id	sid	tid	token	lemma	pos
5h73pv65d7x	1	1	in	in	ADP
5h73pv65d7x	1	2	this	this	DET
5h73pv65d7x	1	3	thesis	thesis	NOUN
5h73pv65d7x	1	4	,	,	PUNCT
5h73pv65d7x	1	5	the	the	DET
5h73pv65d7x	1	6	development	development	NOUN
5h73pv65d7x	1	7	of	of	ADP
5h73pv65d7x	1	8	high	high	ADJ
5h73pv65d7x	1	9	surface	surface	NOUN
5h73pv65d7x	1	10	quality	quality	NOUN
5h73pv65d7x	1	11	,	,	PUNCT
5h73pv65d7x	1	12	broad	broad	ADJ
5h73pv65d7x	1	13	bandwidth	bandwidth	ADJ
5h73pv65d7x	1	14	,	,	PUNCT
5h73pv65d7x	1	15	low	low	ADJ
5h73pv65d7x	1	16	cost	cost	NOUN
5h73pv65d7x	1	17	antireflection	antireflection	NOUN
5h73pv65d7x	1	18	coatings	coating	NOUN
5h73pv65d7x	1	19	using	use	VERB
5h73pv65d7x	1	20	the	the	DET
5h73pv65d7x	1	21	low	low	ADJ
5h73pv65d7x	1	22	optical	optical	ADJ
5h73pv65d7x	1	23	index	index	NOUN
5h73pv65d7x	1	24	gaas	gaas	NOUN
5h73pv65d7x	1	25	native	native	ADJ
5h73pv65d7x	1	26	oxide	oxide	NOUN
5h73pv65d7x	1	27	processed	process	VERB
5h73pv65d7x	1	28	by	by	ADP
5h73pv65d7x	1	29	a	a	DET
5h73pv65d7x	1	30	new	new	ADJ
5h73pv65d7x	1	31	oxygen	oxygen	NOUN
5h73pv65d7x	1	32	-	-	PUNCT
5h73pv65d7x	1	33	enhanced	enhance	VERB
5h73pv65d7x	1	34	wet	wet	ADJ
5h73pv65d7x	1	35	thermal	thermal	ADJ
5h73pv65d7x	1	36	oxidation	oxidation	NOUN
5h73pv65d7x	1	37	method	method	NOUN
5h73pv65d7x	1	38	is	be	AUX
5h73pv65d7x	1	39	demonstrated	demonstrate	VERB
5h73pv65d7x	1	40	.	.	PUNCT
5h73pv65d7x	2	1	the	the	DET
5h73pv65d7x	2	2	thicknesses	thickness	NOUN
5h73pv65d7x	2	3	and	and	CCONJ
5h73pv65d7x	2	4	optical	optical	ADJ
5h73pv65d7x	2	5	constants	constant	NOUN
5h73pv65d7x	2	6	of	of	ADP
5h73pv65d7x	2	7	the	the	DET
5h73pv65d7x	2	8	gaas	gaas	NOUN
5h73pv65d7x	2	9	native	native	ADJ
5h73pv65d7x	2	10	oxide	oxide	NOUN
5h73pv65d7x	2	11	and	and	CCONJ
5h73pv65d7x	2	12	the	the	DET
5h73pv65d7x	2	13	gaas	gaas	NOUN
5h73pv65d7x	2	14	substrate	substrate	NOUN
5h73pv65d7x	2	15	used	use	VERB
5h73pv65d7x	2	16	in	in	ADP
5h73pv65d7x	2	17	the	the	DET
5h73pv65d7x	2	18	ar	ar	PROPN
5h73pv65d7x	2	19	coating	coating	NOUN
5h73pv65d7x	2	20	design	design	NOUN
5h73pv65d7x	2	21	have	have	AUX
5h73pv65d7x	2	22	been	be	AUX
5h73pv65d7x	2	23	determined	determine	VERB
5h73pv65d7x	2	24	by	by	ADP
5h73pv65d7x	2	25	variable	variable	ADJ
5h73pv65d7x	2	26	angle	angle	NOUN
5h73pv65d7x	2	27	spectroscopic	spectroscopic	NOUN
5h73pv65d7x	2	28	ellipsometry	ellipsometry	NOUN
5h73pv65d7x	2	29	measurements	measurement	NOUN
5h73pv65d7x	2	30	within	within	ADP
5h73pv65d7x	2	31	the	the	DET
5h73pv65d7x	2	32	visible	visible	ADJ
5h73pv65d7x	2	33	light	light	ADJ
5h73pv65d7x	2	34	wavelength	wavelength	NOUN
5h73pv65d7x	2	35	range	range	NOUN
5h73pv65d7x	2	36	at	at	ADP
5h73pv65d7x	2	37	room	room	NOUN
5h73pv65d7x	2	38	temperature	temperature	NOUN
5h73pv65d7x	2	39	.	.	PUNCT
5h73pv65d7x	3	1	the	the	DET
5h73pv65d7x	3	2	antireflection	antireflection	NOUN
5h73pv65d7x	3	3	coatings	coating	NOUN
5h73pv65d7x	3	4	have	have	VERB
5h73pv65d7x	3	5	a	a	DET
5h73pv65d7x	3	6	simulated	simulated	ADJ
5h73pv65d7x	3	7	reflectance	reflectance	NOUN
5h73pv65d7x	3	8	of	of	ADP
5h73pv65d7x	3	9	<	<	X
5h73pv65d7x	3	10	10	10	NUM
5h73pv65d7x	3	11	%	%	NOUN
5h73pv65d7x	3	12	over	over	ADP
5h73pv65d7x	3	13	bandwidths	bandwidth	NOUN
5h73pv65d7x	3	14	as	as	ADV
5h73pv65d7x	3	15	large	large	ADJ
5h73pv65d7x	3	16	as	as	ADP
5h73pv65d7x	3	17	300	300	NUM
5h73pv65d7x	3	18	nm	nm	NOUN
5h73pv65d7x	3	19	and	and	CCONJ
5h73pv65d7x	3	20	a	a	DET
5h73pv65d7x	3	21	minimum	minimum	ADJ
5h73pv65d7x	3	22	reflectance	reflectance	NOUN
5h73pv65d7x	3	23	of	of	ADP
5h73pv65d7x	3	24	2.3	2.3	NUM
5h73pv65d7x	3	25	%	%	NOUN
5h73pv65d7x	3	26	for	for	ADP
5h73pv65d7x	3	27	a	a	DET
5h73pv65d7x	3	28	design	design	NOUN
5h73pv65d7x	3	29	wavelength	wavelength	NOUN
5h73pv65d7x	3	30	range	range	NOUN
5h73pv65d7x	3	31	of	of	ADP
5h73pv65d7x	3	32	400	400	NUM
5h73pv65d7x	3	33	to	to	PART
5h73pv65d7x	3	34	800	800	NUM
5h73pv65d7x	3	35	nm	nm	NOUN
5h73pv65d7x	3	36	.	.	PUNCT
5h73pv65d7x	4	1	good	good	ADJ
5h73pv65d7x	4	2	agreement	agreement	NOUN
5h73pv65d7x	4	3	between	between	ADP
5h73pv65d7x	4	4	the	the	DET
5h73pv65d7x	4	5	simulated	simulated	ADJ
5h73pv65d7x	4	6	and	and	CCONJ
5h73pv65d7x	4	7	measured	measure	VERB
5h73pv65d7x	4	8	reflectance	reflectance	NOUN
5h73pv65d7x	4	9	data	datum	NOUN
5h73pv65d7x	4	10	supports	support	VERB
5h73pv65d7x	4	11	the	the	DET
5h73pv65d7x	4	12	validity	validity	NOUN
5h73pv65d7x	4	13	of	of	ADP
5h73pv65d7x	4	14	the	the	DET
5h73pv65d7x	4	15	modeling	modeling	NOUN
5h73pv65d7x	4	16	and	and	CCONJ
5h73pv65d7x	4	17	indicates	indicate	VERB
5h73pv65d7x	4	18	that	that	SCONJ
5h73pv65d7x	4	19	a	a	DET
5h73pv65d7x	4	20	smooth	smooth	ADJ
5h73pv65d7x	4	21	interface	interface	NOUN
5h73pv65d7x	4	22	is	be	AUX
5h73pv65d7x	4	23	achieved	achieve	VERB
5h73pv65d7x	4	24	between	between	ADP
5h73pv65d7x	4	25	the	the	DET
5h73pv65d7x	4	26	semiconductor	semiconductor	NOUN
5h73pv65d7x	4	27	and	and	CCONJ
5h73pv65d7x	4	28	the	the	DET
5h73pv65d7x	4	29	thermally	thermally	ADV
5h73pv65d7x	4	30	grown	grow	VERB
5h73pv65d7x	4	31	native	native	ADJ
5h73pv65d7x	4	32	oxide	oxide	NOUN
5h73pv65d7x	4	33	.	.	PUNCT