id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
2j62s467069	Nathaniel Charles Crain	Redesign and Refurbishment of a III-V Compound Semiconductor Wet Oxidation System	2004		.txt	text/plain	46	2	32	Improvements to the various subsystems are described in detail followed by processing techniques and concluded with a set of standard oxidations. The III-V compound semiconductoir wet oxidation system for the Nanofabrication Laboratory at the University of Notre Dame has undergone an extensive redesign and rebuild.	cache/2j62s467069.txt	txt/2j62s467069.txt