id	sid	tid	token	lemma	pos
5138jd48z75	1	1	nanomagnet	nanomagnet	PROPN
5138jd48z75	1	2	logic	logic	NOUN
5138jd48z75	1	3	(	(	PUNCT
5138jd48z75	1	4	nml	nml	NOUN
5138jd48z75	1	5	)	)	PUNCT
5138jd48z75	1	6	is	be	AUX
5138jd48z75	1	7	a	a	DET
5138jd48z75	1	8	low	low	ADJ
5138jd48z75	1	9	power	power	NOUN
5138jd48z75	1	10	,	,	PUNCT
5138jd48z75	1	11	nonvolatile	nonvolatile	ADJ
5138jd48z75	1	12	,	,	PUNCT
5138jd48z75	1	13	and	and	CCONJ
5138jd48z75	1	14	radiation	radiation	NOUN
5138jd48z75	1	15	-	-	PUNCT
5138jd48z75	1	16	hard	hard	ADJ
5138jd48z75	1	17	technology	technology	NOUN
5138jd48z75	1	18	that	that	PRON
5138jd48z75	1	19	could	could	AUX
5138jd48z75	1	20	supplement	supplement	VERB
5138jd48z75	1	21	or	or	CCONJ
5138jd48z75	1	22	possibly	possibly	ADV
5138jd48z75	1	23	replace	replace	VERB
5138jd48z75	1	24	cmos	cmos	ADJ
5138jd48z75	1	25	logic	logic	NOUN
5138jd48z75	1	26	technologies	technology	NOUN
5138jd48z75	1	27	.	.	PUNCT
5138jd48z75	2	1	to	to	PART
5138jd48z75	2	2	further	further	VERB
5138jd48z75	2	3	the	the	DET
5138jd48z75	2	4	study	study	NOUN
5138jd48z75	2	5	of	of	ADP
5138jd48z75	2	6	nml	nml	PROPN
5138jd48z75	2	7	technology	technology	PROPN
5138jd48z75	2	8	,	,	PUNCT
5138jd48z75	2	9	a	a	DET
5138jd48z75	2	10	reliable	reliable	ADJ
5138jd48z75	2	11	on	on	ADP
5138jd48z75	2	12	-	-	PUNCT
5138jd48z75	2	13	chip	chip	NOUN
5138jd48z75	2	14	clocking	clocking	NOUN
5138jd48z75	2	15	scheme	scheme	NOUN
5138jd48z75	2	16	is	be	AUX
5138jd48z75	2	17	required	require	VERB
5138jd48z75	2	18	.	.	PUNCT
5138jd48z75	3	1	in	in	ADP
5138jd48z75	3	2	this	this	DET
5138jd48z75	3	3	thesis	thesis	NOUN
5138jd48z75	3	4	,	,	PUNCT
5138jd48z75	3	5	we	we	PRON
5138jd48z75	3	6	explore	explore	VERB
5138jd48z75	3	7	the	the	DET
5138jd48z75	3	8	fabrication	fabrication	NOUN
5138jd48z75	3	9	steps	step	NOUN
5138jd48z75	3	10	required	require	VERB
5138jd48z75	3	11	to	to	PART
5138jd48z75	3	12	build	build	VERB
5138jd48z75	3	13	clock	clock	NOUN
5138jd48z75	3	14	lines	line	NOUN
5138jd48z75	3	15	for	for	ADP
5138jd48z75	3	16	nml	nml	PROPN
5138jd48z75	3	17	.	.	PUNCT
5138jd48z75	4	1	this	this	DET
5138jd48z75	4	2	damascene	damascene	NOUN
5138jd48z75	4	3	process	process	NOUN
5138jd48z75	4	4	utilizes	utilize	VERB
5138jd48z75	4	5	chemical	chemical	ADJ
5138jd48z75	4	6	mechanical	mechanical	ADJ
5138jd48z75	4	7	polishing	polishing	NOUN
5138jd48z75	4	8	(	(	PUNCT
5138jd48z75	4	9	cmp	cmp	NOUN
5138jd48z75	4	10	)	)	PUNCT
5138jd48z75	4	11	of	of	ADP
5138jd48z75	4	12	copper	copper	NOUN
5138jd48z75	4	13	.	.	PUNCT
5138jd48z75	5	1	the	the	DET
5138jd48z75	5	2	process	process	NOUN
5138jd48z75	5	3	has	have	AUX
5138jd48z75	5	4	proven	prove	VERB
5138jd48z75	5	5	to	to	PART
5138jd48z75	5	6	be	be	AUX
5138jd48z75	5	7	reproducible	reproducible	VERB
5138jd48z75	5	8	and	and	CCONJ
5138jd48z75	5	9	result	result	VERB
5138jd48z75	5	10	in	in	ADP
5138jd48z75	5	11	a	a	DET
5138jd48z75	5	12	high	high	ADJ
5138jd48z75	5	13	yield	yield	NOUN
5138jd48z75	5	14	of	of	ADP
5138jd48z75	5	15	reliable	reliable	ADJ
5138jd48z75	5	16	clock	clock	NOUN
5138jd48z75	5	17	line	line	NOUN
5138jd48z75	5	18	chips	chip	NOUN
5138jd48z75	5	19	.	.	PUNCT
5138jd48z75	6	1	we	we	PRON
5138jd48z75	6	2	also	also	ADV
5138jd48z75	6	3	examine	examine	VERB
5138jd48z75	6	4	clock	clock	NOUN
5138jd48z75	6	5	line	line	NOUN
5138jd48z75	6	6	analysis	analysis	NOUN
5138jd48z75	6	7	techniques	technique	NOUN
5138jd48z75	6	8	,	,	PUNCT
5138jd48z75	6	9	including	include	VERB
5138jd48z75	6	10	characterization	characterization	NOUN
5138jd48z75	6	11	and	and	CCONJ
5138jd48z75	6	12	simulation	simulation	NOUN
5138jd48z75	6	13	studies	study	NOUN
5138jd48z75	6	14	.	.	PUNCT
5138jd48z75	7	1	the	the	DET
5138jd48z75	7	2	surface	surface	NOUN
5138jd48z75	7	3	roughness	roughnes	VERB
5138jd48z75	7	4	analysis	analysis	NOUN
5138jd48z75	7	5	demonstrates	demonstrate	VERB
5138jd48z75	7	6	that	that	SCONJ
5138jd48z75	7	7	these	these	DET
5138jd48z75	7	8	clock	clock	NOUN
5138jd48z75	7	9	lines	line	NOUN
5138jd48z75	7	10	are	be	AUX
5138jd48z75	7	11	suitable	suitable	ADJ
5138jd48z75	7	12	for	for	ADP
5138jd48z75	7	13	further	further	ADJ
5138jd48z75	7	14	nml	nml	NOUN
5138jd48z75	7	15	processing	processing	NOUN
5138jd48z75	7	16	.	.	PUNCT
5138jd48z75	8	1	the	the	DET
5138jd48z75	8	2	simulations	simulation	NOUN
5138jd48z75	8	3	demonstrate	demonstrate	VERB
5138jd48z75	8	4	that	that	SCONJ
5138jd48z75	8	5	not	not	PART
5138jd48z75	8	6	only	only	ADV
5138jd48z75	8	7	can	can	AUX
5138jd48z75	8	8	the	the	DET
5138jd48z75	8	9	isolated	isolated	ADJ
5138jd48z75	8	10	clock	clock	NOUN
5138jd48z75	8	11	lines	line	NOUN
5138jd48z75	8	12	can	can	AUX
5138jd48z75	8	13	be	be	AUX
5138jd48z75	8	14	used	use	VERB
5138jd48z75	8	15	to	to	PART
5138jd48z75	8	16	clock	clock	VERB
5138jd48z75	8	17	nml	nml	NOUN
5138jd48z75	8	18	circuits	circuit	NOUN
5138jd48z75	8	19	,	,	PUNCT
5138jd48z75	8	20	but	but	CCONJ
5138jd48z75	8	21	that	that	SCONJ
5138jd48z75	8	22	we	we	PRON
5138jd48z75	8	23	can	can	AUX
5138jd48z75	8	24	build	build	VERB
5138jd48z75	8	25	adjacent	adjacent	ADJ
5138jd48z75	8	26	clock	clock	NOUN
5138jd48z75	8	27	lines	line	NOUN
5138jd48z75	8	28	for	for	ADP
5138jd48z75	8	29	data	datum	NOUN
5138jd48z75	8	30	pipelining	pipelining	NOUN
5138jd48z75	8	31	.	.	PUNCT
5138jd48z75	9	1	future	future	ADJ
5138jd48z75	9	2	research	research	NOUN
5138jd48z75	9	3	projects	project	NOUN
5138jd48z75	9	4	,	,	PUNCT
5138jd48z75	9	5	which	which	PRON
5138jd48z75	9	6	utilize	utilize	VERB
5138jd48z75	9	7	cmp	cmp	NOUN
5138jd48z75	9	8	in	in	ADP
5138jd48z75	9	9	nml	nml	PROPN
5138jd48z75	9	10	,	,	PUNCT
5138jd48z75	9	11	include	include	VERB
5138jd48z75	9	12	building	build	VERB
5138jd48z75	9	13	these	these	DET
5138jd48z75	9	14	adjacent	adjacent	ADJ
5138jd48z75	9	15	clock	clock	NOUN
5138jd48z75	9	16	line	line	NOUN
5138jd48z75	9	17	structures	structure	NOUN
5138jd48z75	9	18	,	,	PUNCT
5138jd48z75	9	19	and	and	CCONJ
5138jd48z75	9	20	fabricating	fabricate	VERB
5138jd48z75	9	21	nml	nml	NOUN
5138jd48z75	9	22	circuits	circuit	NOUN
5138jd48z75	9	23	using	use	VERB
5138jd48z75	9	24	a	a	DET
5138jd48z75	9	25	nanodamascene	nanodamascene	ADJ
5138jd48z75	9	26	process	process	NOUN
5138jd48z75	9	27	.	.	PUNCT