id	sid	tid	token	lemma	pos
d791sf29h5z	1	1	conventional	conventional	ADJ
d791sf29h5z	1	2	approaches	approach	NOUN
d791sf29h5z	1	3	to	to	ADP
d791sf29h5z	1	4	forming	form	VERB
d791sf29h5z	1	5	a	a	DET
d791sf29h5z	1	6	low	low	ADJ
d791sf29h5z	1	7	-	-	PUNCT
d791sf29h5z	1	8	temperature	temperature	NOUN
d791sf29h5z	1	9	,	,	PUNCT
d791sf29h5z	1	10	nonequilibrium	nonequilibrium	NOUN
d791sf29h5z	1	11	plasma	plasma	NOUN
d791sf29h5z	1	12	at	at	ADP
d791sf29h5z	1	13	atmospheric	atmospheric	ADJ
d791sf29h5z	1	14	pressure	pressure	NOUN
d791sf29h5z	1	15	require	require	VERB
d791sf29h5z	1	16	a	a	DET
d791sf29h5z	1	17	high	high	ADJ
d791sf29h5z	1	18	-	-	PUNCT
d791sf29h5z	1	19	voltage	voltage	NOUN
d791sf29h5z	1	20	power	power	NOUN
d791sf29h5z	1	21	source	source	NOUN
d791sf29h5z	1	22	,	,	PUNCT
d791sf29h5z	1	23	which	which	PRON
d791sf29h5z	1	24	unsurprisingly	unsurprisingly	ADV
d791sf29h5z	1	25	constrains	constrain	VERB
d791sf29h5z	1	26	most	most	ADJ
d791sf29h5z	1	27	of	of	ADP
d791sf29h5z	1	28	the	the	DET
d791sf29h5z	1	29	plasma	plasma	NOUN
d791sf29h5z	1	30	devices	device	NOUN
d791sf29h5z	1	31	to	to	ADP
d791sf29h5z	1	32	laboratory	laboratory	NOUN
d791sf29h5z	1	33	settings	setting	NOUN
d791sf29h5z	1	34	,	,	PUNCT
d791sf29h5z	1	35	limiting	limit	VERB
d791sf29h5z	1	36	their	their	PRON
d791sf29h5z	1	37	application	application	NOUN
d791sf29h5z	1	38	as	as	ADP
d791sf29h5z	1	39	portable	portable	ADJ
d791sf29h5z	1	40	devices	device	NOUN
d791sf29h5z	1	41	in	in	ADP
d791sf29h5z	1	42	non	non	ADJ
d791sf29h5z	1	43	-	-	ADJ
d791sf29h5z	1	44	laboratory	laboratory	ADJ
d791sf29h5z	1	45	,	,	PUNCT
d791sf29h5z	1	46	field	field	NOUN
d791sf29h5z	1	47	applications	application	NOUN
d791sf29h5z	1	48	.	.	PUNCT
d791sf29h5z	2	1	the	the	DET
d791sf29h5z	2	2	direct	direct	ADJ
d791sf29h5z	2	3	piezoelectric	piezoelectric	ADJ
d791sf29h5z	2	4	effect	effect	NOUN
d791sf29h5z	2	5	of	of	ADP
d791sf29h5z	2	6	non	non	ADJ
d791sf29h5z	2	7	-	-	ADJ
d791sf29h5z	2	8	centrosymmetric	centrosymmetric	ADJ
d791sf29h5z	2	9	crystals	crystal	NOUN
d791sf29h5z	2	10	,	,	PUNCT
d791sf29h5z	2	11	such	such	ADJ
d791sf29h5z	2	12	as	as	ADP
d791sf29h5z	2	13	lead	lead	NOUN
d791sf29h5z	2	14	zirconate	zirconate	NOUN
d791sf29h5z	2	15	titanate	titanate	NOUN
d791sf29h5z	2	16	(	(	PUNCT
d791sf29h5z	2	17	pb[zr(x)ti(1	pb[zr(x)ti(1	PROPN
d791sf29h5z	2	18	-	-	PUNCT
d791sf29h5z	2	19	x)]o3	x)]o3	PROPN
d791sf29h5z	2	20	(	(	PUNCT
d791sf29h5z	2	21	0	0	NUM
d791sf29h5z	2	22	≤	≤	X
d791sf29h5z	2	23	x	x	PUNCT
d791sf29h5z	2	24	≤	≤	PROPN
d791sf29h5z	2	25	1	1	NUM
d791sf29h5z	2	26	)	)	PUNCT
d791sf29h5z	2	27	,	,	PUNCT
d791sf29h5z	2	28	pzt	pzt	PROPN
d791sf29h5z	2	29	)	)	PUNCT
d791sf29h5z	2	30	,	,	PUNCT
d791sf29h5z	2	31	offers	offer	VERB
d791sf29h5z	2	32	the	the	DET
d791sf29h5z	2	33	opportunity	opportunity	NOUN
d791sf29h5z	2	34	to	to	PART
d791sf29h5z	2	35	develop	develop	VERB
d791sf29h5z	2	36	energy	energy	NOUN
d791sf29h5z	2	37	conversion	conversion	NOUN
d791sf29h5z	2	38	plasma	plasma	NOUN
d791sf29h5z	2	39	sources	source	NOUN
d791sf29h5z	2	40	that	that	PRON
d791sf29h5z	2	41	remedy	remedy	VERB
d791sf29h5z	2	42	the	the	DET
d791sf29h5z	2	43	reliance	reliance	NOUN
d791sf29h5z	2	44	on	on	ADP
d791sf29h5z	2	45	a	a	DET
d791sf29h5z	2	46	high	high	ADJ
d791sf29h5z	2	47	-	-	PUNCT
d791sf29h5z	2	48	voltage	voltage	NOUN
d791sf29h5z	2	49	power	power	NOUN
d791sf29h5z	2	50	source	source	NOUN
d791sf29h5z	2	51	by	by	ADP
d791sf29h5z	2	52	converting	convert	VERB
d791sf29h5z	2	53	mechanical	mechanical	ADJ
d791sf29h5z	2	54	energy	energy	NOUN
d791sf29h5z	2	55	directly	directly	ADV
d791sf29h5z	2	56	into	into	ADP
d791sf29h5z	2	57	plasma	plasma	NOUN
d791sf29h5z	2	58	generation	generation	NOUN
d791sf29h5z	2	59	.	.	PUNCT
d791sf29h5z	3	1	however	however	ADV
d791sf29h5z	3	2	,	,	PUNCT
d791sf29h5z	3	3	limited	limit	VERB
d791sf29h5z	3	4	by	by	ADP
d791sf29h5z	3	5	insufficient	insufficient	ADJ
d791sf29h5z	3	6	knowledge	knowledge	NOUN
d791sf29h5z	3	7	about	about	ADP
d791sf29h5z	3	8	mechanical	mechanical	ADJ
d791sf29h5z	3	9	-	-	PUNCT
d791sf29h5z	3	10	to	to	ADP
d791sf29h5z	3	11	-	-	PUNCT
d791sf29h5z	3	12	plasma	plasma	NOUN
d791sf29h5z	3	13	energy	energy	NOUN
d791sf29h5z	3	14	conversion	conversion	NOUN
d791sf29h5z	3	15	and	and	CCONJ
d791sf29h5z	3	16	its	its	PRON
d791sf29h5z	3	17	manipulation	manipulation	NOUN
d791sf29h5z	3	18	,	,	PUNCT
d791sf29h5z	3	19	there	there	PRON
d791sf29h5z	3	20	is	be	VERB
d791sf29h5z	3	21	,	,	PUNCT
d791sf29h5z	3	22	to	to	ADP
d791sf29h5z	3	23	our	our	PRON
d791sf29h5z	3	24	knowledge	knowledge	NOUN
d791sf29h5z	3	25	,	,	PUNCT
d791sf29h5z	3	26	no	no	DET
d791sf29h5z	3	27	published	publish	VERB
d791sf29h5z	3	28	report	report	NOUN
d791sf29h5z	3	29	on	on	ADP
d791sf29h5z	3	30	using	use	VERB
d791sf29h5z	3	31	the	the	DET
d791sf29h5z	3	32	direct	direct	ADJ
d791sf29h5z	3	33	piezoelectric	piezoelectric	ADJ
d791sf29h5z	3	34	effect	effect	NOUN
d791sf29h5z	3	35	to	to	PART
d791sf29h5z	3	36	form	form	VERB
d791sf29h5z	3	37	low	low	ADJ
d791sf29h5z	3	38	-	-	PUNCT
d791sf29h5z	3	39	temperature	temperature	NOUN
d791sf29h5z	3	40	,	,	PUNCT
d791sf29h5z	3	41	nonequilibrium	nonequilibrium	NOUN
d791sf29h5z	3	42	plasmas.in	plasmas.in	PUNCT
d791sf29h5z	3	43	this	this	DET
d791sf29h5z	3	44	dissertation	dissertation	NOUN
d791sf29h5z	3	45	,	,	PUNCT
d791sf29h5z	3	46	pzt	pzt	ADJ
d791sf29h5z	3	47	piezoelectric	piezoelectric	NOUN
d791sf29h5z	3	48	transformers	transformer	NOUN
d791sf29h5z	3	49	(	(	PUNCT
d791sf29h5z	3	50	pts	pts	X
d791sf29h5z	3	51	)	)	PUNCT
d791sf29h5z	3	52	were	be	AUX
d791sf29h5z	3	53	utilized	utilize	VERB
d791sf29h5z	3	54	to	to	PART
d791sf29h5z	3	55	study	study	VERB
d791sf29h5z	3	56	the	the	DET
d791sf29h5z	3	57	fundamentals	fundamental	NOUN
d791sf29h5z	3	58	of	of	ADP
d791sf29h5z	3	59	piezoelectric	piezoelectric	NOUN
d791sf29h5z	3	60	-	-	PUNCT
d791sf29h5z	3	61	driven	drive	VERB
d791sf29h5z	3	62	plasma	plasma	NOUN
d791sf29h5z	3	63	formation	formation	NOUN
d791sf29h5z	3	64	and	and	CCONJ
d791sf29h5z	3	65	the	the	DET
d791sf29h5z	3	66	behavior	behavior	NOUN
d791sf29h5z	3	67	of	of	ADP
d791sf29h5z	3	68	the	the	DET
d791sf29h5z	3	69	piezoelectric	piezoelectric	ADJ
d791sf29h5z	3	70	crystal	crystal	NOUN
d791sf29h5z	3	71	when	when	SCONJ
d791sf29h5z	3	72	it	it	PRON
d791sf29h5z	3	73	is	be	AUX
d791sf29h5z	3	74	used	use	VERB
d791sf29h5z	3	75	to	to	PART
d791sf29h5z	3	76	form	form	VERB
d791sf29h5z	3	77	a	a	DET
d791sf29h5z	3	78	plasma	plasma	NOUN
d791sf29h5z	3	79	.	.	PUNCT
d791sf29h5z	4	1	pts	pt	NOUN
d791sf29h5z	4	2	are	be	AUX
d791sf29h5z	4	3	solid	solid	ADJ
d791sf29h5z	4	4	state	state	NOUN
d791sf29h5z	4	5	electrical	electrical	ADJ
d791sf29h5z	4	6	transformers	transformer	NOUN
d791sf29h5z	4	7	that	that	PRON
d791sf29h5z	4	8	can	can	AUX
d791sf29h5z	4	9	amplify	amplify	VERB
d791sf29h5z	4	10	a	a	DET
d791sf29h5z	4	11	low	low	ADJ
d791sf29h5z	4	12	-	-	PUNCT
d791sf29h5z	4	13	voltage	voltage	NOUN
d791sf29h5z	4	14	input	input	NOUN
d791sf29h5z	4	15	to	to	ADP
d791sf29h5z	4	16	sufficiently	sufficiently	ADV
d791sf29h5z	4	17	high	high	ADJ
d791sf29h5z	4	18	gains	gain	NOUN
d791sf29h5z	4	19	,	,	PUNCT
d791sf29h5z	4	20	enough	enough	ADV
d791sf29h5z	4	21	to	to	PART
d791sf29h5z	4	22	reach	reach	VERB
d791sf29h5z	4	23	the	the	DET
d791sf29h5z	4	24	breakdown	breakdown	NOUN
d791sf29h5z	4	25	threshold	threshold	NOUN
d791sf29h5z	4	26	of	of	ADP
d791sf29h5z	4	27	air	air	NOUN
d791sf29h5z	4	28	.	.	PUNCT
d791sf29h5z	5	1	the	the	DET
d791sf29h5z	5	2	intrinsic	intrinsic	ADJ
d791sf29h5z	5	3	electromechanical	electromechanical	ADJ
d791sf29h5z	5	4	coupling	coupling	NOUN
d791sf29h5z	5	5	and	and	CCONJ
d791sf29h5z	5	6	the	the	DET
d791sf29h5z	5	7	stable	stable	ADJ
d791sf29h5z	5	8	performance	performance	NOUN
d791sf29h5z	5	9	as	as	ADP
d791sf29h5z	5	10	a	a	DET
d791sf29h5z	5	11	plasma	plasma	NOUN
d791sf29h5z	5	12	source	source	NOUN
d791sf29h5z	5	13	make	make	VERB
d791sf29h5z	5	14	pts	pt	NOUN
d791sf29h5z	5	15	a	a	DET
d791sf29h5z	5	16	reliable	reliable	ADJ
d791sf29h5z	5	17	model	model	NOUN
d791sf29h5z	5	18	system	system	NOUN
d791sf29h5z	5	19	to	to	PART
d791sf29h5z	5	20	investigate	investigate	VERB
d791sf29h5z	5	21	how	how	SCONJ
d791sf29h5z	5	22	the	the	DET
d791sf29h5z	5	23	piezoelectric	piezoelectric	ADJ
d791sf29h5z	5	24	effect	effect	NOUN
d791sf29h5z	5	25	can	can	AUX
d791sf29h5z	5	26	contribute	contribute	VERB
d791sf29h5z	5	27	to	to	ADP
d791sf29h5z	5	28	the	the	DET
d791sf29h5z	5	29	formation	formation	NOUN
d791sf29h5z	5	30	of	of	ADP
d791sf29h5z	5	31	stable	stable	ADJ
d791sf29h5z	5	32	,	,	PUNCT
d791sf29h5z	5	33	low	low	ADJ
d791sf29h5z	5	34	-	-	PUNCT
d791sf29h5z	5	35	temperature	temperature	NOUN
d791sf29h5z	5	36	,	,	PUNCT
d791sf29h5z	5	37	nonequilibrium	nonequilibrium	NOUN
d791sf29h5z	5	38	plasmas	plasmas	PROPN
d791sf29h5z	5	39	.	.	PUNCT
d791sf29h5z	6	1	high	high	ADJ
d791sf29h5z	6	2	-	-	PUNCT
d791sf29h5z	6	3	speed	speed	NOUN
d791sf29h5z	6	4	imaging	imaging	NOUN
d791sf29h5z	6	5	and	and	CCONJ
d791sf29h5z	6	6	simultaneous	simultaneous	ADJ
d791sf29h5z	6	7	current	current	ADJ
d791sf29h5z	6	8	measurements	measurement	NOUN
d791sf29h5z	6	9	are	be	AUX
d791sf29h5z	6	10	utilized	utilize	VERB
d791sf29h5z	6	11	to	to	PART
d791sf29h5z	6	12	characterize	characterize	VERB
d791sf29h5z	6	13	the	the	DET
d791sf29h5z	6	14	optical	optical	ADJ
d791sf29h5z	6	15	and	and	CCONJ
d791sf29h5z	6	16	electric	electric	ADJ
d791sf29h5z	6	17	properties	property	NOUN
d791sf29h5z	6	18	of	of	ADP
d791sf29h5z	6	19	the	the	DET
d791sf29h5z	6	20	plasma	plasma	NOUN
d791sf29h5z	6	21	formed	form	VERB
d791sf29h5z	6	22	off	off	ADP
d791sf29h5z	6	23	the	the	DET
d791sf29h5z	6	24	pt	pt	PROPN
d791sf29h5z	6	25	's	's	PART
d791sf29h5z	6	26	surface	surface	NOUN
d791sf29h5z	6	27	.	.	PUNCT
d791sf29h5z	7	1	results	result	NOUN
d791sf29h5z	7	2	show	show	VERB
d791sf29h5z	7	3	that	that	SCONJ
d791sf29h5z	7	4	this	this	DET
d791sf29h5z	7	5	plasma	plasma	NOUN
d791sf29h5z	7	6	shares	share	VERB
d791sf29h5z	7	7	many	many	ADJ
d791sf29h5z	7	8	characteristics	characteristic	NOUN
d791sf29h5z	7	9	with	with	ADP
d791sf29h5z	7	10	conventional	conventional	ADJ
d791sf29h5z	7	11	plasma	plasma	NOUN
d791sf29h5z	7	12	jets	jet	NOUN
d791sf29h5z	7	13	but	but	CCONJ
d791sf29h5z	7	14	is	be	AUX
d791sf29h5z	7	15	not	not	PART
d791sf29h5z	7	16	constrained	constrain	VERB
d791sf29h5z	7	17	by	by	ADP
d791sf29h5z	7	18	a	a	DET
d791sf29h5z	7	19	guiding	guide	VERB
d791sf29h5z	7	20	flow	flow	NOUN
d791sf29h5z	7	21	,	,	PUNCT
d791sf29h5z	7	22	so	so	SCONJ
d791sf29h5z	7	23	we	we	PRON
d791sf29h5z	7	24	refer	refer	VERB
d791sf29h5z	7	25	to	to	ADP
d791sf29h5z	7	26	it	it	PRON
d791sf29h5z	7	27	as	as	ADP
d791sf29h5z	7	28	a	a	DET
d791sf29h5z	7	29	pt	pt	PROPN
d791sf29h5z	7	30	free	free	ADJ
d791sf29h5z	7	31	plasma	plasma	NOUN
d791sf29h5z	7	32	jet	jet	NOUN
d791sf29h5z	7	33	.	.	PUNCT
d791sf29h5z	8	1	to	to	PART
d791sf29h5z	8	2	better	well	ADV
d791sf29h5z	8	3	understand	understand	VERB
d791sf29h5z	8	4	the	the	DET
d791sf29h5z	8	5	chemical	chemical	ADJ
d791sf29h5z	8	6	composition	composition	NOUN
d791sf29h5z	8	7	of	of	ADP
d791sf29h5z	8	8	the	the	DET
d791sf29h5z	8	9	pt	pt	PROPN
d791sf29h5z	8	10	free	free	PROPN
d791sf29h5z	8	11	plasma	plasma	NOUN
d791sf29h5z	8	12	jet	jet	NOUN
d791sf29h5z	8	13	,	,	PUNCT
d791sf29h5z	8	14	spatially	spatially	ADV
d791sf29h5z	8	15	-	-	PUNCT
d791sf29h5z	8	16	resolved	resolve	VERB
d791sf29h5z	8	17	optical	optical	ADJ
d791sf29h5z	8	18	emission	emission	NOUN
d791sf29h5z	8	19	spectroscopy	spectroscopy	NOUN
d791sf29h5z	8	20	(	(	PUNCT
d791sf29h5z	8	21	oes	oes	PROPN
d791sf29h5z	8	22	)	)	PUNCT
d791sf29h5z	8	23	measurements	measurement	NOUN
d791sf29h5z	8	24	were	be	AUX
d791sf29h5z	8	25	performed	perform	VERB
d791sf29h5z	8	26	.	.	PUNCT
d791sf29h5z	9	1	results	result	NOUN
d791sf29h5z	9	2	show	show	VERB
d791sf29h5z	9	3	that	that	SCONJ
d791sf29h5z	9	4	the	the	DET
d791sf29h5z	9	5	nitrogen	nitrogen	NOUN
d791sf29h5z	9	6	second	second	ADJ
d791sf29h5z	9	7	positive	positive	ADJ
d791sf29h5z	9	8	system	system	NOUN
d791sf29h5z	9	9	n2	n2	PROPN
d791sf29h5z	9	10	(	(	PUNCT
d791sf29h5z	9	11	c3πu→b3πg	c3πu→b3πg	SPACE
d791sf29h5z	9	12	)	)	PUNCT
d791sf29h5z	9	13	dominates	dominate	VERB
d791sf29h5z	9	14	the	the	DET
d791sf29h5z	9	15	plasma	plasma	NOUN
d791sf29h5z	9	16	emission	emission	NOUN
d791sf29h5z	9	17	spectrum	spectrum	NOUN
d791sf29h5z	9	18	with	with	ADP
d791sf29h5z	9	19	intensity	intensity	NOUN
d791sf29h5z	9	20	decreasing	decrease	VERB
d791sf29h5z	9	21	almost	almost	ADV
d791sf29h5z	9	22	monotonically	monotonically	ADV
d791sf29h5z	9	23	as	as	ADP
d791sf29h5z	9	24	the	the	DET
d791sf29h5z	9	25	function	function	NOUN
d791sf29h5z	9	26	of	of	ADP
d791sf29h5z	9	27	the	the	DET
d791sf29h5z	9	28	jet	jet	NOUN
d791sf29h5z	9	29	length	length	NOUN
d791sf29h5z	9	30	.	.	PUNCT
d791sf29h5z	10	1	finally	finally	ADV
d791sf29h5z	10	2	,	,	PUNCT
d791sf29h5z	10	3	the	the	DET
d791sf29h5z	10	4	spatiotemporally	spatiotemporally	ADV
d791sf29h5z	10	5	-	-	PUNCT
d791sf29h5z	10	6	resolved	resolve	VERB
d791sf29h5z	10	7	characteristics	characteristic	NOUN
d791sf29h5z	10	8	of	of	ADP
d791sf29h5z	10	9	the	the	DET
d791sf29h5z	10	10	electric	electric	ADJ
d791sf29h5z	10	11	field	field	NOUN
d791sf29h5z	10	12	generated	generate	VERB
d791sf29h5z	10	13	by	by	ADP
d791sf29h5z	10	14	the	the	DET
d791sf29h5z	10	15	pt	pt	PROPN
d791sf29h5z	10	16	have	have	AUX
d791sf29h5z	10	17	been	be	AUX
d791sf29h5z	10	18	investigated	investigate	VERB
d791sf29h5z	10	19	using	use	VERB
d791sf29h5z	10	20	the	the	DET
d791sf29h5z	10	21	electric	electric	ADJ
d791sf29h5z	10	22	-	-	PUNCT
d791sf29h5z	10	23	field	field	NOUN
d791sf29h5z	10	24	induced	induce	VERB
d791sf29h5z	10	25	second	second	ADJ
d791sf29h5z	10	26	harmonic	harmonic	NOUN
d791sf29h5z	10	27	(	(	PUNCT
d791sf29h5z	10	28	e	e	NOUN
d791sf29h5z	10	29	-	-	NOUN
d791sf29h5z	10	30	fish	fish	ADJ
d791sf29h5z	10	31	)	)	PUNCT
d791sf29h5z	10	32	generation	generation	NOUN
d791sf29h5z	10	33	technique	technique	NOUN
d791sf29h5z	10	34	.	.	PUNCT
d791sf29h5z	11	1	results	result	NOUN
d791sf29h5z	11	2	reveal	reveal	VERB
d791sf29h5z	11	3	the	the	DET
d791sf29h5z	11	4	spatial	spatial	ADJ
d791sf29h5z	11	5	distribution	distribution	NOUN
d791sf29h5z	11	6	of	of	ADP
d791sf29h5z	11	7	the	the	DET
d791sf29h5z	11	8	electric	electric	ADJ
d791sf29h5z	11	9	field	field	NOUN
d791sf29h5z	11	10	around	around	ADP
d791sf29h5z	11	11	the	the	DET
d791sf29h5z	11	12	pt	pt	PROPN
d791sf29h5z	11	13	's	's	PART
d791sf29h5z	11	14	output	output	NOUN
d791sf29h5z	11	15	distal	distal	ADJ
d791sf29h5z	11	16	end	end	NOUN
d791sf29h5z	11	17	and	and	CCONJ
d791sf29h5z	11	18	how	how	SCONJ
d791sf29h5z	11	19	it	it	PRON
d791sf29h5z	11	20	evolves	evolve	VERB
d791sf29h5z	11	21	in	in	ADP
d791sf29h5z	11	22	time	time	NOUN
d791sf29h5z	11	23	.	.	PUNCT
d791sf29h5z	12	1	these	these	DET
d791sf29h5z	12	2	studies	study	NOUN
d791sf29h5z	12	3	help	help	VERB
d791sf29h5z	12	4	to	to	PART
d791sf29h5z	12	5	develop	develop	VERB
d791sf29h5z	12	6	a	a	DET
d791sf29h5z	12	7	comprehensive	comprehensive	ADJ
d791sf29h5z	12	8	understanding	understanding	NOUN
d791sf29h5z	12	9	of	of	ADP
d791sf29h5z	12	10	pts	pt	NOUN
d791sf29h5z	12	11	and	and	CCONJ
d791sf29h5z	12	12	piezoelectric	piezoelectric	NOUN
d791sf29h5z	12	13	-	-	PUNCT
d791sf29h5z	12	14	driven	drive	VERB
d791sf29h5z	12	15	plasmas	plasma	NOUN
d791sf29h5z	12	16	,	,	PUNCT
d791sf29h5z	12	17	laying	lay	VERB
d791sf29h5z	12	18	the	the	DET
d791sf29h5z	12	19	foundation	foundation	NOUN
d791sf29h5z	12	20	for	for	ADP
d791sf29h5z	12	21	the	the	DET
d791sf29h5z	12	22	development	development	NOUN
d791sf29h5z	12	23	of	of	ADP
d791sf29h5z	12	24	a	a	DET
d791sf29h5z	12	25	mechanical	mechanical	ADJ
d791sf29h5z	12	26	energy	energy	NOUN
d791sf29h5z	12	27	conversion	conversion	NOUN
d791sf29h5z	12	28	plasma	plasma	NOUN
d791sf29h5z	12	29	source	source	NOUN
d791sf29h5z	12	30	that	that	PRON
d791sf29h5z	12	31	can	can	AUX
d791sf29h5z	12	32	be	be	AUX
d791sf29h5z	12	33	used	use	VERB
d791sf29h5z	12	34	in	in	ADP
d791sf29h5z	12	35	applications	application	NOUN
d791sf29h5z	12	36	outside	outside	ADP
d791sf29h5z	12	37	the	the	DET
d791sf29h5z	12	38	laboratory	laboratory	NOUN
d791sf29h5z	12	39	.	.	PUNCT