id	sid	tid	token	lemma	pos
en-wikipedia-org-2559	1	1	Multi	multi	JJ
en-wikipedia-org-2559	1	2	-	-	JJ
en-wikipedia-org-2559	1	3	project	project	JJ
en-wikipedia-org-2559	1	4	wafer	wafer	NN
en-wikipedia-org-2559	1	5	service	service	NN
en-wikipedia-org-2559	1	6	-	-	HYPH
en-wikipedia-org-2559	1	7	Wikipedia	Wikipedia	NNP
en-wikipedia-org-2559	1	8	Multi	multi	JJ
en-wikipedia-org-2559	1	9	-	-	HYPH
en-wikipedia-org-2559	1	10	project	project	JJ
en-wikipedia-org-2559	1	11	wafer	wafer	NN
en-wikipedia-org-2559	1	12	service	service	NN
en-wikipedia-org-2559	1	13	From	from	IN
en-wikipedia-org-2559	1	14	Wikipedia	Wikipedia	NNP
en-wikipedia-org-2559	1	15	,	,	,
en-wikipedia-org-2559	1	16	the	the	DT
en-wikipedia-org-2559	1	17	free	free	JJ
en-wikipedia-org-2559	1	18	encyclopedia	encyclopedia	NN
en-wikipedia-org-2559	1	19	Jump	Jump	NNP
en-wikipedia-org-2559	1	20	to	to	IN
en-wikipedia-org-2559	1	21	navigation	navigation	NN
en-wikipedia-org-2559	1	22	Jump	Jump	NNP
en-wikipedia-org-2559	1	23	to	to	TO
en-wikipedia-org-2559	1	24	search	search	VB
en-wikipedia-org-2559	1	25	Multi	multi	JJ
en-wikipedia-org-2559	1	26	-	-	JJ
en-wikipedia-org-2559	1	27	project	project	JJ
en-wikipedia-org-2559	1	28	chip	chip	NN
en-wikipedia-org-2559	1	29	(	(	-LRB-
en-wikipedia-org-2559	1	30	MPC	MPC	NNP
en-wikipedia-org-2559	1	31	)	)	-RRB-
en-wikipedia-org-2559	1	32	,	,	,
en-wikipedia-org-2559	1	33	also	also	RB
en-wikipedia-org-2559	1	34	known	know	VBN
en-wikipedia-org-2559	1	35	as	as	IN
en-wikipedia-org-2559	1	36	multi	multi	JJ
en-wikipedia-org-2559	1	37	-	-	JJ
en-wikipedia-org-2559	1	38	project	project	JJ
en-wikipedia-org-2559	1	39	wafer	wafer	NN
en-wikipedia-org-2559	1	40	(	(	-LRB-
en-wikipedia-org-2559	1	41	MPW	MPW	NNP
en-wikipedia-org-2559	1	42	)	)	-RRB-
en-wikipedia-org-2559	1	43	,	,	,
en-wikipedia-org-2559	1	44	services	service	NNS
en-wikipedia-org-2559	1	45	integrate	integrate	VBP
en-wikipedia-org-2559	1	46	onto	onto	IN
en-wikipedia-org-2559	1	47	microelectronics	microelectronic	NNS
en-wikipedia-org-2559	1	48	wafers	wafer	NNS
en-wikipedia-org-2559	1	49	a	a	DT
en-wikipedia-org-2559	1	50	number	number	NN
en-wikipedia-org-2559	1	51	of	of	IN
en-wikipedia-org-2559	1	52	different	different	JJ
en-wikipedia-org-2559	1	53	integrated	integrated	JJ
en-wikipedia-org-2559	1	54	circuit	circuit	NN
en-wikipedia-org-2559	1	55	designs	design	NNS
en-wikipedia-org-2559	1	56	from	from	IN
en-wikipedia-org-2559	1	57	various	various	JJ
en-wikipedia-org-2559	1	58	teams	team	NNS
en-wikipedia-org-2559	1	59	including	include	VBG
en-wikipedia-org-2559	1	60	designs	design	NNS
en-wikipedia-org-2559	1	61	from	from	IN
en-wikipedia-org-2559	1	62	private	private	JJ
en-wikipedia-org-2559	1	63	firms	firm	NNS
en-wikipedia-org-2559	1	64	,	,	,
en-wikipedia-org-2559	1	65	students	student	NNS
en-wikipedia-org-2559	1	66	and	and	CC
en-wikipedia-org-2559	1	67	researchers	researcher	NNS
en-wikipedia-org-2559	1	68	from	from	IN
en-wikipedia-org-2559	1	69	universities	university	NNS
en-wikipedia-org-2559	1	70	.	.	.
en-wikipedia-org-2559	2	1	Because	because	IN
en-wikipedia-org-2559	2	2	IC	IC	NNP
en-wikipedia-org-2559	2	3	fabrication	fabrication	NN
en-wikipedia-org-2559	2	4	costs	cost	NNS
en-wikipedia-org-2559	2	5	are	be	VBP
en-wikipedia-org-2559	2	6	extremely	extremely	RB
en-wikipedia-org-2559	2	7	high	high	JJ
en-wikipedia-org-2559	2	8	,	,	,
en-wikipedia-org-2559	2	9	it	-PRON-	PRP
en-wikipedia-org-2559	2	10	makes	make	VBZ
en-wikipedia-org-2559	2	11	sense	sense	NN
en-wikipedia-org-2559	2	12	to	to	TO
en-wikipedia-org-2559	2	13	share	share	VB
en-wikipedia-org-2559	2	14	mask	mask	NN
en-wikipedia-org-2559	2	15	and	and	CC
en-wikipedia-org-2559	2	16	wafer	wafer	VB
en-wikipedia-org-2559	2	17	resources	resource	NNS
en-wikipedia-org-2559	2	18	to	to	TO
en-wikipedia-org-2559	2	19	produce	produce	VB
en-wikipedia-org-2559	2	20	designs	design	NNS
en-wikipedia-org-2559	2	21	in	in	IN
en-wikipedia-org-2559	2	22	low	low	JJ
en-wikipedia-org-2559	2	23	quantities	quantity	NNS
en-wikipedia-org-2559	2	24	.	.	.
en-wikipedia-org-2559	3	1	Worldwide	worldwide	RB
en-wikipedia-org-2559	3	2	,	,	,
en-wikipedia-org-2559	3	3	several	several	JJ
en-wikipedia-org-2559	3	4	MPW	MPW	NNP
en-wikipedia-org-2559	3	5	services	service	NNS
en-wikipedia-org-2559	3	6	are	be	VBP
en-wikipedia-org-2559	3	7	available	available	JJ
en-wikipedia-org-2559	3	8	from	from	IN
en-wikipedia-org-2559	3	9	government	government	NN
en-wikipedia-org-2559	3	10	-	-	HYPH
en-wikipedia-org-2559	3	11	supported	support	VBN
en-wikipedia-org-2559	3	12	institutions	institution	NNS
en-wikipedia-org-2559	3	13	or	or	CC
en-wikipedia-org-2559	3	14	from	from	IN
en-wikipedia-org-2559	3	15	private	private	JJ
en-wikipedia-org-2559	3	16	firms	firm	NNS
en-wikipedia-org-2559	3	17	including	include	VBG
en-wikipedia-org-2559	3	18	Canadian	Canadian	NNP
en-wikipedia-org-2559	3	19	Microelectronics	Microelectronics	NNPS
en-wikipedia-org-2559	3	20	Corporation	Corporation	NNP
en-wikipedia-org-2559	3	21	(	(	-LRB-
en-wikipedia-org-2559	3	22	CMC),[1	CMC),[1	NNP
en-wikipedia-org-2559	3	23	]	]	-RRB-
en-wikipedia-org-2559	3	24	MOSIS,[2	MOSIS,[2	NNP
en-wikipedia-org-2559	3	25	]	]	-RRB-
en-wikipedia-org-2559	3	26	CMP,[3	CMP,[3	NNP
en-wikipedia-org-2559	3	27	]	]	-RRB-
en-wikipedia-org-2559	3	28	Europractice,[4	Europractice,[4	NNP
en-wikipedia-org-2559	3	29	]	]	-RRB-
en-wikipedia-org-2559	3	30	eSilicon,[5	eSilicon,[5	NNP
en-wikipedia-org-2559	3	31	]	]	-RRB-
en-wikipedia-org-2559	3	32	,	,	,
en-wikipedia-org-2559	3	33	WaferCatalyst[6	WaferCatalyst[6	NNP
en-wikipedia-org-2559	3	34	]	]	-RRB-
en-wikipedia-org-2559	3	35	,	,	,
en-wikipedia-org-2559	3	36	and	and	CC
en-wikipedia-org-2559	3	37	Muse	Muse	NNP
en-wikipedia-org-2559	3	38	Semiconductor	Semiconductor	NNP
en-wikipedia-org-2559	3	39	[	[	-LRB-
en-wikipedia-org-2559	3	40	7	7	CD
en-wikipedia-org-2559	3	41	]	]	-RRB-
en-wikipedia-org-2559	3	42	.	.	.
en-wikipedia-org-2559	4	1	The	the	DT
en-wikipedia-org-2559	4	2	first	first	JJ
en-wikipedia-org-2559	4	3	well	well	RB
en-wikipedia-org-2559	4	4	known	know	VBN
en-wikipedia-org-2559	4	5	MPW	MPW	NNP
en-wikipedia-org-2559	4	6	service	service	NN
en-wikipedia-org-2559	4	7	was	be	VBD
en-wikipedia-org-2559	4	8	MOSIS	MOSIS	NNP
en-wikipedia-org-2559	4	9	(	(	-LRB-
en-wikipedia-org-2559	4	10	Metal	Metal	NNP
en-wikipedia-org-2559	4	11	Oxide	Oxide	NNP
en-wikipedia-org-2559	4	12	Silicon	Silicon	NNP
en-wikipedia-org-2559	4	13	Implementation	Implementation	NNP
en-wikipedia-org-2559	4	14	Service	Service	NNP
en-wikipedia-org-2559	4	15	)	)	-RRB-
en-wikipedia-org-2559	4	16	,	,	,
en-wikipedia-org-2559	4	17	established	establish	VBN
en-wikipedia-org-2559	4	18	by	by	IN
en-wikipedia-org-2559	4	19	DARPA	DARPA	NNP
en-wikipedia-org-2559	4	20	as	as	IN
en-wikipedia-org-2559	4	21	a	a	DT
en-wikipedia-org-2559	4	22	technical	technical	JJ
en-wikipedia-org-2559	4	23	and	and	CC
en-wikipedia-org-2559	4	24	human	human	JJ
en-wikipedia-org-2559	4	25	infrastructure	infrastructure	NN
en-wikipedia-org-2559	4	26	for	for	IN
en-wikipedia-org-2559	4	27	VLSI	VLSI	NNP
en-wikipedia-org-2559	4	28	.	.	.
en-wikipedia-org-2559	5	1	MOSIS	MOSIS	NNP
en-wikipedia-org-2559	5	2	began	begin	VBD
en-wikipedia-org-2559	5	3	in	in	IN
en-wikipedia-org-2559	5	4	1981	1981	CD
en-wikipedia-org-2559	5	5	after	after	IN
en-wikipedia-org-2559	5	6	Lynn	Lynn	NNP
en-wikipedia-org-2559	5	7	Conway	Conway	NNP
en-wikipedia-org-2559	5	8	organized	organize	VBD
en-wikipedia-org-2559	5	9	the	the	DT
en-wikipedia-org-2559	5	10	first	first	JJ
en-wikipedia-org-2559	5	11	VLSI	VLSI	NNP
en-wikipedia-org-2559	5	12	System	System	NNP
en-wikipedia-org-2559	5	13	Design	Design	NNP
en-wikipedia-org-2559	5	14	Course	course	NN
en-wikipedia-org-2559	5	15	at	at	IN
en-wikipedia-org-2559	5	16	MIT	MIT	NNP
en-wikipedia-org-2559	5	17	in	in	IN
en-wikipedia-org-2559	5	18	1978	1978	CD
en-wikipedia-org-2559	5	19	.	.	.
en-wikipedia-org-2559	6	1	MOSIS	MOSIS	NNP
en-wikipedia-org-2559	6	2	primarily	primarily	RB
en-wikipedia-org-2559	6	3	services	service	VBZ
en-wikipedia-org-2559	6	4	commercial	commercial	JJ
en-wikipedia-org-2559	6	5	users	user	NNS
en-wikipedia-org-2559	6	6	now	now	RB
en-wikipedia-org-2559	6	7	but	but	CC
en-wikipedia-org-2559	6	8	continues	continue	VBZ
en-wikipedia-org-2559	6	9	to	to	TO
en-wikipedia-org-2559	6	10	serve	serve	VB
en-wikipedia-org-2559	6	11	university	university	NN
en-wikipedia-org-2559	6	12	students	student	NNS
en-wikipedia-org-2559	6	13	and	and	CC
en-wikipedia-org-2559	6	14	researchers	researcher	NNS
en-wikipedia-org-2559	6	15	.	.	.
en-wikipedia-org-2559	7	1	With	with	IN
en-wikipedia-org-2559	7	2	MOSIS	mosi	NNS
en-wikipedia-org-2559	7	3	,	,	,
en-wikipedia-org-2559	7	4	designs	design	NNS
en-wikipedia-org-2559	7	5	are	be	VBP
en-wikipedia-org-2559	7	6	submitted	submit	VBN
en-wikipedia-org-2559	7	7	for	for	IN
en-wikipedia-org-2559	7	8	fabrication	fabrication	NN
en-wikipedia-org-2559	7	9	using	use	VBG
en-wikipedia-org-2559	7	10	either	either	CC
en-wikipedia-org-2559	7	11	open	open	JJ
en-wikipedia-org-2559	7	12	(	(	-LRB-
en-wikipedia-org-2559	7	13	i.e.	i.e.	FW
en-wikipedia-org-2559	7	14	,	,	,
en-wikipedia-org-2559	7	15	non	non	JJ
en-wikipedia-org-2559	7	16	-	-	JJ
en-wikipedia-org-2559	7	17	proprietary	proprietary	JJ
en-wikipedia-org-2559	7	18	)	)	-RRB-
en-wikipedia-org-2559	7	19	VLSI	vlsi	JJ
en-wikipedia-org-2559	7	20	layout	layout	NN
en-wikipedia-org-2559	7	21	design	design	NN
en-wikipedia-org-2559	7	22	rules	rule	NNS
en-wikipedia-org-2559	7	23	or	or	CC
en-wikipedia-org-2559	7	24	vendor	vendor	NN
en-wikipedia-org-2559	7	25	proprietary	proprietary	JJ
en-wikipedia-org-2559	7	26	rules	rule	NNS
en-wikipedia-org-2559	7	27	.	.	.
en-wikipedia-org-2559	8	1	Designs	design	NNS
en-wikipedia-org-2559	8	2	are	be	VBP
en-wikipedia-org-2559	8	3	pooled	pool	VBN
en-wikipedia-org-2559	8	4	into	into	IN
en-wikipedia-org-2559	8	5	common	common	JJ
en-wikipedia-org-2559	8	6	lots	lot	NNS
en-wikipedia-org-2559	8	7	and	and	CC
en-wikipedia-org-2559	8	8	run	run	VB
en-wikipedia-org-2559	8	9	through	through	IN
en-wikipedia-org-2559	8	10	the	the	DT
en-wikipedia-org-2559	8	11	fabrication	fabrication	NN
en-wikipedia-org-2559	8	12	process	process	NN
en-wikipedia-org-2559	8	13	at	at	IN
en-wikipedia-org-2559	8	14	foundries	foundry	NNS
en-wikipedia-org-2559	8	15	.	.	.
en-wikipedia-org-2559	9	1	The	the	DT
en-wikipedia-org-2559	9	2	completed	complete	VBN
en-wikipedia-org-2559	9	3	chips	chip	NNS
en-wikipedia-org-2559	9	4	(	(	-LRB-
en-wikipedia-org-2559	9	5	packaged	package	VBN
en-wikipedia-org-2559	9	6	or	or	CC
en-wikipedia-org-2559	9	7	unpackaged	unpackaged	JJ
en-wikipedia-org-2559	9	8	)	)	-RRB-
en-wikipedia-org-2559	9	9	are	be	VBP
en-wikipedia-org-2559	9	10	returned	return	VBN
en-wikipedia-org-2559	9	11	to	to	IN
en-wikipedia-org-2559	9	12	customers	customer	NNS
en-wikipedia-org-2559	9	13	.	.	.
en-wikipedia-org-2559	10	1	BaySand	BaySand	NNP
en-wikipedia-org-2559	10	2	announced	announce	VBD
en-wikipedia-org-2559	10	3	their	-PRON-	PRP$
en-wikipedia-org-2559	10	4	ASIC	asic	NN
en-wikipedia-org-2559	10	5	MPW	MPW	NNP
en-wikipedia-org-2559	10	6	Shuttle	Shuttle	NNP
en-wikipedia-org-2559	10	7	Program	Program	NNP
en-wikipedia-org-2559	10	8	,	,	,
en-wikipedia-org-2559	10	9	named	name	VBN
en-wikipedia-org-2559	10	10	ASIC	ASIC	NNP
en-wikipedia-org-2559	10	11	UltraShuttle	UltraShuttle	NNP
en-wikipedia-org-2559	10	12	.	.	.
en-wikipedia-org-2559	11	1	[	[	-LRB-
en-wikipedia-org-2559	11	2	8	8	CD
en-wikipedia-org-2559	11	3	]	]	-RRB-
en-wikipedia-org-2559	11	4	BaySand	BaySand	NNP
en-wikipedia-org-2559	11	5	stated	state	VBD
en-wikipedia-org-2559	11	6	that	that	IN
en-wikipedia-org-2559	11	7	their	-PRON-	PRP$
en-wikipedia-org-2559	11	8	shuttle	shuttle	NN
en-wikipedia-org-2559	11	9	program	program	NN
en-wikipedia-org-2559	11	10	enables	enable	VBZ
en-wikipedia-org-2559	11	11	customer	customer	NN
en-wikipedia-org-2559	11	12	to	to	IN
en-wikipedia-org-2559	11	13	tapeout	tapeout	NN
en-wikipedia-org-2559	11	14	from	from	IN
en-wikipedia-org-2559	11	15	RTL	RTL	NNP
en-wikipedia-org-2559	11	16	and	and	CC
en-wikipedia-org-2559	11	17	BaySand	BaySand	NNP
en-wikipedia-org-2559	11	18	will	will	MD
en-wikipedia-org-2559	11	19	deliver	deliver	VB
en-wikipedia-org-2559	11	20	100	100	CD
en-wikipedia-org-2559	11	21	units	unit	NNS
en-wikipedia-org-2559	11	22	of	of	IN
en-wikipedia-org-2559	11	23	tested	test	VBN
en-wikipedia-org-2559	11	24	,	,	,
en-wikipedia-org-2559	11	25	packaged	package	VBN
en-wikipedia-org-2559	11	26	chips	chip	NNS
en-wikipedia-org-2559	11	27	within	within	IN
en-wikipedia-org-2559	11	28	8	8	CD
en-wikipedia-org-2559	11	29	weeks	week	NNS
en-wikipedia-org-2559	11	30	.	.	.
en-wikipedia-org-2559	12	1	[	[	-LRB-
en-wikipedia-org-2559	12	2	9	9	CD
en-wikipedia-org-2559	12	3	]	]	-RRB-
en-wikipedia-org-2559	12	4	Many	many	JJ
en-wikipedia-org-2559	12	5	silicon	silicon	NN
en-wikipedia-org-2559	12	6	fabrication	fabrication	NN
en-wikipedia-org-2559	12	7	facilities	facility	NNS
en-wikipedia-org-2559	12	8	offer	offer	VBP
en-wikipedia-org-2559	12	9	MPW	MPW	NNP
en-wikipedia-org-2559	12	10	runs	run	NNS
en-wikipedia-org-2559	12	11	or	or	CC
en-wikipedia-org-2559	12	12	a	a	DT
en-wikipedia-org-2559	12	13	company	company	NN
en-wikipedia-org-2559	12	14	can	can	MD
en-wikipedia-org-2559	12	15	produce	produce	VB
en-wikipedia-org-2559	12	16	its	-PRON-	PRP$
en-wikipedia-org-2559	12	17	own	own	JJ
en-wikipedia-org-2559	12	18	MPW	MPW	NNP
en-wikipedia-org-2559	12	19	,	,	,
en-wikipedia-org-2559	12	20	e.g.	e.g.	RB
en-wikipedia-org-2559	13	1	combine	combine	VB
en-wikipedia-org-2559	13	2	several	several	JJ
en-wikipedia-org-2559	13	3	of	of	IN
en-wikipedia-org-2559	13	4	its	-PRON-	PRP$
en-wikipedia-org-2559	13	5	own	own	JJ
en-wikipedia-org-2559	13	6	designs	design	NNS
en-wikipedia-org-2559	13	7	to	to	TO
en-wikipedia-org-2559	13	8	form	form	VB
en-wikipedia-org-2559	13	9	one	one	CD
en-wikipedia-org-2559	13	10	wafer	wafer	NN
en-wikipedia-org-2559	13	11	completely	completely	RB
en-wikipedia-org-2559	13	12	owned	own	VBN
en-wikipedia-org-2559	13	13	by	by	IN
en-wikipedia-org-2559	13	14	the	the	DT
en-wikipedia-org-2559	13	15	company	company	NN
en-wikipedia-org-2559	13	16	.	.	.
en-wikipedia-org-2559	14	1	In	in	IN
en-wikipedia-org-2559	14	2	the	the	DT
en-wikipedia-org-2559	14	3	latter	latter	JJ
en-wikipedia-org-2559	14	4	case	case	NN
en-wikipedia-org-2559	14	5	,	,	,
en-wikipedia-org-2559	14	6	it	-PRON-	PRP
en-wikipedia-org-2559	14	7	may	may	MD
en-wikipedia-org-2559	14	8	be	be	VB
en-wikipedia-org-2559	14	9	profitable	profitable	JJ
en-wikipedia-org-2559	14	10	to	to	TO
en-wikipedia-org-2559	14	11	use	use	VB
en-wikipedia-org-2559	14	12	most	most	JJS
en-wikipedia-org-2559	14	13	of	of	IN
en-wikipedia-org-2559	14	14	the	the	DT
en-wikipedia-org-2559	14	15	wafer	wafer	NN
en-wikipedia-org-2559	14	16	for	for	IN
en-wikipedia-org-2559	14	17	production	production	NN
en-wikipedia-org-2559	14	18	chips	chip	NNS
en-wikipedia-org-2559	14	19	and	and	CC
en-wikipedia-org-2559	14	20	a	a	DT
en-wikipedia-org-2559	14	21	small	small	JJ
en-wikipedia-org-2559	14	22	portion	portion	NN
en-wikipedia-org-2559	14	23	for	for	IN
en-wikipedia-org-2559	14	24	producing	produce	VBG
en-wikipedia-org-2559	14	25	prototypes	prototype	NNS
en-wikipedia-org-2559	14	26	of	of	IN
en-wikipedia-org-2559	14	27	next	next	JJ
en-wikipedia-org-2559	14	28	generation	generation	NN
en-wikipedia-org-2559	14	29	chips	chip	NNS
en-wikipedia-org-2559	14	30	.	.	.
en-wikipedia-org-2559	15	1	References[edit	references[edit	LS
en-wikipedia-org-2559	15	2	]	]	-RRB-
en-wikipedia-org-2559	15	3	^	^	NN
en-wikipedia-org-2559	15	4	http://www.cmc.ca/	http://www.cmc.ca/	UH
en-wikipedia-org-2559	15	5	^	^	NFP
en-wikipedia-org-2559	15	6	http://www.mosis.com/	http://www.mosis.com/	NNP
en-wikipedia-org-2559	15	7	^	^	NNP
en-wikipedia-org-2559	15	8	http://cmp.imag.fr/	http://cmp.imag.fr/	UH
en-wikipedia-org-2559	15	9	^	^	NN
en-wikipedia-org-2559	15	10	http://www.europractice-ic.com/	http://www.europractice-ic.com/	JJ
en-wikipedia-org-2559	15	11	^	^	NNP
en-wikipedia-org-2559	15	12	http://www.esilicon.com/	http://www.esilicon.com/	NN
en-wikipedia-org-2559	15	13	^	^	.
en-wikipedia-org-2559	15	14	http://www.wafercat.com	http://www.wafercat.com	ADD
en-wikipedia-org-2559	15	15	^	^	NNP
en-wikipedia-org-2559	15	16	http://www.musesemi.com/	http://www.musesemi.com/	NN
en-wikipedia-org-2559	15	17	^	^	FW
en-wikipedia-org-2559	15	18	"	"	``
en-wikipedia-org-2559	15	19	BaySand	BaySand	NNP
en-wikipedia-org-2559	15	20	to	to	IN
en-wikipedia-org-2559	15	21	Initiate	initiate	VB
en-wikipedia-org-2559	15	22	a	a	DT
en-wikipedia-org-2559	15	23	Unique	Unique	NNP
en-wikipedia-org-2559	15	24	Low	Low	NNP
en-wikipedia-org-2559	15	25	Cost	cost	NN
en-wikipedia-org-2559	15	26	Multi	Multi	NNP
en-wikipedia-org-2559	15	27	Project	Project	NNP
en-wikipedia-org-2559	15	28	Wafer	Wafer	NNP
en-wikipedia-org-2559	15	29	(	(	-LRB-
en-wikipedia-org-2559	15	30	MPW	MPW	NNP
en-wikipedia-org-2559	15	31	)	)	-RRB-
en-wikipedia-org-2559	15	32	Program	Program	NNP
en-wikipedia-org-2559	15	33	"	"	''
en-wikipedia-org-2559	15	34	.	.	.
en-wikipedia-org-2559	16	1	BaySand	BaySand	NNP
en-wikipedia-org-2559	16	2	Inc.	Inc.	NNP
en-wikipedia-org-2559	16	3	2016	2016	CD
en-wikipedia-org-2559	16	4	-	-	HYPH
en-wikipedia-org-2559	16	5	07	07	CD
en-wikipedia-org-2559	16	6	-	-	HYPH
en-wikipedia-org-2559	16	7	22	22	CD
en-wikipedia-org-2559	16	8	.	.	.
en-wikipedia-org-2559	17	1	Retrieved	Retrieved	NNP
en-wikipedia-org-2559	17	2	2016	2016	CD
en-wikipedia-org-2559	17	3	-	-	SYM
en-wikipedia-org-2559	17	4	08	08	CD
en-wikipedia-org-2559	17	5	-	-	HYPH
en-wikipedia-org-2559	17	6	15	15	CD
en-wikipedia-org-2559	17	7	.	.	.
en-wikipedia-org-2559	18	1	^	^	FW
en-wikipedia-org-2559	18	2	"	"	``
en-wikipedia-org-2559	18	3	Multi	Multi	NNP
en-wikipedia-org-2559	18	4	Project	Project	NNP
en-wikipedia-org-2559	18	5	Wafer	Wafer	NNP
en-wikipedia-org-2559	18	6	Program	Program	NNP
en-wikipedia-org-2559	18	7	(	(	-LRB-
en-wikipedia-org-2559	18	8	MPW	MPW	NNP
en-wikipedia-org-2559	18	9	)	)	-RRB-
en-wikipedia-org-2559	18	10	-	-	:
en-wikipedia-org-2559	18	11	BaySand	BaySand	NNP
en-wikipedia-org-2559	18	12	's	's	POS
en-wikipedia-org-2559	18	13	ASIC	ASIC	NNP
en-wikipedia-org-2559	18	14	UltraShuttle	UltraShuttle	NNP
en-wikipedia-org-2559	18	15	"	"	''
en-wikipedia-org-2559	18	16	.	.	.
en-wikipedia-org-2559	19	1	BaySand	BaySand	NNP
en-wikipedia-org-2559	19	2	Inc.	Inc.	NNP
en-wikipedia-org-2559	19	3	Retrieved	retrieve	VBD
en-wikipedia-org-2559	19	4	2016	2016	CD
en-wikipedia-org-2559	19	5	-	-	SYM
en-wikipedia-org-2559	19	6	08	08	CD
en-wikipedia-org-2559	19	7	-	-	HYPH
en-wikipedia-org-2559	19	8	15	15	CD
en-wikipedia-org-2559	19	9	.	.	.
en-wikipedia-org-2559	20	1	External	external	JJ
en-wikipedia-org-2559	20	2	links[edit	links[edit	,
en-wikipedia-org-2559	20	3	]	]	-RRB-
en-wikipedia-org-2559	20	4	The	the	DT
en-wikipedia-org-2559	20	5	M.I.T.	M.I.T.	NNP
en-wikipedia-org-2559	21	1	1978	1978	CD
en-wikipedia-org-2559	21	2	VLSI	VLSI	NNP
en-wikipedia-org-2559	21	3	System	System	NNP
en-wikipedia-org-2559	21	4	Design	Design	NNP
en-wikipedia-org-2559	21	5	Course	course	NN
en-wikipedia-org-2559	21	6	Retrieved	retrieve	VBN
en-wikipedia-org-2559	21	7	from	from	IN
en-wikipedia-org-2559	21	8	"	"	``
en-wikipedia-org-2559	21	9	https://en.wikipedia.org/w/index.php?title=Multi-project_wafer_service&oldid=992271048	https://en.wikipedia.org/w/index.php?title=Multi-project_wafer_service&oldid=992271048	NNP
en-wikipedia-org-2559	21	10	"	"	''
en-wikipedia-org-2559	21	11	Categories	category	NNS
en-wikipedia-org-2559	21	12	:	:	:
en-wikipedia-org-2559	21	13	Electronic	electronic	JJ
en-wikipedia-org-2559	21	14	design	design	NN
en-wikipedia-org-2559	21	15	automation	automation	NN
en-wikipedia-org-2559	21	16	Electronic	electronic	JJ
en-wikipedia-org-2559	21	17	engineering	engineering	NN
en-wikipedia-org-2559	21	18	Semiconductor	semiconductor	NN
en-wikipedia-org-2559	21	19	device	device	NN
en-wikipedia-org-2559	21	20	fabrication	fabrication	NN
en-wikipedia-org-2559	21	21	Navigation	Navigation	NNP
en-wikipedia-org-2559	21	22	menu	menu	NN
en-wikipedia-org-2559	21	23	Personal	personal	JJ
en-wikipedia-org-2559	21	24	tools	tool	NNS
en-wikipedia-org-2559	21	25	Not	not	RB
en-wikipedia-org-2559	21	26	logged	log	VBN
en-wikipedia-org-2559	21	27	in	in	IN
en-wikipedia-org-2559	21	28	Talk	Talk	NNP
en-wikipedia-org-2559	21	29	Contributions	Contributions	NNP
en-wikipedia-org-2559	21	30	Create	Create	NNP
en-wikipedia-org-2559	21	31	account	account	NN
en-wikipedia-org-2559	21	32	Log	Log	NNP
en-wikipedia-org-2559	21	33	in	in	IN
en-wikipedia-org-2559	21	34	Namespaces	Namespaces	NNP
en-wikipedia-org-2559	21	35	Article	Article	NNP
en-wikipedia-org-2559	21	36	Talk	talk	NN
en-wikipedia-org-2559	21	37	Variants	variant	VBZ
en-wikipedia-org-2559	21	38	Views	view	NNS
en-wikipedia-org-2559	21	39	Read	read	VBP
en-wikipedia-org-2559	21	40	Edit	edit	NN
en-wikipedia-org-2559	21	41	View	View	NNP
en-wikipedia-org-2559	21	42	history	history	NN
en-wikipedia-org-2559	21	43	More	More	JJR
en-wikipedia-org-2559	21	44	Search	Search	NNP
en-wikipedia-org-2559	21	45	Navigation	Navigation	NNP
en-wikipedia-org-2559	21	46	Main	Main	NNP
en-wikipedia-org-2559	21	47	page	page	NN
en-wikipedia-org-2559	21	48	Contents	content	VBZ
en-wikipedia-org-2559	21	49	Current	current	JJ
en-wikipedia-org-2559	21	50	events	event	NNS
en-wikipedia-org-2559	21	51	Random	random	JJ
en-wikipedia-org-2559	21	52	article	article	NN
en-wikipedia-org-2559	21	53	About	about	IN
en-wikipedia-org-2559	21	54	Wikipedia	Wikipedia	NNP
en-wikipedia-org-2559	21	55	Contact	Contact	NNP
en-wikipedia-org-2559	21	56	us	-PRON-	PRP
en-wikipedia-org-2559	21	57	Donate	Donate	NNP
en-wikipedia-org-2559	21	58	Contribute	contribute	NN
en-wikipedia-org-2559	21	59	Help	help	NN
en-wikipedia-org-2559	21	60	Learn	learn	VB
en-wikipedia-org-2559	21	61	to	to	TO
en-wikipedia-org-2559	21	62	edit	edit	VB
en-wikipedia-org-2559	21	63	Community	community	NN
en-wikipedia-org-2559	21	64	portal	portal	JJ
en-wikipedia-org-2559	21	65	Recent	recent	JJ
en-wikipedia-org-2559	21	66	changes	change	NNS
en-wikipedia-org-2559	21	67	Upload	upload	JJ
en-wikipedia-org-2559	21	68	file	file	NN
en-wikipedia-org-2559	21	69	Tools	tool	NNS
en-wikipedia-org-2559	21	70	What	what	WP
en-wikipedia-org-2559	21	71	links	link	NNS
en-wikipedia-org-2559	21	72	here	here	RB
en-wikipedia-org-2559	21	73	Related	relate	VBN
en-wikipedia-org-2559	21	74	changes	change	VBZ
en-wikipedia-org-2559	21	75	Upload	upload	JJ
en-wikipedia-org-2559	21	76	file	file	VBP
en-wikipedia-org-2559	21	77	Special	special	JJ
en-wikipedia-org-2559	21	78	pages	page	NNS
en-wikipedia-org-2559	21	79	Permanent	permanent	JJ
en-wikipedia-org-2559	21	80	link	link	NN
en-wikipedia-org-2559	21	81	Page	Page	NNP
en-wikipedia-org-2559	21	82	information	information	NN
en-wikipedia-org-2559	21	83	Cite	cite	VB
en-wikipedia-org-2559	21	84	this	this	DT
en-wikipedia-org-2559	21	85	page	page	NN
en-wikipedia-org-2559	21	86	Wikidata	wikidata	NN
en-wikipedia-org-2559	21	87	item	item	NN
en-wikipedia-org-2559	21	88	Print	print	NN
en-wikipedia-org-2559	21	89	/	/	SYM
en-wikipedia-org-2559	21	90	export	export	NN
en-wikipedia-org-2559	21	91	Download	Download	NNP
en-wikipedia-org-2559	21	92	as	as	IN
en-wikipedia-org-2559	21	93	PDF	PDF	NNP
en-wikipedia-org-2559	21	94	Printable	Printable	NNP
en-wikipedia-org-2559	21	95	version	version	NN
en-wikipedia-org-2559	21	96	Languages	language	VBZ
en-wikipedia-org-2559	21	97	Русский	Русский	NNP
en-wikipedia-org-2559	21	98	Edit	Edit	NNP
en-wikipedia-org-2559	21	99	links	link	NNS
en-wikipedia-org-2559	21	100	This	this	DT
en-wikipedia-org-2559	21	101	page	page	NN
en-wikipedia-org-2559	21	102	was	be	VBD
en-wikipedia-org-2559	21	103	last	last	RB
en-wikipedia-org-2559	21	104	edited	edit	VBN
en-wikipedia-org-2559	21	105	on	on	IN
en-wikipedia-org-2559	21	106	4	4	CD
en-wikipedia-org-2559	21	107	December	December	NNP
en-wikipedia-org-2559	21	108	2020	2020	CD
en-wikipedia-org-2559	21	109	,	,	,
en-wikipedia-org-2559	21	110	at	at	IN
en-wikipedia-org-2559	21	111	11:59	11:59	CD
en-wikipedia-org-2559	21	112	 	  	_SP
en-wikipedia-org-2559	21	113	(	(	-LRB-
en-wikipedia-org-2559	21	114	UTC	UTC	NNP
en-wikipedia-org-2559	21	115	)	)	-RRB-
en-wikipedia-org-2559	21	116	.	.	.
en-wikipedia-org-2559	22	1	Text	text	NN
en-wikipedia-org-2559	22	2	is	be	VBZ
en-wikipedia-org-2559	22	3	available	available	JJ
en-wikipedia-org-2559	22	4	under	under	IN
en-wikipedia-org-2559	22	5	the	the	DT
en-wikipedia-org-2559	22	6	Creative	Creative	NNP
en-wikipedia-org-2559	22	7	Commons	Commons	NNP
en-wikipedia-org-2559	22	8	Attribution	Attribution	NNP
en-wikipedia-org-2559	22	9	-	-	HYPH
en-wikipedia-org-2559	22	10	ShareAlike	ShareAlike	NNP
en-wikipedia-org-2559	22	11	License	License	NNP
en-wikipedia-org-2559	22	12	;	;	,
en-wikipedia-org-2559	22	13	additional	additional	JJ
en-wikipedia-org-2559	22	14	terms	term	NNS
en-wikipedia-org-2559	22	15	may	may	MD
en-wikipedia-org-2559	22	16	apply	apply	VB
en-wikipedia-org-2559	22	17	.	.	.
en-wikipedia-org-2559	23	1	By	by	IN
en-wikipedia-org-2559	23	2	using	use	VBG
en-wikipedia-org-2559	23	3	this	this	DT
en-wikipedia-org-2559	23	4	site	site	NN
en-wikipedia-org-2559	23	5	,	,	,
en-wikipedia-org-2559	23	6	you	-PRON-	PRP
en-wikipedia-org-2559	23	7	agree	agree	VBP
en-wikipedia-org-2559	23	8	to	to	IN
en-wikipedia-org-2559	23	9	the	the	DT
en-wikipedia-org-2559	23	10	Terms	term	NNS
en-wikipedia-org-2559	23	11	of	of	IN
en-wikipedia-org-2559	23	12	Use	Use	NNP
en-wikipedia-org-2559	23	13	and	and	CC
en-wikipedia-org-2559	23	14	Privacy	Privacy	NNP
en-wikipedia-org-2559	23	15	Policy	Policy	NNP
en-wikipedia-org-2559	23	16	.	.	.
en-wikipedia-org-2559	24	1	Wikipedia	Wikipedia	NNP
en-wikipedia-org-2559	24	2	®	®	NNPS
en-wikipedia-org-2559	24	3	is	be	VBZ
en-wikipedia-org-2559	24	4	a	a	DT
en-wikipedia-org-2559	24	5	registered	registered	JJ
en-wikipedia-org-2559	24	6	trademark	trademark	NN
en-wikipedia-org-2559	24	7	of	of	IN
en-wikipedia-org-2559	24	8	the	the	DT
en-wikipedia-org-2559	24	9	Wikimedia	Wikimedia	NNP
en-wikipedia-org-2559	24	10	Foundation	Foundation	NNP
en-wikipedia-org-2559	24	11	,	,	,
en-wikipedia-org-2559	24	12	Inc.	Inc.	NNP
en-wikipedia-org-2559	24	13	,	,	,
en-wikipedia-org-2559	24	14	a	a	DT
en-wikipedia-org-2559	24	15	non	non	JJ
en-wikipedia-org-2559	24	16	-	-	JJ
en-wikipedia-org-2559	24	17	profit	profit	JJ
en-wikipedia-org-2559	24	18	organization	organization	NN
en-wikipedia-org-2559	24	19	.	.	.
en-wikipedia-org-2559	25	1	Privacy	privacy	NN
en-wikipedia-org-2559	25	2	policy	policy	NN
en-wikipedia-org-2559	25	3	About	about	IN
en-wikipedia-org-2559	25	4	Wikipedia	Wikipedia	NNP
en-wikipedia-org-2559	25	5	Disclaimers	Disclaimers	NNPS
en-wikipedia-org-2559	25	6	Contact	Contact	NNP
en-wikipedia-org-2559	25	7	Wikipedia	Wikipedia	NNP
en-wikipedia-org-2559	25	8	Mobile	Mobile	NNP
en-wikipedia-org-2559	25	9	view	view	NN
en-wikipedia-org-2559	25	10	Developers	Developers	NNP
en-wikipedia-org-2559	25	11	Statistics	Statistics	NNP
en-wikipedia-org-2559	25	12	Cookie	Cookie	NNP
en-wikipedia-org-2559	25	13	statement	statement	NN