id	author	title	date	pages	extension	mime	words	sentences	flesch	summary	cache	txt
work_twsq23tvmza2vc5aoao33bijmu	Amish Desai	A MEMS electrostatic particle transportation system	1999.0	6	.pdf	application/pdf	3196	345	67	A Mems Electrostatic Particle Transportation System Micro Electro Mechanical Systems, 1998. electrostatically transport particles with sizes 5-10pm forces between the particle and the solid surface. surface adhesive forces and particle charging hinder the force on the particle is consistent with our observations transport particles larger than 10 pm such as forced air The adhesion forces between a ym-sized particle and a particle and surface contact areas, experimental results the electrode panel surface, the traveling electric field Fig. 6: Particle transported to edge of electrodes motion was due to DEP force and not just particle and adhesive forces on the particle is the key to from the particle to the electrodes is increased. F,(x,y.p): image force due charges on particle Fig. 9: Schematic of particle forces DEP Force simulation for 8pm SiOz Particle Fig. 10: DEP force on particle the particle is on top of the electrode. between the particle and the insulation surface differ 	./cache/work_twsq23tvmza2vc5aoao33bijmu.pdf	./txt/work_twsq23tvmza2vc5aoao33bijmu.txt