343r10373	9	27	as	as	ADV
jh343r10373	9	28	high	high	ADJ
jh343r10373	9	29	as	as	ADP
jh343r10373	9	30	65000	65000	NUM
jh343r10373	9	31	h−1	h−1	NUM
jh343r10373	9	32	when	when	SCONJ
jh343r10373	9	33	reducing	reduce	VERB
jh343r10373	9	34	4-nitrophenol.thermal	4-nitrophenol.thermal	NUM
jh343r10373	9	35	dewetting	dewetting	NOUN
jh343r10373	9	36	is	be	AUX
jh343r10373	9	37	one	one	NUM
jh343r10373	9	38	of	of	ADP
jh343r10373	9	39	a	a	DET
jh343r10373	9	40	number	number	NOUN
jh343r10373	9	41	of	of	ADP
jh343r10373	9	42	unconventional	unconventional	ADJ
jh343r10373	9	43	methods	method	NOUN
jh343r10373	9	44	for	for	ADP
jh343r10373	9	45	fabricating	fabricate	VERB
jh343r10373	9	46	substrate	substrate	NOUN
jh343r10373	9	47	-	-	PUNCT
jh343r10373	9	48	based	base	VERB
jh343r10373	9	49	nanomaterials	nanomaterial	NOUN
jh343r10373	9	50	and	and	CCONJ
jh343r10373	9	51	it	it	PRON
jh343r10373	9	52	was	be	AUX
jh343r10373	9	53	used	use	VERB
jh343r10373	9	54	to	to	PART
jh343r10373	9	55	study	study	VERB
jh343r10373	9	56	the	the	DET
jh343r10373	9	57	leaching	leaching	NOUN
jh343r10373	9	58	of	of	ADP
jh343r10373	9	59	metal	metal	NOUN
jh343r10373	9	60	nanostructures	nanostructure	NOUN
jh343r10373	9	61	through	through	ADP
jh343r10373	9	62	oxidative	oxidative	ADJ
jh343r10373	9	63	etching	etching	NOUN
jh343r10373	9	64	and	and	CCONJ
jh343r10373	9	65	its	its	PRON
jh343r10373	9	66	influence	influence	NOUN
jh343r10373	9	67	on	on	ADP
jh343r10373	9	68	the	the	DET
jh343r10373	9	69	catalytic	catalytic	ADJ
jh343r10373	9	70	reduction	reduction	NOUN
jh343r10373	9	71	of	of	ADP
jh343r10373	9	72	4	4	NUM
jh343r10373	9	73	-	-	PUNCT
jh343r10373	9	74	nitrophenol	nitrophenol	NOUN
jh343r10373	9	75	.	.	PUNCT
jh343r10373	10	1	a	a	DET
jh343r10373	10	2	modified	modify	VERB
jh343r10373	10	3	thermal	thermal	ADJ
jh343r10373	10	4	dewetting	dewette	VERB
jh343r10373	10	5	nanofabrication	nanofabrication	NOUN
jh343r10373	10	6	technique	technique	NOUN
jh343r10373	10	7	,	,	PUNCT
jh343r10373	10	8	devised	devise	VERB
jh343r10373	10	9	and	and	CCONJ
jh343r10373	10	10	patented	patent	VERB
jh343r10373	10	11	by	by	ADP
jh343r10373	10	12	the	the	DET
jh343r10373	10	13	neretina	neretina	PROPN
jh343r10373	10	14	group	group	NOUN
jh343r10373	10	15	,	,	PUNCT
jh343r10373	10	16	utilizes	utilize	VERB
jh343r10373	10	17	a	a	DET
jh343r10373	10	18	sacrificial	sacrificial	ADJ
jh343r10373	10	19	layer	layer	NOUN
jh343r10373	10	20	of	of	ADP
jh343r10373	10	21	sb	sb	PRON
jh343r10373	10	22	to	to	PART
jh343r10373	10	23	exert	exert	VERB
jh343r10373	10	24	control	control	NOUN
jh343r10373	10	25	over	over	ADP
jh343r10373	10	26	the	the	DET
jh343r10373	10	27	dewetting	dewette	VERB
jh343r10373	10	28	process	process	NOUN
jh343r10373	10	29	.	.	PUNCT
jh343r10373	11	1	it	it	PRON
jh343r10373	11	2	was	be	AUX
jh343r10373	11	3	exploited	exploit	VERB
jh343r10373	11	4	to	to	PART
jh343r10373	11	5	address	address	VERB
jh343r10373	11	6	the	the	DET
jh343r10373	11	7	challenges	challenge	NOUN
jh343r10373	11	8	of	of	ADP
jh343r10373	11	9	thermal	thermal	ADJ
jh343r10373	11	10	management	management	NOUN
jh343r10373	11	11	in	in	ADP
jh343r10373	11	12	electronic	electronic	ADJ
jh343r10373	11	13	devices	device	NOUN
jh343r10373	11	14	.	.	PUNCT
jh343r10373	12	1	demonstrated	demonstrate	VERB
jh343r10373	12	2	are	be	AUX
jh343r10373	12	3	significant	significant	ADJ
jh343r10373	12	4	thermal	thermal	ADJ
jh343r10373	12	5	conductance	conductance	NOUN
jh343r10373	12	6	enhancements	enhancement	NOUN
jh343r10373	12	7	across	across	ADP
jh343r10373	12	8	metal	metal	NOUN
jh343r10373	12	9	-	-	PUNCT
jh343r10373	12	10	semiconductor	semiconductor	NOUN
jh343r10373	12	11	interfaces	interface	NOUN
jh343r10373	12	12	using	use	VERB
jh343r10373	12	13	engineered	engineer	VERB
jh343r10373	12	14	nanostructures	nanostructure	NOUN
jh343r10373	12	15	derived	derive	VERB
jh343r10373	12	16	from	from	ADP
jh343r10373	12	17	this	this	DET
jh343r10373	12	18	modified	modify	VERB
jh343r10373	12	19	dewetting	dewette	VERB
jh343r10373	12	20	process.a	process.a	ADJ
jh343r10373	12	21	completely	completely	ADV
jh343r10373	12	22	new	new	ADJ
jh343r10373	12	23	strategy	strategy	NOUN
jh343r10373	12	24	for	for	ADP
jh343r10373	12	25	fabricating	fabricate	VERB
jh343r10373	12	26	nanogaps	nanogap	NOUN
jh343r10373	12	27	using	use	VERB
jh343r10373	12	28	a	a	DET
jh343r10373	12	29	new	new	ADJ
jh343r10373	12	30	approach	approach	NOUN
jh343r10373	12	31	reliant	reliant	VERB
jh343r10373	12	32	on	on	ADP
jh343r10373	12	33	a	a	DET
jh343r10373	12	34	single	single	ADJ
jh343r10373	12	35	step	step	NOUN
jh343r10373	12	36	bending	bend	VERB
jh343r10373	12	37	deformation	deformation	NOUN
jh343r10373	12	38	was	be	AUX
jh343r10373	12	39	invented	invent	VERB
jh343r10373	12	40	and	and	CCONJ
jh343r10373	12	41	it	it	PRON
jh343r10373	12	42	was	be	AUX
jh343r10373	12	43	further	far	ADV
jh343r10373	12	44	implemented	implement	VERB
jh343r10373	12	45	into	into	ADP
jh343r10373	12	46	the	the	DET
jh343r10373	12	47	fabrication	fabrication	NOUN
jh343r10373	12	48	of	of	ADP
jh343r10373	12	49	a	a	DET
jh343r10373	12	50	hydrogen	hydrogen	NOUN
jh343r10373	12	51	gas	gas	NOUN
jh343r10373	12	52	sensor	sensor	NOUN
jh343r10373	12	53	with	with	ADP
jh343r10373	12	54	characteristics	characteristic	NOUN
jh343r10373	12	55	which	which	PRON
jh343r10373	12	56	include	include	VERB
jh343r10373	12	57	room	room	NOUN
jh343r10373	12	58	temperature	temperature	NOUN
jh343r10373	12	59	detection	detection	NOUN
jh343r10373	12	60	,	,	PUNCT
jh343r10373	12	61	a	a	DET
jh343r10373	12	62	high	high	ADJ
jh343r10373	12	63	sensitivity	sensitivity	NOUN
jh343r10373	12	64	and	and	CCONJ
jh343r10373	12	65	selectivity	selectivity	NOUN
jh343r10373	12	66	towards	towards	ADP
jh343r10373	12	67	h2	h2	NOUN
jh343r10373	12	68	,	,	PUNCT
jh343r10373	12	69	low	low	ADJ
jh343r10373	12	70	-	-	PUNCT
jh343r10373	12	71	cost	cost	NOUN
jh343r10373	12	72	lithography	lithography	NOUN
jh343r10373	12	73	-	-	PUNCT
jh343r10373	12	74	free	free	ADJ
jh343r10373	12	75	fabrication	fabrication	NOUN
jh343r10373	12	76	,	,	PUNCT
jh343r10373	12	77	and	and	CCONJ
jh343r10373	12	78	recyclability	recyclability	NOUN
jh343r10373	12	79	.	.	PUNCT