id	sid	tid	token	lemma	pos
2j62s467069	1	1	the	the	DET
2j62s467069	1	2	iii	iii	NUM
2j62s467069	1	3	-	-	PUNCT
2j62s467069	1	4	v	v	NOUN
2j62s467069	1	5	compound	compound	NOUN
2j62s467069	1	6	semiconductoir	semiconductoir	NOUN
2j62s467069	1	7	wet	wet	ADJ
2j62s467069	1	8	oxidation	oxidation	NOUN
2j62s467069	1	9	system	system	NOUN
2j62s467069	1	10	for	for	ADP
2j62s467069	1	11	the	the	DET
2j62s467069	1	12	nanofabrication	nanofabrication	NOUN
2j62s467069	1	13	laboratory	laboratory	NOUN
2j62s467069	1	14	at	at	ADP
2j62s467069	1	15	the	the	DET
2j62s467069	1	16	university	university	PROPN
2j62s467069	1	17	of	of	ADP
2j62s467069	1	18	notre	notre	PROPN
2j62s467069	1	19	dame	dame	NOUN
2j62s467069	1	20	has	have	AUX
2j62s467069	1	21	undergone	undergo	VERB
2j62s467069	1	22	an	an	DET
2j62s467069	1	23	extensive	extensive	ADJ
2j62s467069	1	24	redesign	redesign	NOUN
2j62s467069	1	25	and	and	CCONJ
2j62s467069	1	26	rebuild	rebuild	VERB
2j62s467069	1	27	.	.	PUNCT
2j62s467069	2	1	improvements	improvement	NOUN
2j62s467069	2	2	to	to	ADP
2j62s467069	2	3	the	the	DET
2j62s467069	2	4	various	various	ADJ
2j62s467069	2	5	subsystems	subsystem	NOUN
2j62s467069	2	6	are	be	AUX
2j62s467069	2	7	described	describe	VERB
2j62s467069	2	8	in	in	ADP
2j62s467069	2	9	detail	detail	NOUN
2j62s467069	2	10	followed	follow	VERB
2j62s467069	2	11	by	by	ADP
2j62s467069	2	12	processing	processing	NOUN
2j62s467069	2	13	techniques	technique	NOUN
2j62s467069	2	14	and	and	CCONJ
2j62s467069	2	15	concluded	conclude	VERB
2j62s467069	2	16	with	with	ADP
2j62s467069	2	17	a	a	DET
2j62s467069	2	18	set	set	NOUN
2j62s467069	2	19	of	of	ADP
2j62s467069	2	20	standard	standard	ADJ
2j62s467069	2	21	oxidations	oxidation	NOUN
2j62s467069	2	22	.	.	PUNCT