id	sid	tid	token	lemma	pos
dz010p11991	1	1	carbon	carbon	NOUN
dz010p11991	1	2	nanotubes	nanotube	NOUN
dz010p11991	1	3	are	be	AUX
dz010p11991	1	4	being	be	AUX
dz010p11991	1	5	studied	study	VERB
dz010p11991	1	6	for	for	ADP
dz010p11991	1	7	their	their	PRON
dz010p11991	1	8	special	special	ADJ
dz010p11991	1	9	1d	1d	NOUN
dz010p11991	1	10	properties	property	NOUN
dz010p11991	1	11	.	.	PUNCT
dz010p11991	2	1	in	in	ADP
dz010p11991	2	2	this	this	DET
dz010p11991	2	3	work	work	NOUN
dz010p11991	2	4	,	,	PUNCT
dz010p11991	2	5	an	an	DET
dz010p11991	2	6	attempt	attempt	NOUN
dz010p11991	2	7	is	be	AUX
dz010p11991	2	8	made	make	VERB
dz010p11991	2	9	to	to	PART
dz010p11991	2	10	study	study	VERB
dz010p11991	2	11	the	the	DET
dz010p11991	2	12	factors	factor	NOUN
dz010p11991	2	13	behind	behind	ADP
dz010p11991	2	14	carbon	carbon	NOUN
dz010p11991	2	15	nanotube	nanotube	NOUN
dz010p11991	2	16	growth	growth	NOUN
dz010p11991	2	17	.	.	PUNCT
dz010p11991	3	1	growth	growth	NOUN
dz010p11991	3	2	is	be	AUX
dz010p11991	3	3	carried	carry	VERB
dz010p11991	3	4	out	out	ADP
dz010p11991	3	5	by	by	ADP
dz010p11991	3	6	thermal	thermal	ADJ
dz010p11991	3	7	chemical	chemical	NOUN
dz010p11991	3	8	vapor	vapor	NOUN
dz010p11991	3	9	deposition	deposition	NOUN
dz010p11991	3	10	(	(	PUNCT
dz010p11991	3	11	cvd	cvd	PROPN
dz010p11991	3	12	)	)	PUNCT
dz010p11991	3	13	using	use	VERB
dz010p11991	3	14	a	a	DET
dz010p11991	3	15	solid	solid	ADJ
dz010p11991	3	16	catalyst	catalyst	NOUN
dz010p11991	3	17	.	.	PUNCT
dz010p11991	4	1	single	single	ADJ
dz010p11991	4	2	electron	electron	NOUN
dz010p11991	4	3	transistors	transistor	NOUN
dz010p11991	4	4	(	(	PUNCT
dz010p11991	4	5	sets	set	NOUN
dz010p11991	4	6	)	)	PUNCT
dz010p11991	4	7	made	make	VERB
dz010p11991	4	8	from	from	ADP
dz010p11991	4	9	carbon	carbon	NOUN
dz010p11991	4	10	nanotubes	nanotube	NOUN
dz010p11991	4	11	are	be	AUX
dz010p11991	4	12	studied	study	VERB
dz010p11991	4	13	.	.	PUNCT
dz010p11991	5	1	measurements	measurement	NOUN
dz010p11991	5	2	are	be	AUX
dz010p11991	5	3	carried	carry	VERB
dz010p11991	5	4	out	out	ADP
dz010p11991	5	5	on	on	ADP
dz010p11991	5	6	metallic	metallic	ADJ
dz010p11991	5	7	and	and	CCONJ
dz010p11991	5	8	semiconducting	semiconducte	VERB
dz010p11991	5	9	nanotubes	nanotube	NOUN
dz010p11991	5	10	at	at	ADP
dz010p11991	5	11	room	room	NOUN
dz010p11991	5	12	temperature	temperature	NOUN
dz010p11991	5	13	,	,	PUNCT
dz010p11991	5	14	77	77	NUM
dz010p11991	5	15	k	k	PROPN
dz010p11991	5	16	and	and	CCONJ
dz010p11991	5	17	4	4	NUM
dz010p11991	5	18	k.	k.	NOUN