id author title date pages extension mime words sentence flesch summary cache txt vm40xp71306 Jialin Zhao Engineering of Silicon and Germanium Tunnel Diodes for Integrated Circuit Application 2008 .txt text/plain 290 15 50 To the author's knowledge, these accomplishments are the first demonstration of lateral Si tunnel diodes using spin-on diffusants and rapid thermal processing. A self-aligned lateral fabrication process, which forms the junction perpendicular to the substrate plane, has also been successfully developed and yielded backward Si tunnel diodes with peak current densities of 30 nA/ÌÂm2. cache/vm40xp71306.txt txt/vm40xp71306.txt