id author title date pages extension mime words sentence flesch summary cache txt kd17cr58x8g Bin Wu InAs-on-SOI MOSFETs with Extreme Lattice Mismatch 2009 .txt text/plain 275 11 59 MOCVD growth of InAs also generates single grain structures on Si islands when the size is reduced to 100 ÌÄ' 100 nm2. Post-growth pattern-then-anneal process, in which MOCVD InAs is deposited onto unpatterned SOI followed with patterning and annealing of InAs-on-Si structure, is found to change the relative lattice parameters of encapsulated 17/5 nm InAs/Si island. cache/kd17cr58x8g.txt txt/kd17cr58x8g.txt