id author title date pages extension mime words sentence flesch summary cache txt 12579s17t28 Christopher Stockdon Seibert High-Index-Contrast AlGaAs Waveguide Scattering Loss Reduction via Oxidation Smoothing of Sidewall Roughness 2010 .txt text/plain 223 7 39 Through optimized processing to reduce the initial sidewall roughness before oxidation, further loss reductions should be achievable for HIC structures, as well as possible loss reduction in more conventional low-index-contrast structures commonly used in many photonic devices Traditionally, the drawback of such HIC devices is their greater susceptibility to scattering losses from etch-induced sidewall roughness (s) and the greater index step (dn), losses which scale with at least s2 and dn2. cache/12579s17t28.txt txt/12579s17t28.txt