id	sid	tid	token	lemma	pos
1v53jw84256	1	1	in	in	ADP
1v53jw84256	1	2	order	order	NOUN
1v53jw84256	1	3	to	to	PART
1v53jw84256	1	4	understand	understand	VERB
1v53jw84256	1	5	the	the	DET
1v53jw84256	1	6	degradation	degradation	NOUN
1v53jw84256	1	7	pathways	pathway	NOUN
1v53jw84256	1	8	suffered	suffer	VERB
1v53jw84256	1	9	by	by	ADP
1v53jw84256	1	10	protective	protective	ADJ
1v53jw84256	1	11	coatings	coating	NOUN
1v53jw84256	1	12	and	and	CCONJ
1v53jw84256	1	13	polymeric	polymeric	ADJ
1v53jw84256	1	14	satellite	satellite	NOUN
1v53jw84256	1	15	materials	material	NOUN
1v53jw84256	1	16	in	in	ADP
1v53jw84256	1	17	the	the	DET
1v53jw84256	1	18	low	low	ADJ
1v53jw84256	1	19	-	-	PUNCT
1v53jw84256	1	20	earth	earth	NOUN
1v53jw84256	1	21	orbit	orbit	NOUN
1v53jw84256	1	22	(	(	PUNCT
1v53jw84256	1	23	leo	leo	PROPN
1v53jw84256	1	24	)	)	PUNCT
1v53jw84256	1	25	space	space	NOUN
1v53jw84256	1	26	environment	environment	NOUN
1v53jw84256	1	27	,	,	PUNCT
1v53jw84256	1	28	reactions	reaction	NOUN
1v53jw84256	1	29	of	of	ADP
1v53jw84256	1	30	hyperthermal	hyperthermal	ADJ
1v53jw84256	1	31	oxygen	oxygen	NOUN
1v53jw84256	1	32	ions	ion	NOUN
1v53jw84256	1	33	with	with	ADP
1v53jw84256	1	34	self	self	NOUN
1v53jw84256	1	35	-	-	PUNCT
1v53jw84256	1	36	assembled	assemble	VERB
1v53jw84256	1	37	monolayers	monolayer	NOUN
1v53jw84256	1	38	(	(	PUNCT
1v53jw84256	1	39	sams	sams	PROPN
1v53jw84256	1	40	)	)	PUNCT
1v53jw84256	1	41	and	and	CCONJ
1v53jw84256	1	42	silicon	silicon	NOUN
1v53jw84256	1	43	oxide	oxide	NOUN
1v53jw84256	1	44	thin	thin	ADJ
1v53jw84256	1	45	films	film	NOUN
1v53jw84256	1	46	are	be	AUX
1v53jw84256	1	47	studied	study	VERB
1v53jw84256	1	48	under	under	ADP
1v53jw84256	1	49	ultra	ultra	ADJ
1v53jw84256	1	50	-	-	ADJ
1v53jw84256	1	51	high	high	ADJ
1v53jw84256	1	52	vacuum	vacuum	NOUN
1v53jw84256	1	53	(	(	PUNCT
1v53jw84256	1	54	uhv	uhv	PROPN
1v53jw84256	1	55	)	)	PUNCT
1v53jw84256	1	56	conditions	condition	NOUN
1v53jw84256	1	57	.	.	PUNCT
1v53jw84256	2	1	the	the	DET
1v53jw84256	2	2	scattered	scatter	VERB
1v53jw84256	2	3	ionic	ionic	ADJ
1v53jw84256	2	4	products	product	NOUN
1v53jw84256	2	5	are	be	AUX
1v53jw84256	2	6	collected	collect	VERB
1v53jw84256	2	7	with	with	ADP
1v53jw84256	2	8	energy-	energy-	NOUN
1v53jw84256	2	9	,	,	PUNCT
1v53jw84256	2	10	angleand	angleand	CCONJ
1v53jw84256	2	11	mass	mass	ADV
1v53jw84256	2	12	-	-	PUNCT
1v53jw84256	2	13	resolved	resolve	VERB
1v53jw84256	2	14	detection	detection	NOUN
1v53jw84256	2	15	when	when	SCONJ
1v53jw84256	2	16	5	5	NUM
1v53jw84256	2	17	-	-	SYM
1v53jw84256	2	18	40	40	NUM
1v53jw84256	2	19	ev	ev	NOUN
1v53jw84256	2	20	o+	o+	SCONJ
1v53jw84256	2	21	ions	ion	NOUN
1v53jw84256	2	22	impact	impact	VERB
1v53jw84256	2	23	an	an	DET
1v53jw84256	2	24	alkanethiolate	alkanethiolate	PROPN
1v53jw84256	2	25	sam	sam	PROPN
1v53jw84256	2	26	.	.	PUNCT
1v53jw84256	3	1	x	x	X
1v53jw84256	3	2	-	-	NOUN
1v53jw84256	3	3	ray	ray	NOUN
1v53jw84256	3	4	photoelectron	photoelectron	NOUN
1v53jw84256	3	5	spectroscopy	spectroscopy	PROPN
1v53jw84256	3	6	(	(	PUNCT
1v53jw84256	3	7	xps	xps	PROPN
1v53jw84256	3	8	)	)	PUNCT
1v53jw84256	3	9	is	be	AUX
1v53jw84256	3	10	used	use	VERB
1v53jw84256	3	11	to	to	PART
1v53jw84256	3	12	measure	measure	VERB
1v53jw84256	3	13	the	the	DET
1v53jw84256	3	14	resulting	result	VERB
1v53jw84256	3	15	erosion	erosion	NOUN
1v53jw84256	3	16	yield	yield	NOUN
1v53jw84256	3	17	and	and	CCONJ
1v53jw84256	3	18	degree	degree	NOUN
1v53jw84256	3	19	of	of	ADP
1v53jw84256	3	20	oxidation	oxidation	NOUN
1v53jw84256	3	21	in	in	ADP
1v53jw84256	3	22	the	the	DET
1v53jw84256	3	23	hydrocarbon	hydrocarbon	NOUN
1v53jw84256	3	24	layer	layer	NOUN
1v53jw84256	3	25	.	.	PUNCT
1v53jw84256	4	1	to	to	PART
1v53jw84256	4	2	learn	learn	VERB
1v53jw84256	4	3	about	about	ADP
1v53jw84256	4	4	the	the	DET
1v53jw84256	4	5	site	site	NOUN
1v53jw84256	4	6	-	-	PUNCT
1v53jw84256	4	7	specificity	specificity	NOUN
1v53jw84256	4	8	to	to	ADP
1v53jw84256	4	9	hydrogen	hydrogen	NOUN
1v53jw84256	4	10	abstraction	abstraction	NOUN
1v53jw84256	4	11	in	in	ADP
1v53jw84256	4	12	this	this	DET
1v53jw84256	4	13	system	system	NOUN
1v53jw84256	4	14	,	,	PUNCT
1v53jw84256	4	15	sam	sam	PROPN
1v53jw84256	4	16	layers	layer	NOUN
1v53jw84256	4	17	are	be	AUX
1v53jw84256	4	18	grown	grow	VERB
1v53jw84256	4	19	for	for	ADP
1v53jw84256	4	20	which	which	PRON
1v53jw84256	4	21	the	the	DET
1v53jw84256	4	22	hydrogen	hydrogen	NOUN
1v53jw84256	4	23	atoms	atom	NOUN
1v53jw84256	4	24	located	locate	VERB
1v53jw84256	4	25	on	on	ADP
1v53jw84256	4	26	the	the	DET
1v53jw84256	4	27	c-12	c-12	PROPN
1v53jw84256	4	28	,	,	PUNCT
1v53jw84256	4	29	c-11	c-11	ADJ
1v53jw84256	4	30	,	,	PUNCT
1v53jw84256	4	31	or	or	CCONJ
1v53jw84256	4	32	c-10	c-10	NOUN
1v53jw84256	4	33	positions	position	NOUN
1v53jw84256	4	34	of	of	ADP
1v53jw84256	4	35	1	1	NUM
1v53jw84256	4	36	-	-	PUNCT
1v53jw84256	4	37	dodcanethiol	dodcanethiol	NOUN
1v53jw84256	4	38	are	be	AUX
1v53jw84256	4	39	substituted	substitute	VERB
1v53jw84256	4	40	with	with	ADP
1v53jw84256	4	41	deuterium	deuterium	NOUN
1v53jw84256	4	42	atoms	atom	NOUN
1v53jw84256	4	43	.	.	PUNCT
1v53jw84256	5	1	by	by	ADP
1v53jw84256	5	2	comparing	compare	VERB
1v53jw84256	5	3	the	the	DET
1v53jw84256	5	4	yields	yield	NOUN
1v53jw84256	5	5	of	of	ADP
1v53jw84256	5	6	oh	oh	INTJ
1v53jw84256	5	7	to	to	AUX
1v53jw84256	5	8	od	od	X
1v53jw84256	5	9	emerging	emerge	VERB
1v53jw84256	5	10	from	from	ADP
1v53jw84256	5	11	these	these	DET
1v53jw84256	5	12	three	three	NUM
1v53jw84256	5	13	isotopomers	isotopomer	NOUN
1v53jw84256	5	14	,	,	PUNCT
1v53jw84256	5	15	it	it	PRON
1v53jw84256	5	16	is	be	AUX
1v53jw84256	5	17	found	find	VERB
1v53jw84256	5	18	that	that	SCONJ
1v53jw84256	5	19	hyperthermal	hyperthermal	ADJ
1v53jw84256	5	20	o+	o+	SCONJ
1v53jw84256	5	21	ions	ion	NOUN
1v53jw84256	5	22	initially	initially	ADV
1v53jw84256	5	23	abstract	abstract	ADJ
1v53jw84256	5	24	only	only	ADV
1v53jw84256	5	25	h(d)-atoms	h(d)-atom	NOUN
1v53jw84256	5	26	bound	bind	VERB
1v53jw84256	5	27	to	to	ADP
1v53jw84256	5	28	the	the	DET
1v53jw84256	5	29	top	top	ADJ
1v53jw84256	5	30	two	two	NUM
1v53jw84256	5	31	carbon	carbon	NOUN
1v53jw84256	5	32	atoms	atom	NOUN
1v53jw84256	5	33	within	within	ADP
1v53jw84256	5	34	the	the	DET
1v53jw84256	5	35	sam	sam	PROPN
1v53jw84256	5	36	layer	layer	NOUN
1v53jw84256	5	37	.	.	PUNCT
1v53jw84256	6	1	in	in	ADP
1v53jw84256	6	2	addition	addition	NOUN
1v53jw84256	6	3	,	,	PUNCT
1v53jw84256	6	4	scanning	scan	VERB
1v53jw84256	6	5	tunneling	tunneling	NOUN
1v53jw84256	6	6	microscopy	microscopy	NOUN
1v53jw84256	6	7	(	(	PUNCT
1v53jw84256	6	8	stm	stm	NOUN
1v53jw84256	6	9	)	)	PUNCT
1v53jw84256	6	10	images	image	NOUN
1v53jw84256	6	11	of	of	ADP
1v53jw84256	6	12	the	the	DET
1v53jw84256	6	13	irradiated	irradiate	VERB
1v53jw84256	6	14	sam	sam	PROPN
1v53jw84256	6	15	layer	layer	NOUN
1v53jw84256	6	16	reveal	reveal	VERB
1v53jw84256	6	17	that	that	SCONJ
1v53jw84256	6	18	5	5	NUM
1v53jw84256	6	19	-	-	PUNCT
1v53jw84256	6	20	ev	ev	NOUN
1v53jw84256	6	21	o+	o+	SCONJ
1v53jw84256	6	22	ions	ion	NOUN
1v53jw84256	6	23	attack	attack	VERB
1v53jw84256	6	24	the	the	DET
1v53jw84256	6	25	film	film	NOUN
1v53jw84256	6	26	predominantly	predominantly	ADV
1v53jw84256	6	27	near	near	ADP
1v53jw84256	6	28	domain	domain	NOUN
1v53jw84256	6	29	boundaries	boundary	NOUN
1v53jw84256	6	30	.	.	PUNCT
1v53jw84256	7	1	in	in	ADP
1v53jw84256	7	2	contrast	contrast	NOUN
1v53jw84256	7	3	,	,	PUNCT
1v53jw84256	7	4	large	large	ADJ
1v53jw84256	7	5	defect	defect	NOUN
1v53jw84256	7	6	-	-	PUNCT
1v53jw84256	7	7	free	free	ADJ
1v53jw84256	7	8	surface	surface	NOUN
1v53jw84256	7	9	domains	domain	NOUN
1v53jw84256	7	10	show	show	VERB
1v53jw84256	7	11	considerable	considerable	ADJ
1v53jw84256	7	12	stability	stability	NOUN
1v53jw84256	7	13	against	against	ADP
1v53jw84256	7	14	5	5	NUM
1v53jw84256	7	15	-	-	PUNCT
1v53jw84256	7	16	ev	ev	ADJ
1v53jw84256	7	17	o+	o+	NOUN
1v53jw84256	7	18	bombardment	bombardment	NOUN
1v53jw84256	7	19	.	.	PUNCT
1v53jw84256	8	1	the	the	DET
1v53jw84256	8	2	reaction	reaction	NOUN
1v53jw84256	8	3	dynamics	dynamic	NOUN
1v53jw84256	8	4	of	of	ADP
1v53jw84256	8	5	hyperthermal	hyperthermal	ADJ
1v53jw84256	8	6	o2	o2	PROPN
1v53jw84256	8	7	+	+	NOUN
1v53jw84256	8	8	with	with	ADP
1v53jw84256	8	9	a	a	DET
1v53jw84256	8	10	siox	siox	PROPN
1v53jw84256	8	11	/	/	SYM
1v53jw84256	8	12	si(001	si(001	PROPN
1v53jw84256	8	13	)	)	PUNCT
1v53jw84256	8	14	thin	thin	ADJ
1v53jw84256	8	15	film	film	NOUN
1v53jw84256	8	16	is	be	AUX
1v53jw84256	8	17	also	also	ADV
1v53jw84256	8	18	studied	study	VERB
1v53jw84256	8	19	.	.	PUNCT
1v53jw84256	9	1	isotopic	isotopic	ADJ
1v53jw84256	9	2	labeling	labeling	NOUN
1v53jw84256	9	3	helps	help	VERB
1v53jw84256	9	4	to	to	PART
1v53jw84256	9	5	identify	identify	VERB
1v53jw84256	9	6	the	the	DET
1v53jw84256	9	7	mechanisms	mechanism	NOUN
1v53jw84256	9	8	leading	lead	VERB
1v53jw84256	9	9	to	to	ADP
1v53jw84256	9	10	the	the	DET
1v53jw84256	9	11	anionic	anionic	ADJ
1v53jw84256	9	12	reaction	reaction	NOUN
1v53jw84256	9	13	channels	channel	NOUN
1v53jw84256	9	14	.	.	PUNCT
1v53jw84256	10	1	o&ndash	o&ndash	NOUN
1v53jw84256	10	2	;	;	PUNCT
1v53jw84256	10	3	signals	signal	NOUN
1v53jw84256	10	4	are	be	AUX
1v53jw84256	10	5	composed	compose	VERB
1v53jw84256	10	6	of	of	ADP
1v53jw84256	10	7	dissociative	dissociative	ADJ
1v53jw84256	10	8	scattering	scattering	NOUN
1v53jw84256	10	9	and	and	CCONJ
1v53jw84256	10	10	sputtering	sputtering	ADJ
1v53jw84256	10	11	products	product	NOUN
1v53jw84256	10	12	,	,	PUNCT
1v53jw84256	10	13	whereas	whereas	SCONJ
1v53jw84256	10	14	o2&ndash	o2&ndash	NOUN
1v53jw84256	10	15	;	;	PUNCT
1v53jw84256	10	16	signals	signal	NOUN
1v53jw84256	10	17	arise	arise	VERB
1v53jw84256	10	18	from	from	ADP
1v53jw84256	10	19	nonreactive	nonreactive	ADJ
1v53jw84256	10	20	scattering	scattering	NOUN
1v53jw84256	10	21	,	,	PUNCT
1v53jw84256	10	22	recoil	recoil	NOUN
1v53jw84256	10	23	abstraction	abstraction	NOUN
1v53jw84256	10	24	and	and	CCONJ
1v53jw84256	10	25	symmetric	symmetric	ADJ
1v53jw84256	10	26	substitution	substitution	NOUN
1v53jw84256	10	27	channels	channel	NOUN
1v53jw84256	10	28	.	.	PUNCT
1v53jw84256	11	1	the	the	DET
1v53jw84256	11	2	complex	complex	ADJ
1v53jw84256	11	3	dynamics	dynamic	NOUN
1v53jw84256	11	4	associated	associate	VERB
1v53jw84256	11	5	with	with	ADP
1v53jw84256	11	6	ion	ion	NOUN
1v53jw84256	11	7	-	-	PUNCT
1v53jw84256	11	8	beam	beam	NOUN
1v53jw84256	11	9	oxidation	oxidation	NOUN
1v53jw84256	11	10	of	of	ADP
1v53jw84256	11	11	si(001	si(001	NOUN
1v53jw84256	11	12	)	)	PUNCT
1v53jw84256	11	13	by	by	ADP
1v53jw84256	11	14	5	5	NUM
1v53jw84256	11	15	-	-	SYM
1v53jw84256	11	16	120	120	NUM
1v53jw84256	11	17	ev	ev	NOUN
1v53jw84256	11	18	o+	o+	NOUN
1v53jw84256	11	19	and	and	CCONJ
1v53jw84256	11	20	o2	o2	PROPN
1v53jw84256	11	21	+	+	NOUN
1v53jw84256	11	22	are	be	AUX
1v53jw84256	11	23	discussed	discuss	VERB
1v53jw84256	11	24	.	.	PUNCT
1v53jw84256	12	1	the	the	DET
1v53jw84256	12	2	cross	cross	PROPN
1v53jw84256	12	3	section	section	NOUN
1v53jw84256	12	4	for	for	ADP
1v53jw84256	12	5	oxygen	oxygen	NOUN
1v53jw84256	12	6	incorporation	incorporation	NOUN
1v53jw84256	12	7	is	be	AUX
1v53jw84256	12	8	found	find	VERB
1v53jw84256	12	9	to	to	PART
1v53jw84256	12	10	depend	depend	VERB
1v53jw84256	12	11	strongly	strongly	ADV
1v53jw84256	12	12	on	on	ADP
1v53jw84256	12	13	the	the	DET
1v53jw84256	12	14	conditions	condition	NOUN
1v53jw84256	12	15	under	under	ADP
1v53jw84256	12	16	which	which	PRON
1v53jw84256	12	17	the	the	DET
1v53jw84256	12	18	underlying	underlie	VERB
1v53jw84256	12	19	oxide	oxide	NOUN
1v53jw84256	12	20	layer	layer	NOUN
1v53jw84256	12	21	was	be	AUX
1v53jw84256	12	22	grown	grow	VERB
1v53jw84256	12	23	;	;	PUNCT
1v53jw84256	12	24	the	the	DET
1v53jw84256	12	25	kinetic	kinetic	ADJ
1v53jw84256	12	26	energy	energy	NOUN
1v53jw84256	12	27	of	of	ADP
1v53jw84256	12	28	the	the	DET
1v53jw84256	12	29	incorporating	incorporate	VERB
1v53jw84256	12	30	ion	ion	NOUN
1v53jw84256	12	31	;	;	PUNCT
1v53jw84256	12	32	and	and	CCONJ
1v53jw84256	12	33	whether	whether	SCONJ
1v53jw84256	12	34	the	the	DET
1v53jw84256	12	35	incident	incident	NOUN
1v53jw84256	12	36	ion	ion	NOUN
1v53jw84256	12	37	is	be	AUX
1v53jw84256	12	38	atomic	atomic	ADJ
1v53jw84256	12	39	or	or	CCONJ
1v53jw84256	12	40	molecular	molecular	ADJ
1v53jw84256	12	41	oxygen	oxygen	NOUN
1v53jw84256	12	42	.	.	PUNCT