id	sid	tid	token	lemma	pos
cr56n013504	1	1	current	current	ADJ
cr56n013504	1	2	advances	advance	NOUN
cr56n013504	1	3	in	in	ADP
cr56n013504	1	4	biological	biological	ADJ
cr56n013504	1	5	research	research	NOUN
cr56n013504	1	6	demand	demand	NOUN
cr56n013504	1	7	imaging	imaging	NOUN
cr56n013504	1	8	resolution	resolution	NOUN
cr56n013504	1	9	on	on	ADP
cr56n013504	1	10	the	the	DET
cr56n013504	1	11	scale	scale	NOUN
cr56n013504	1	12	of	of	ADP
cr56n013504	1	13	tens	ten	NOUN
cr56n013504	1	14	of	of	ADP
cr56n013504	1	15	nanometers	nanometer	NOUN
cr56n013504	1	16	or	or	CCONJ
cr56n013504	1	17	less	less	ADJ
cr56n013504	1	18	.	.	PUNCT
cr56n013504	2	1	due	due	ADP
cr56n013504	2	2	to	to	ADP
cr56n013504	2	3	the	the	DET
cr56n013504	2	4	innate	innate	ADJ
cr56n013504	2	5	diffraction	diffraction	NOUN
cr56n013504	2	6	limit	limit	NOUN
cr56n013504	2	7	associated	associate	VERB
cr56n013504	2	8	with	with	ADP
cr56n013504	2	9	the	the	DET
cr56n013504	2	10	physics	physics	NOUN
cr56n013504	2	11	of	of	ADP
cr56n013504	2	12	imaging	imaging	NOUN
cr56n013504	2	13	,	,	PUNCT
cr56n013504	2	14	there	there	PRON
cr56n013504	2	15	is	be	VERB
cr56n013504	2	16	a	a	DET
cr56n013504	2	17	limit	limit	NOUN
cr56n013504	2	18	on	on	ADP
cr56n013504	2	19	the	the	DET
cr56n013504	2	20	resolution	resolution	NOUN
cr56n013504	2	21	capable	capable	ADJ
cr56n013504	2	22	through	through	ADP
cr56n013504	2	23	traditional	traditional	ADJ
cr56n013504	2	24	optical	optical	ADJ
cr56n013504	2	25	imaging	imaging	NOUN
cr56n013504	2	26	systems	system	NOUN
cr56n013504	2	27	.	.	PUNCT
cr56n013504	3	1	there	there	PRON
cr56n013504	3	2	have	have	AUX
cr56n013504	3	3	been	be	AUX
cr56n013504	3	4	a	a	DET
cr56n013504	3	5	variety	variety	NOUN
cr56n013504	3	6	of	of	ADP
cr56n013504	3	7	techniques	technique	NOUN
cr56n013504	3	8	to	to	PART
cr56n013504	3	9	overcome	overcome	VERB
cr56n013504	3	10	this	this	DET
cr56n013504	3	11	resolution	resolution	NOUN
cr56n013504	3	12	limit	limit	NOUN
cr56n013504	3	13	to	to	PART
cr56n013504	3	14	produce	produce	VERB
cr56n013504	3	15	what	what	PRON
cr56n013504	3	16	are	be	AUX
cr56n013504	3	17	known	know	VERB
cr56n013504	3	18	as	as	ADP
cr56n013504	3	19	super	super	ADJ
cr56n013504	3	20	-	-	ADJ
cr56n013504	3	21	resolution	resolution	ADJ
cr56n013504	3	22	images	image	NOUN
cr56n013504	3	23	.	.	PUNCT
cr56n013504	4	1	these	these	DET
cr56n013504	4	2	techniques	technique	NOUN
cr56n013504	4	3	vary	vary	VERB
cr56n013504	4	4	in	in	ADP
cr56n013504	4	5	their	their	PRON
cr56n013504	4	6	areas	area	NOUN
cr56n013504	4	7	of	of	ADP
cr56n013504	4	8	application	application	NOUN
cr56n013504	4	9	,	,	PUNCT
cr56n013504	4	10	theory	theory	NOUN
cr56n013504	4	11	,	,	PUNCT
cr56n013504	4	12	implementation	implementation	NOUN
cr56n013504	4	13	,	,	PUNCT
cr56n013504	4	14	and	and	CCONJ
cr56n013504	4	15	limitations	limitation	NOUN
cr56n013504	4	16	.	.	PUNCT
cr56n013504	5	1	one	one	NUM
cr56n013504	5	2	of	of	ADP
cr56n013504	5	3	these	these	DET
cr56n013504	5	4	methods	method	NOUN
cr56n013504	5	5	,	,	PUNCT
cr56n013504	5	6	known	know	VERB
cr56n013504	5	7	as	as	ADP
cr56n013504	5	8	structured	structure	VERB
cr56n013504	5	9	illumination	illumination	NOUN
cr56n013504	5	10	microscopy	microscopy	NOUN
cr56n013504	5	11	(	(	PUNCT
cr56n013504	5	12	sim	sim	NOUN
cr56n013504	5	13	)	)	PUNCT
cr56n013504	5	14	,	,	PUNCT
cr56n013504	5	15	has	have	VERB
cr56n013504	5	16	the	the	DET
cr56n013504	5	17	advantage	advantage	NOUN
cr56n013504	5	18	of	of	ADP
cr56n013504	5	19	creating	create	VERB
cr56n013504	5	20	wide	wide	ADJ
cr56n013504	5	21	-	-	PUNCT
cr56n013504	5	22	field	field	NOUN
cr56n013504	5	23	images	image	NOUN
cr56n013504	5	24	with	with	ADP
cr56n013504	5	25	both	both	DET
cr56n013504	5	26	compatibility	compatibility	NOUN
cr56n013504	5	27	with	with	ADP
cr56n013504	5	28	a	a	DET
cr56n013504	5	29	wide	wide	ADJ
cr56n013504	5	30	array	array	NOUN
cr56n013504	5	31	of	of	ADP
cr56n013504	5	32	fluorophores	fluorophore	NOUN
cr56n013504	5	33	and	and	CCONJ
cr56n013504	5	34	the	the	DET
cr56n013504	5	35	capability	capability	NOUN
cr56n013504	5	36	of	of	ADP
cr56n013504	5	37	higher	high	ADJ
cr56n013504	5	38	imaging	imaging	NOUN
cr56n013504	5	39	speeds	speed	NOUN
cr56n013504	5	40	that	that	PRON
cr56n013504	5	41	are	be	AUX
cr56n013504	5	42	needed	need	VERB
cr56n013504	5	43	for	for	ADP
cr56n013504	5	44	observation	observation	NOUN
cr56n013504	5	45	of	of	ADP
cr56n013504	5	46	cellular	cellular	ADJ
cr56n013504	5	47	processes	process	NOUN
cr56n013504	5	48	.	.	PUNCT
cr56n013504	6	1	the	the	DET
cr56n013504	6	2	performance	performance	NOUN
cr56n013504	6	3	and	and	CCONJ
cr56n013504	6	4	super	super	ADJ
cr56n013504	6	5	-	-	ADJ
cr56n013504	6	6	resolution	resolution	ADJ
cr56n013504	6	7	capabilities	capability	NOUN
cr56n013504	6	8	of	of	ADP
cr56n013504	6	9	sim	sim	NOUN
cr56n013504	6	10	are	be	AUX
cr56n013504	6	11	dictated	dictate	VERB
cr56n013504	6	12	in	in	ADP
cr56n013504	6	13	part	part	NOUN
cr56n013504	6	14	by	by	ADP
cr56n013504	6	15	the	the	DET
cr56n013504	6	16	illumination	illumination	NOUN
cr56n013504	6	17	pattern	pattern	NOUN
cr56n013504	6	18	,	,	PUNCT
cr56n013504	6	19	where	where	SCONJ
cr56n013504	6	20	using	use	VERB
cr56n013504	6	21	illumination	illumination	NOUN
cr56n013504	6	22	patterns	pattern	NOUN
cr56n013504	6	23	with	with	ADP
cr56n013504	6	24	higher	high	ADJ
cr56n013504	6	25	spatial	spatial	ADJ
cr56n013504	6	26	frequencies	frequency	NOUN
cr56n013504	6	27	corresponds	correspond	VERB
cr56n013504	6	28	to	to	ADP
cr56n013504	6	29	the	the	DET
cr56n013504	6	30	potential	potential	NOUN
cr56n013504	6	31	for	for	ADP
cr56n013504	6	32	better	well	ADJ
cr56n013504	6	33	resolution	resolution	NOUN
cr56n013504	6	34	enhancement	enhancement	NOUN
cr56n013504	6	35	.	.	PUNCT
cr56n013504	7	1	we	we	PRON
cr56n013504	7	2	intend	intend	VERB
cr56n013504	7	3	to	to	PART
cr56n013504	7	4	utilize	utilize	VERB
cr56n013504	7	5	metasurfaces	metasurface	NOUN
cr56n013504	7	6	,	,	PUNCT
cr56n013504	7	7	a	a	DET
cr56n013504	7	8	class	class	NOUN
cr56n013504	7	9	of	of	ADP
cr56n013504	7	10	artificial	artificial	ADJ
cr56n013504	7	11	materials	material	NOUN
cr56n013504	7	12	known	know	VERB
cr56n013504	7	13	as	as	ADP
cr56n013504	7	14	metamaterials	metamaterial	NOUN
cr56n013504	7	15	,	,	PUNCT
cr56n013504	7	16	to	to	PART
cr56n013504	7	17	achieve	achieve	VERB
cr56n013504	7	18	this	this	PRON
cr56n013504	7	19	.	.	PUNCT
cr56n013504	8	1	metasurfaces	metasurface	NOUN
cr56n013504	8	2	are	be	AUX
cr56n013504	8	3	surfaces	surface	NOUN
cr56n013504	8	4	comprised	comprise	VERB
cr56n013504	8	5	of	of	ADP
cr56n013504	8	6	subwavelength	subwavelength	NOUN
cr56n013504	8	7	features	feature	NOUN
cr56n013504	8	8	which	which	PRON
cr56n013504	8	9	can	can	AUX
cr56n013504	8	10	exhibit	exhibit	VERB
cr56n013504	8	11	modes	mode	NOUN
cr56n013504	8	12	with	with	ADP
cr56n013504	8	13	extraordinary	extraordinary	ADJ
cr56n013504	8	14	optical	optical	ADJ
cr56n013504	8	15	properties	property	NOUN
cr56n013504	8	16	and	and	CCONJ
cr56n013504	8	17	can	can	AUX
cr56n013504	8	18	facilitate	facilitate	VERB
cr56n013504	8	19	modes	mode	NOUN
cr56n013504	8	20	with	with	ADP
cr56n013504	8	21	fine	fine	ADJ
cr56n013504	8	22	spatial	spatial	ADJ
cr56n013504	8	23	frequencies	frequency	NOUN
cr56n013504	8	24	.	.	PUNCT
cr56n013504	9	1	the	the	DET
cr56n013504	9	2	goal	goal	NOUN
cr56n013504	9	3	of	of	ADP
cr56n013504	9	4	this	this	DET
cr56n013504	9	5	work	work	NOUN
cr56n013504	9	6	is	be	AUX
cr56n013504	9	7	to	to	PART
cr56n013504	9	8	is	be	AUX
cr56n013504	9	9	to	to	PART
cr56n013504	9	10	lay	lay	VERB
cr56n013504	9	11	the	the	DET
cr56n013504	9	12	groundwork	groundwork	NOUN
cr56n013504	9	13	for	for	ADP
cr56n013504	9	14	the	the	DET
cr56n013504	9	15	use	use	NOUN
cr56n013504	9	16	and	and	CCONJ
cr56n013504	9	17	application	application	NOUN
cr56n013504	9	18	of	of	ADP
cr56n013504	9	19	these	these	DET
cr56n013504	9	20	metasurfaces	metasurface	NOUN
cr56n013504	9	21	in	in	ADP
cr56n013504	9	22	obtaining	obtain	VERB
cr56n013504	9	23	super	super	ADJ
cr56n013504	9	24	-	-	ADJ
cr56n013504	9	25	resolution	resolution	ADJ
cr56n013504	9	26	images	image	NOUN
cr56n013504	9	27	through	through	ADP
cr56n013504	9	28	sim.we	sim.we	NOUN
cr56n013504	9	29	demonstrate	demonstrate	VERB
cr56n013504	9	30	the	the	DET
cr56n013504	9	31	ability	ability	NOUN
cr56n013504	9	32	to	to	PART
cr56n013504	9	33	engineer	engineer	VERB
cr56n013504	9	34	the	the	DET
cr56n013504	9	35	dispersion	dispersion	NOUN
cr56n013504	9	36	of	of	ADP
cr56n013504	9	37	modes	mode	NOUN
cr56n013504	9	38	present	present	ADJ
cr56n013504	9	39	along	along	ADP
cr56n013504	9	40	the	the	DET
cr56n013504	9	41	top	top	NOUN
cr56n013504	9	42	of	of	ADP
cr56n013504	9	43	silver	silver	ADJ
cr56n013504	9	44	nanoridge	nanoridge	PROPN
cr56n013504	9	45	array	array	NOUN
cr56n013504	9	46	metasurfaces	metasurface	NOUN
cr56n013504	9	47	through	through	ADP
cr56n013504	9	48	simulations	simulation	NOUN
cr56n013504	9	49	.	.	PUNCT
cr56n013504	10	1	the	the	DET
cr56n013504	10	2	dispersion	dispersion	NOUN
cr56n013504	10	3	can	can	AUX
cr56n013504	10	4	be	be	AUX
cr56n013504	10	5	engineered	engineer	VERB
cr56n013504	10	6	through	through	ADP
cr56n013504	10	7	adjusting	adjust	VERB
cr56n013504	10	8	geometric	geometric	ADJ
cr56n013504	10	9	,	,	PUNCT
cr56n013504	10	10	optical	optical	ADJ
cr56n013504	10	11	,	,	PUNCT
cr56n013504	10	12	and	and	CCONJ
cr56n013504	10	13	material	material	ADJ
cr56n013504	10	14	parameters	parameter	NOUN
cr56n013504	10	15	of	of	ADP
cr56n013504	10	16	the	the	DET
cr56n013504	10	17	metasurface	metasurface	NOUN
cr56n013504	10	18	simulations	simulation	NOUN
cr56n013504	10	19	.	.	PUNCT
cr56n013504	11	1	this	this	DET
cr56n013504	11	2	added	add	VERB
cr56n013504	11	3	control	control	NOUN
cr56n013504	11	4	over	over	ADP
cr56n013504	11	5	the	the	DET
cr56n013504	11	6	dispersive	dispersive	ADJ
cr56n013504	11	7	properties	property	NOUN
cr56n013504	11	8	of	of	ADP
cr56n013504	11	9	coupled	couple	VERB
cr56n013504	11	10	plasmonic	plasmonic	ADJ
cr56n013504	11	11	modes	mode	NOUN
cr56n013504	11	12	differentiates	differentiate	VERB
cr56n013504	11	13	our	our	PRON
cr56n013504	11	14	technique	technique	NOUN
cr56n013504	11	15	from	from	ADP
cr56n013504	11	16	other	other	ADJ
cr56n013504	11	17	demonstrated	demonstrate	VERB
cr56n013504	11	18	techniques	technique	NOUN
cr56n013504	11	19	which	which	PRON
cr56n013504	11	20	use	use	VERB
cr56n013504	11	21	surface	surface	NOUN
cr56n013504	11	22	plasmon	plasmon	NOUN
cr56n013504	11	23	polaritons	polariton	NOUN
cr56n013504	11	24	or	or	CCONJ
cr56n013504	11	25	localized	localize	VERB
cr56n013504	11	26	surface	surface	NOUN
cr56n013504	11	27	plasmon	plasmon	NOUN
cr56n013504	11	28	polaritons	polariton	NOUN
cr56n013504	11	29	in	in	ADP
cr56n013504	11	30	similar	similar	ADJ
cr56n013504	11	31	methods	method	NOUN
cr56n013504	11	32	we	we	PRON
cr56n013504	11	33	intend	intend	VERB
cr56n013504	11	34	to	to	PART
cr56n013504	11	35	for	for	ADP
cr56n013504	11	36	sim.we	sim.we	NOUN
cr56n013504	11	37	show	show	VERB
cr56n013504	11	38	that	that	SCONJ
cr56n013504	11	39	we	we	PRON
cr56n013504	11	40	can	can	AUX
cr56n013504	11	41	design	design	VERB
cr56n013504	11	42	a	a	DET
cr56n013504	11	43	silver	silver	ADJ
cr56n013504	11	44	nanoridge	nanoridge	ADJ
cr56n013504	11	45	metasurface	metasurface	NOUN
cr56n013504	11	46	to	to	PART
cr56n013504	11	47	exhibit	exhibit	VERB
cr56n013504	11	48	a	a	DET
cr56n013504	11	49	hyperbolic	hyperbolic	ADJ
cr56n013504	11	50	mode	mode	NOUN
cr56n013504	11	51	at	at	ADP
cr56n013504	11	52	a	a	DET
cr56n013504	11	53	given	give	VERB
cr56n013504	11	54	design	design	NOUN
cr56n013504	11	55	wavelength	wavelength	NOUN
cr56n013504	11	56	of	of	ADP
cr56n013504	11	57	458	458	NUM
cr56n013504	11	58	nm	nm	NOUN
cr56n013504	11	59	.	.	PUNCT
cr56n013504	12	1	we	we	PRON
cr56n013504	12	2	also	also	ADV
cr56n013504	12	3	demonstrate	demonstrate	VERB
cr56n013504	12	4	that	that	SCONJ
cr56n013504	12	5	we	we	PRON
cr56n013504	12	6	are	be	AUX
cr56n013504	12	7	able	able	ADJ
cr56n013504	12	8	to	to	PART
cr56n013504	12	9	confine	confine	VERB
cr56n013504	12	10	these	these	DET
cr56n013504	12	11	hyperbolic	hyperbolic	ADJ
cr56n013504	12	12	modes	mode	NOUN
cr56n013504	12	13	on	on	ADP
cr56n013504	12	14	nanoridges	nanoridge	NOUN
cr56n013504	12	15	of	of	ADP
cr56n013504	12	16	finite	finite	ADJ
cr56n013504	12	17	length	length	NOUN
cr56n013504	12	18	to	to	PART
cr56n013504	12	19	produce	produce	VERB
cr56n013504	12	20	standing	stand	VERB
cr56n013504	12	21	wave	wave	NOUN
cr56n013504	12	22	patterns	pattern	NOUN
cr56n013504	12	23	in	in	ADP
cr56n013504	12	24	the	the	DET
cr56n013504	12	25	electric	electric	ADJ
cr56n013504	12	26	field	field	NOUN
cr56n013504	12	27	of	of	ADP
cr56n013504	12	28	the	the	DET
cr56n013504	12	29	mode	mode	NOUN
cr56n013504	12	30	present	present	ADJ
cr56n013504	12	31	on	on	ADP
cr56n013504	12	32	the	the	DET
cr56n013504	12	33	nanoridges	nanoridge	NOUN
cr56n013504	12	34	.	.	PUNCT
cr56n013504	13	1	we	we	PRON
cr56n013504	13	2	then	then	ADV
cr56n013504	13	3	demonstrate	demonstrate	VERB
cr56n013504	13	4	that	that	SCONJ
cr56n013504	13	5	we	we	PRON
cr56n013504	13	6	are	be	AUX
cr56n013504	13	7	able	able	ADJ
cr56n013504	13	8	to	to	PART
cr56n013504	13	9	achieve	achieve	VERB
cr56n013504	13	10	super	super	ADJ
cr56n013504	13	11	-	-	ADJ
cr56n013504	13	12	resolution	resolution	ADJ
cr56n013504	13	13	images	image	NOUN
cr56n013504	13	14	using	use	VERB
cr56n013504	13	15	these	these	DET
cr56n013504	13	16	electric	electric	ADJ
cr56n013504	13	17	field	field	NOUN
cr56n013504	13	18	patterns	pattern	NOUN
cr56n013504	13	19	associated	associate	VERB
cr56n013504	13	20	with	with	ADP
cr56n013504	13	21	our	our	PRON
cr56n013504	13	22	hyperbolic	hyperbolic	ADJ
cr56n013504	13	23	metasurfaces	metasurface	NOUN
cr56n013504	13	24	as	as	ADP
cr56n013504	13	25	structured	structured	ADJ
cr56n013504	13	26	illumination	illumination	NOUN
cr56n013504	13	27	patterns	pattern	NOUN
cr56n013504	13	28	in	in	ADP
cr56n013504	13	29	sim	sim	NOUN
cr56n013504	13	30	algorithms	algorithm	NOUN
cr56n013504	13	31	through	through	ADP
cr56n013504	13	32	simulation	simulation	NOUN
cr56n013504	13	33	.	.	PUNCT
cr56n013504	14	1	we	we	PRON
cr56n013504	14	2	showcase	showcase	VERB
cr56n013504	14	3	the	the	DET
cr56n013504	14	4	adaptability	adaptability	NOUN
cr56n013504	14	5	of	of	ADP
cr56n013504	14	6	this	this	DET
cr56n013504	14	7	technique	technique	NOUN
cr56n013504	14	8	to	to	PART
cr56n013504	14	9	reconstruct	reconstruct	VERB
cr56n013504	14	10	super	super	ADJ
cr56n013504	14	11	-	-	ADJ
cr56n013504	14	12	resolution	resolution	ADJ
cr56n013504	14	13	images	image	NOUN
cr56n013504	14	14	for	for	ADP
cr56n013504	14	15	a	a	DET
cr56n013504	14	16	variety	variety	NOUN
cr56n013504	14	17	of	of	ADP
cr56n013504	14	18	metasurface	metasurface	NOUN
cr56n013504	14	19	and	and	CCONJ
cr56n013504	14	20	imaging	image	VERB
cr56n013504	14	21	parameters.we	parameters.we	X
cr56n013504	14	22	will	will	AUX
cr56n013504	14	23	show	show	VERB
cr56n013504	14	24	current	current	ADJ
cr56n013504	14	25	metasurface	metasurface	NOUN
cr56n013504	14	26	fabrications	fabrication	NOUN
cr56n013504	14	27	designed	design	VERB
cr56n013504	14	28	with	with	ADP
cr56n013504	14	29	hyperbolic	hyperbolic	ADJ
cr56n013504	14	30	dispersion	dispersion	NOUN
cr56n013504	14	31	at	at	ADP
cr56n013504	14	32	458	458	NUM
cr56n013504	14	33	nm	nm	NOUN
cr56n013504	14	34	.	.	PUNCT
cr56n013504	15	1	we	we	PRON
cr56n013504	15	2	then	then	ADV
cr56n013504	15	3	use	use	VERB
cr56n013504	15	4	reflection	reflection	NOUN
cr56n013504	15	5	measurements	measurement	NOUN
cr56n013504	15	6	and	and	CCONJ
cr56n013504	15	7	comparisons	comparison	NOUN
cr56n013504	15	8	to	to	ADP
cr56n013504	15	9	simulation	simulation	NOUN
cr56n013504	15	10	to	to	PART
cr56n013504	15	11	analyze	analyze	VERB
cr56n013504	15	12	and	and	CCONJ
cr56n013504	15	13	characterize	characterize	VERB
cr56n013504	15	14	it	it	PRON
cr56n013504	15	15	.	.	PUNCT
cr56n013504	16	1	finally	finally	ADV
cr56n013504	16	2	,	,	PUNCT
cr56n013504	16	3	we	we	PRON
cr56n013504	16	4	demonstrate	demonstrate	VERB
cr56n013504	16	5	experimental	experimental	ADJ
cr56n013504	16	6	results	result	NOUN
cr56n013504	16	7	of	of	ADP
cr56n013504	16	8	sim	sim	NOUN
cr56n013504	16	9	using	use	VERB
cr56n013504	16	10	our	our	PRON
cr56n013504	16	11	fabricated	fabricate	VERB
cr56n013504	16	12	metasurfaces	metasurface	NOUN
cr56n013504	16	13	.	.	PUNCT