id author title date pages extension mime words sentence flesch summary cache txt mw22v40828m Faiza Afroz Faria MBE Growth of GaN Heterostructures for High Performance HEMTs 2015 .txt text/plain 370 18 52 Additionally, we investigated crystalline AlN growth at a low temperature of ~ 480 °C. This was motivated by novel MBE grown AlN barrier HEMT structures with high mobility InGaN channels for Terahertz applications. To fully exploit the potential of MBE grown high quality HEMT structures, low resistance (< 0.1 Ω.mm) regrown source/drain ohmic contacts are essential. cache/mw22v40828m.txt txt/mw22v40828m.txt