id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
2801pg1765v	Heng Yang	Design and Fabrication of a Tunable Fabry-Perot Interferometer/Photodiode Microspectral Image Sensor	2007		.txt	text/plain	261	12	49	The result showed that for an FPI with 2.94 µ m original effective cavity length, 10 V of applied bias voltage can tune the FPI over a 0.4 µ m change in effective cavity length. The design and fabrication of a tunable Fabry-Perot interferometer (FPI) åÁV photodiode (PD) spectral image sensor using a complementary metal oxide semiconductor (CMOS) compatible process on silicon is reported in the present work.	cache/2801pg1765v.txt	txt/2801pg1765v.txt