id	sid	tid	token	lemma	pos
1544bp01s71	1	1	as	as	SCONJ
1544bp01s71	1	2	miniaturization	miniaturization	NOUN
1544bp01s71	1	3	of	of	ADP
1544bp01s71	1	4	electronic	electronic	ADJ
1544bp01s71	1	5	components	component	NOUN
1544bp01s71	1	6	continues	continue	VERB
1544bp01s71	1	7	,	,	PUNCT
1544bp01s71	1	8	creative	creative	ADJ
1544bp01s71	1	9	solutions	solution	NOUN
1544bp01s71	1	10	for	for	ADP
1544bp01s71	1	11	common	common	ADJ
1544bp01s71	1	12	manufacturing	manufacturing	NOUN
1544bp01s71	1	13	problems	problem	NOUN
1544bp01s71	1	14	are	be	AUX
1544bp01s71	1	15	required	require	VERB
1544bp01s71	1	16	to	to	PART
1544bp01s71	1	17	continue	continue	VERB
1544bp01s71	1	18	the	the	DET
1544bp01s71	1	19	trend	trend	NOUN
1544bp01s71	1	20	of	of	ADP
1544bp01s71	1	21	"	"	PUNCT
1544bp01s71	1	22	moore	moore	NOUN
1544bp01s71	1	23	's	's	PART
1544bp01s71	1	24	law	law	NOUN
1544bp01s71	1	25	.	.	PUNCT
1544bp01s71	1	26	"	"	PUNCT
1544bp01s71	2	1	mask	mask	NOUN
1544bp01s71	2	2	alignment	alignment	NOUN
1544bp01s71	2	3	for	for	ADP
1544bp01s71	2	4	dopant	dopant	ADJ
1544bp01s71	2	5	patterning	patterning	NOUN
1544bp01s71	2	6	is	be	AUX
1544bp01s71	2	7	one	one	NUM
1544bp01s71	2	8	major	major	ADJ
1544bp01s71	2	9	set	set	NOUN
1544bp01s71	2	10	-	-	PUNCT
1544bp01s71	2	11	back	back	NOUN
1544bp01s71	2	12	as	as	SCONJ
1544bp01s71	2	13	nanoscale	nanoscale	PROPN
1544bp01s71	2	14	development	development	NOUN
1544bp01s71	2	15	continues	continue	VERB
1544bp01s71	2	16	.	.	PUNCT
1544bp01s71	3	1	my	my	PRON
1544bp01s71	3	2	thesis	thesis	NOUN
1544bp01s71	3	3	research	research	NOUN
1544bp01s71	3	4	investigates	investigate	VERB
1544bp01s71	3	5	the	the	DET
1544bp01s71	3	6	use	use	NOUN
1544bp01s71	3	7	of	of	ADP
1544bp01s71	3	8	dna	dna	PROPN
1544bp01s71	3	9	origami	origami	PROPN
1544bp01s71	3	10	,	,	PUNCT
1544bp01s71	3	11	a	a	DET
1544bp01s71	3	12	designable	designable	ADJ
1544bp01s71	3	13	,	,	PUNCT
1544bp01s71	3	14	self	self	NOUN
1544bp01s71	3	15	-	-	PUNCT
1544bp01s71	3	16	assembled	assemble	VERB
1544bp01s71	3	17	nanostructure	nanostructure	NOUN
1544bp01s71	3	18	,	,	PUNCT
1544bp01s71	3	19	as	as	ADP
1544bp01s71	3	20	a	a	DET
1544bp01s71	3	21	chemical	chemical	ADJ
1544bp01s71	3	22	and	and	CCONJ
1544bp01s71	3	23	dopant	dopant	ADJ
1544bp01s71	3	24	source	source	NOUN
1544bp01s71	3	25	for	for	ADP
1544bp01s71	3	26	patterning	pattern	VERB
1544bp01s71	3	27	silicon	silicon	NOUN
1544bp01s71	3	28	substrates	substrate	NOUN
1544bp01s71	3	29	.	.	PUNCT
1544bp01s71	4	1	my	my	PRON
1544bp01s71	4	2	work	work	NOUN
1544bp01s71	4	3	explores	explore	VERB
1544bp01s71	4	4	the	the	DET
1544bp01s71	4	5	stability	stability	NOUN
1544bp01s71	4	6	of	of	ADP
1544bp01s71	4	7	dna	dna	PROPN
1544bp01s71	4	8	origami	origami	NOUN
1544bp01s71	4	9	when	when	SCONJ
1544bp01s71	4	10	exposed	expose	VERB
1544bp01s71	4	11	to	to	ADP
1544bp01s71	4	12	extreme	extreme	ADJ
1544bp01s71	4	13	thermal	thermal	ADJ
1544bp01s71	4	14	and	and	CCONJ
1544bp01s71	4	15	solvent	solvent	NOUN
1544bp01s71	4	16	environments	environment	NOUN
1544bp01s71	4	17	and	and	CCONJ
1544bp01s71	4	18	identifies	identify	VERB
1544bp01s71	4	19	the	the	DET
1544bp01s71	4	20	limitations	limitation	NOUN
1544bp01s71	4	21	of	of	ADP
1544bp01s71	4	22	using	use	VERB
1544bp01s71	4	23	these	these	DET
1544bp01s71	4	24	biomolecules	biomolecule	NOUN
1544bp01s71	4	25	in	in	ADP
1544bp01s71	4	26	multistep	multistep	ADJ
1544bp01s71	4	27	nanofabrication	nanofabrication	NOUN
1544bp01s71	4	28	processes	process	NOUN
1544bp01s71	4	29	,	,	PUNCT
1544bp01s71	4	30	particularly	particularly	ADV
1544bp01s71	4	31	the	the	DET
1544bp01s71	4	32	effect	effect	NOUN
1544bp01s71	4	33	on	on	ADP
1544bp01s71	4	34	dna	dna	PROPN
1544bp01s71	4	35	origami	origami	PROPN
1544bp01s71	4	36	functionalizability	functionalizability	PROPN
1544bp01s71	4	37	.	.	PUNCT
1544bp01s71	5	1	utilizing	utilize	VERB
1544bp01s71	5	2	this	this	DET
1544bp01s71	5	3	new	new	ADJ
1544bp01s71	5	4	understanding	understanding	NOUN
1544bp01s71	5	5	of	of	ADP
1544bp01s71	5	6	dna	dna	PROPN
1544bp01s71	5	7	origami	origami	NOUN
1544bp01s71	5	8	,	,	PUNCT
1544bp01s71	5	9	i	i	PRON
1544bp01s71	5	10	developed	develop	VERB
1544bp01s71	5	11	a	a	DET
1544bp01s71	5	12	process	process	NOUN
1544bp01s71	5	13	called	call	VERB
1544bp01s71	5	14	"	"	PUNCT
1544bp01s71	5	15	burn	burn	VERB
1544bp01s71	5	16	-	-	PUNCT
1544bp01s71	5	17	in	in	ADP
1544bp01s71	5	18	"	"	PUNCT
1544bp01s71	5	19	to	to	PART
1544bp01s71	5	20	complete	complete	VERB
1544bp01s71	5	21	maskless	maskless	NOUN
1544bp01s71	5	22	patterning	patterning	NOUN
1544bp01s71	5	23	of	of	ADP
1544bp01s71	5	24	embedded	embed	VERB
1544bp01s71	5	25	silicon	silicon	NOUN
1544bp01s71	5	26	carbide	carbide	NOUN
1544bp01s71	5	27	(	(	PUNCT
1544bp01s71	5	28	sic	sic	NOUN
1544bp01s71	5	29	)	)	PUNCT
1544bp01s71	5	30	"	"	PUNCT
1544bp01s71	5	31	replicas	replicas	PROPN
1544bp01s71	5	32	"	"	PUNCT
1544bp01s71	5	33	on	on	ADP
1544bp01s71	5	34	silicon	silicon	NOUN
1544bp01s71	5	35	substrates	substrate	NOUN
1544bp01s71	5	36	.	.	PUNCT
1544bp01s71	6	1	my	my	PRON
1544bp01s71	6	2	work	work	NOUN
1544bp01s71	6	3	details	detail	VERB
1544bp01s71	6	4	the	the	DET
1544bp01s71	6	5	chemical	chemical	ADJ
1544bp01s71	6	6	and	and	CCONJ
1544bp01s71	6	7	electrical	electrical	ADJ
1544bp01s71	6	8	characterization	characterization	NOUN
1544bp01s71	6	9	of	of	ADP
1544bp01s71	6	10	the	the	DET
1544bp01s71	6	11	sic	sic	ADJ
1544bp01s71	6	12	patterns	pattern	NOUN
1544bp01s71	6	13	using	use	VERB
1544bp01s71	6	14	a	a	DET
1544bp01s71	6	15	myriad	myriad	NOUN
1544bp01s71	6	16	of	of	ADP
1544bp01s71	6	17	techniques	technique	NOUN
1544bp01s71	6	18	.	.	PUNCT
1544bp01s71	7	1	i	i	PRON
1544bp01s71	7	2	focus	focus	VERB
1544bp01s71	7	3	primarily	primarily	ADV
1544bp01s71	7	4	on	on	ADP
1544bp01s71	7	5	scanning	scan	VERB
1544bp01s71	7	6	probe	probe	NOUN
1544bp01s71	7	7	microscopy	microscopy	NOUN
1544bp01s71	7	8	and	and	CCONJ
1544bp01s71	7	9	x	x	NOUN
1544bp01s71	7	10	-	-	NOUN
1544bp01s71	7	11	ray	ray	NOUN
1544bp01s71	7	12	photoelectron	photoelectron	NOUN
1544bp01s71	7	13	microscopy	microscopy	PROPN
1544bp01s71	7	14	.	.	PUNCT
1544bp01s71	8	1	secondary	secondary	ADJ
1544bp01s71	8	2	ion	ion	NOUN
1544bp01s71	8	3	mass	mass	NOUN
1544bp01s71	8	4	spectrometry	spectrometry	NOUN
1544bp01s71	8	5	is	be	AUX
1544bp01s71	8	6	used	use	VERB
1544bp01s71	8	7	to	to	PART
1544bp01s71	8	8	detect	detect	VERB
1544bp01s71	8	9	and	and	CCONJ
1544bp01s71	8	10	measure	measure	VERB
1544bp01s71	8	11	depth	depth	NOUN
1544bp01s71	8	12	profiles	profile	NOUN
1544bp01s71	8	13	of	of	ADP
1544bp01s71	8	14	phosphorus	phosphorus	NOUN
1544bp01s71	8	15	from	from	ADP
1544bp01s71	8	16	the	the	DET
1544bp01s71	8	17	dna	dna	PROPN
1544bp01s71	8	18	origami	origami	NOUN
1544bp01s71	8	19	after	after	ADP
1544bp01s71	8	20	burn	burn	NOUN
1544bp01s71	8	21	-	-	PUNCT
1544bp01s71	8	22	in	in	ADP
1544bp01s71	8	23	and	and	CCONJ
1544bp01s71	8	24	illustrates	illustrate	VERB
1544bp01s71	8	25	the	the	DET
1544bp01s71	8	26	doping	dope	VERB
1544bp01s71	8	27	capacity	capacity	NOUN
1544bp01s71	8	28	of	of	ADP
1544bp01s71	8	29	the	the	DET
1544bp01s71	8	30	burn	burn	VERB
1544bp01s71	8	31	-	-	PUNCT
1544bp01s71	8	32	in	in	ADP
1544bp01s71	8	33	process	process	NOUN
1544bp01s71	8	34	.	.	PUNCT
1544bp01s71	9	1	finally	finally	ADV
1544bp01s71	9	2	,	,	PUNCT
1544bp01s71	9	3	i	i	PRON
1544bp01s71	9	4	illustrate	illustrate	VERB
1544bp01s71	9	5	the	the	DET
1544bp01s71	9	6	broad	broad	ADJ
1544bp01s71	9	7	application	application	NOUN
1544bp01s71	9	8	of	of	ADP
1544bp01s71	9	9	the	the	DET
1544bp01s71	9	10	burn	burn	VERB
1544bp01s71	9	11	-	-	PUNCT
1544bp01s71	9	12	in	in	ADP
1544bp01s71	9	13	process	process	NOUN
1544bp01s71	9	14	by	by	ADP
1544bp01s71	9	15	using	use	VERB
1544bp01s71	9	16	other	other	ADJ
1544bp01s71	9	17	shape	shape	NOUN
1544bp01s71	9	18	,	,	PUNCT
1544bp01s71	9	19	size	size	NOUN
1544bp01s71	9	20	,	,	PUNCT
1544bp01s71	9	21	and	and	CCONJ
1544bp01s71	9	22	chemically	chemically	ADV
1544bp01s71	9	23	controlled	control	VERB
1544bp01s71	9	24	nanomaterials	nanomaterial	NOUN
1544bp01s71	9	25	for	for	ADP
1544bp01s71	9	26	maskless	maskless	NOUN
1544bp01s71	9	27	patterning	patterning	NOUN
1544bp01s71	9	28	of	of	ADP
1544bp01s71	9	29	dopants	dopant	NOUN
1544bp01s71	9	30	.	.	PUNCT
1544bp01s71	10	1	it	it	PRON
1544bp01s71	10	2	is	be	AUX
1544bp01s71	10	3	my	my	PRON
1544bp01s71	10	4	hope	hope	NOUN
1544bp01s71	10	5	that	that	SCONJ
1544bp01s71	10	6	this	this	DET
1544bp01s71	10	7	work	work	NOUN
1544bp01s71	10	8	will	will	AUX
1544bp01s71	10	9	expand	expand	VERB
1544bp01s71	10	10	the	the	DET
1544bp01s71	10	11	use	use	NOUN
1544bp01s71	10	12	of	of	ADP
1544bp01s71	10	13	dna	dna	PROPN
1544bp01s71	10	14	origami	origami	NOUN
1544bp01s71	10	15	and	and	CCONJ
1544bp01s71	10	16	other	other	ADJ
1544bp01s71	10	17	traditionally	traditionally	ADV
1544bp01s71	10	18	"	"	PUNCT
1544bp01s71	10	19	fragile	fragile	ADJ
1544bp01s71	10	20	"	"	PUNCT
1544bp01s71	10	21	materials	material	NOUN
1544bp01s71	10	22	in	in	ADP
1544bp01s71	10	23	unique	unique	ADJ
1544bp01s71	10	24	processing	processing	NOUN
1544bp01s71	10	25	environments	environment	NOUN
1544bp01s71	10	26	and	and	CCONJ
1544bp01s71	10	27	prompt	prompt	VERB
1544bp01s71	10	28	the	the	DET
1544bp01s71	10	29	exploration	exploration	NOUN
1544bp01s71	10	30	of	of	ADP
1544bp01s71	10	31	novel	novel	ADJ
1544bp01s71	10	32	nanomaterials	nanomaterial	NOUN
1544bp01s71	10	33	as	as	ADP
1544bp01s71	10	34	creative	creative	ADJ
1544bp01s71	10	35	solutions	solution	NOUN
1544bp01s71	10	36	for	for	ADP
1544bp01s71	10	37	nanoelectronic	nanoelectronic	PROPN
1544bp01s71	10	38	development	development	PROPN
1544bp01s71	10	39	applications	application	NOUN
1544bp01s71	10	40	.	.	PUNCT